@article{Groot_Berning_2019, title={Deterministic Single-Ion Implantation of Rare-Earth Ions for Nanometer-Resolution Color-Center Generation}, volume={123}, ISSN={1079-7114}, url={http://dx.doi.org/10.1103/PhysRevLett.123.106802}, DOI={10.1103/physrevlett.123.106802}, number={10}, journal={Physical Review Letters}, publisher={American Physical Society (APS)}, author={Groot-Berning, Karin and Kornher, Thomas and Jacob, Georg and Stopp, Felix and Dawkins, Samuel T. and Kolesov, Roman and Wrachtrup, Jörg and Singer, Kilian and Schmidt-Kaler, Ferdinand}, year={2019}, month={Sep} }