Publications 2026
Conference Proceedings
- L. Hüser, A. Stelter, P. Lehmann
Resolving structures below the diffraction limit using microsphere-assisted and immersion coherence scanning interferometry
EPJ Proc. SPIE 14084, Optics and Photonics for Advanced Dimensional Metrology IV, 1408409 (2026)
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Journals
- M. Künne, F. Rosenthal, P. Lehmann
Monte-Carlo simulation of the three dimensional transfer function for coherence scanning interferometry
J. Phys. Photonics 8, 015010 (2026)
- F. Rosenthal, T. Pahl, T. Eckhardt, M. Künne, P. Lehmann
The three-dimensional transfer function in surface topography measurement by coherence scanning interferometry
tm - Technisches Messen (2026)
- M. Künne, P. Kästner, B. Elsaka, L.P. Alter, S. Liebermann, M. S. Que Iskhandar, H. Hillmer, P. Lehmann
Linnik-interferometer with ring-shaped optical MEMS shutter array enabling dynamic annular illumination for fast and reliable measurement of sloped and curved surface microstructures
J. Phys. Photonics 8, 025045 (2026)