Production of specific 3D nano-particles and nano-structures for the development of an automated optical characterization using high-resolution interference microscopy

Figure: Adaptive Linnik interferometer setup for 3D difference measurements. M1 represents the measurement arm including the sample and M2 the reference arm with the reference object on top of the piezo-driven stage.

The optical characterization of micro- and nanoparticles often needs to meet high-quality standards. To control the fabrication of those structures highly precise measurement methods are necessary. In this project a Linnik interferometer is used to optically measure structures like this. The research focus lies on the development of a measurement method to reliably detect small deviations from a desired topography. To achieve this the interferometer does not have a planar mirror in the reference arm, but a reference object of known geometry and quality. When a depth scan of the object is performed in the measurement arm the difference to the reference geometry is measured and not the topography of the object itself. This project is a collaboration with the institute of nanostructures and analytics (INA) of the university of Kassel, that is providing the measurement structures.

Funded by:


M.Sc. Marco Künne

B. Allendorf, E. Käkel, Uh-Myong Ha, S. Hagemeier, H. Hillmer, P. Lehmann
Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles
Opt. Lett. 44 (2019) 3550-3553