Publications 2020
Conference Proceedings
- J. Bischoff, T. Pahl, P. Lehmann, E. Manske
Model-based dimensional optical metrology
Proc. SPIE 11352 (2020) 113520P
- L. Hüser, P. Lehmann
Resolution enhancement through nearfield-assistance in interference microscopy
tm - Technisches Messen 87, S1 (2020) 28-33
Journals
- T. Pahl, S. Hagemeier, M. Künne, D. Yang, P. Lehmann
3D modeling of coherence scanning interferometry on 2D surfaces using FEM
Optics Express Vol. 28 No. 26 (2020)
- P. Gollor, M. Schake, S. Tereschenko, K. Roetmann, K. Mann, B. Schäfer, G. Uhlrich, M. Haberland, P. Lehmann
Combination of a novel RGB interferometer using double pulse illumination and a Hartmann-Shack wavefront sensor for dynamic areal topography measurement
tm - Technisches Messen 87, 9 (2020) 523-534
- T. Pahl, S. Hagemeier, L. Hüser, W. Xie, P. Lehmann
Two-dimensional modelling of systematic surface height deviations in optical interference microscopy based on rigorous near field calculation
Journal of Modern Optics, 67, 11 (2020) 963-973
- L. Hüser, P. Lehmann
Microsphere-assisted interferometry with high numerical apertures for 3D topography measurements
Applied Optics 59.6 (2020): 1695-1702
- P. Lehmann, S. Tereschenko, P. Gollor, M. Schake, S. Hagemeier
In-Prozess Messung von 3D-Oberflächentopographien mit interferometrischen Verfahren
Jahresmagazin Mess- und Sensortechnik (2019/2020) 44-49