Publications

Books and Book Chapters

  • H. Hillmer, C. Woidt, A. Kobylinskiy, M. Kraus, A. Istock, M.S. Q. Iskhandar, R. Brunner and T. Kusserow, Monography “Optical Fiber Interferometric Sensors - New Production Methodologies and Novel Applications”, Chapter 1:  entitled “Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology - A Comparison of Size Requirements, Performance, and new Concepts”.  MDPI Publishing house, Basel, Eds: Maria de Fatima Domingues, Nélia J. Alberto, Paulo André, pp. 5-50, ISBN 978-3-0365-2249-4 (2022)

  • K. Hasan, S. Baby, S. Muringakodan, A. Nandakumar, M. S. Q. Iskhandar, V. Hillmer, Q. Li, G. Xu, and H. Hillmer: Energy Saving and Amortization Time Simulation for a Model Room with MEMS Smart Glazing: Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), Vol. 77, pp. 163-188, ISBN 978-3-87480-369-4 (2021)

  • S. Nazemroaya, M. Iskhandar, Md K. Hasan, Q. Li, H. Hillmer: Concepts for clear View through 3D Structured Surfaces of MEMS Smart Glass: Design, Implementation, Characterization and Validation. Jahrbuch Oberflächentechnik, Leuze Verlag, Band 76, S. 101-115, ISBN: 978-3-87480-364-9 (2020)

  • M. S. Q. Iskhandar, B. Al-Qargholi, M. M. Khan, A. Tatzel, H. Luo, S. Nazemroaya, Q. Li, and H. Hillmer: Development of optical MEMS-based micromirror arrays for smart window applications: Implementation of subfield addressing and reliability measurements. Jahrbuch Oberflächentechnik, Leuze Verlag, Vol. 52, pp. 93-107, ISBN 978-3-87480-357-1 (2019)
  • M. Khan, B. Al-Qargholi, M. Iskhandar, S. Akhundzada, A. Tatzel, H. Hillmer: MEMS-basierte Mikrospiegel-Arrays für eine aktive Lichtlenkung in intelligenten Fenstern. Jahrbuch Oberflächentechnik, Band 74, pp. 119-132 (2018)
  • N. Götte, T. Kusserow, T. Winkler, C. Sarpe, L. Englert, D. Otto, T. Meinl, Y. Khan, B. Zielinski, A. Senftleben, M. Wollenhaupt, H. Hillmer, and T. Baumert: Temporally shaped femtosecond laser pulses for creation of functional sub-100 nm structures in dielectrics. K. König and A. Ostendorf (Ed.): Optically Induced Nanostructures: de Gruyter, Berlin, pp. 47-72 (2015)
  • T. Meinl, N. Götte, Y. Khan, T. Kusserow, C. Sarpe, J. Köhler, M. Wollenhaupt, A. Senftleben, T. Baumert, H. Hillmer: Material Processing of Dielectrics via Temporally Shaped Femtosecond Laser Pulses as Direct Patterning Method for Nanophotonic Applications. P. Petkov, D. Tsiulyanu, W. Kulisch, C. Popov (Hrsg.): Nanoscience Advances in CBRN Agents Detection, Information and Energy Security: Springer Science+ Business Media, Dordrecht, pp. 29-34 (2015)
  • S. Blom, J. Shrestha, N. Storch, J. Sonksen, H. Hilllmer: Technology for a Highly Sensitive Sensor System Based on Competing Modes in Semiconductor. P. Petkov, D. Tsiulyanu, W. Kulisch, C. Popov (Hrsg.): Nanoscience Advances in CBRN Agents Detection, Information and Energy Security: Springer Science+ Business Media, Dordrecht, pp. 409-414 (2015)
  • A. Tatzel, B. Einwögerer, I. Bergmair, N. Worapattrakul, B. Khudhair, V. Viereck, H. Hillmer: Micromirror Arrays for Smart Personal Environments. P. Petkov, D. Tsiulyanu, W. Kulisch, C. Popov (Hrsg.): Nanoscience Advances in CBRN Agents Detection, Information and Energy Security: Springer Science+ Business Media, Dordrecht, pp. 505-510 (2015)
  • H. Hillmer, T. Kusserow: Semiconductor lasers. F. Träger (Hrsg.): Springer Handbook of Lasers and Optics, 2nd ed. Springer Verlag, pp 757-792, (2012)
  • A. Jäkel, Q. Li, V. Viereck, H. Hillmer: Active Windows for Daylight Guiding Applications. A. Voß (Hrsg.): Nanotechnology and Energy: Pan Stanford Publishing, pp. 72-80 (2012)
  • C. Woidt, O. Setyawati, A. Albrecht, M. Engenhorst, V. Daneker, T. Woit, S. Wittzack, F. Köhler, H. H. Mai, M. Bartels and H. Hillmer: Micromachined Tunable Fabry-Pérot Filter Integrated into a Miniaturized Spectrometer for Low-Cost Applications. Johann Peter Reithmaier, Perica Paunovic, Wilhelm Kulisch, Cyril Popov, Plamen Petkov (Hrsg.): Nanotechnological Basis for Advanced Sensors: Springer, Dordrecht, pp. 537-541 (2011)
  • T. Kusserow, M. Wulf, R. Zamora, B. Vengatesan, B. Witzigmann, H. Hillmer: Photonic Crystal Polarizer Element on InP/Air Membranes for Optical MEMS Applications. S. Chua; J. Teng; A. Danner (Hrsg.): Compound Semiconductor Photonics: Pan Stanford, Singapore, pp. 66-68 (2010)
  • N. Dharmarasu, H. Hillmer: Compound semiconductors. Y.B. Gianchandani; O.  Tabata; H. Zappe (Hrsg.): Comprehensive Microsystems: Elsevier, Amsterdam, pp 25-51 (2008)
  • H. Hillmer; S. Hansmann: Semiconductor lasers. F. Träger (Hrsg.): Springer Handbook of Lasers and Optics Springer Verlag, pp. 695-726 (2007)
  • H. Hillmer; Y. Wang; T. Kusserow; S. Irmer; N. Dharmarasu; A. Hasse; M. Bartels; M. Schwarz; J. Börcsök, O. Mikami: Optoelectronic technologies for optical data communication in safety computer systems for process control and fabrication. T. Aven J.E. Vinnem (Hrsg.): Risk, reliability and Societal Safety: Taylor & Francis, pp.  377-384 (2007)
  • M. Joodaki, H. Hillmer: RF SiGe HBTs: Some new trends for low cost, high performance and high power. S.B. Kobadze (Hrsg.): Solid State Electronics Research Advances: Nova Science Publishers, pp. 345-368 (2007)
  • H. Hillmer; J. Salbeck: 8. Materialien der Optoelektronik - Grundlagen und Anwendungen. R. Kassing (Hrsg.): Bergmann/Schaefer: Lehrbuch der Experimentalphysik, Festkörper: Walter de Gruyter Verlag, pp. 707-820 (2005)
  • H. Hillmer, F. Träger: Einführung in die Nanotechnologie. Telekommunikation Aktuell 58, pp. 1 (2004)
  • H. Hillmer, R. Germann: Introductory article: Photonic Materials for Optical Communications. MRS Bulletin 28, pp. 340-344 (2003)
  • H. Hillmer: Der Transistor - die Entwicklung von den Anfängen bis zu den frühen integrierten Schaltungen. Der Fernmeldeingenieur 54, pp. 1-107 (2000)
  • R. Schatz, D. McDonald, H. Hillmer: Parameter extraction. G. Guekos (Hrsg.): Photonic Devices for Telecommunications: Springer Verlag, Heidelberg, pp. 235 (1999)
  • H. Hillmer: (Hrsg.): Das Materialsystem AlGaInAs - Grundlagen, Eigenschaften und Anwendungen in der Photonik, Habilitationsschrift TH Darmstadt (1996)
  • H. Hillmer: 3. Materialien für die optische Nachrichtentechnik und deren Eigenschaften, Halbleiter, Gläser, Polymere und LiNbO3. (Hrsg.): Optische Telekommunikationssysteme: Damm Verlag, pp. 63–108 (1996)
  • H. Hillmer: Ambipolarer Ladungsträger-Transport in Halbleiter-Heterostrukturen. Universität Stuttgart, Diss. (1989)
  • G. Mahler, T. Kuhn, A. Forchel, H. Hillmer: Optical decay and spatial relaxation. H. Haug (Hrsg.): Nonlinear optical properties of semiconductors: Academic Press, pp.  159 (1988)

Refereed Publications

  • B. Kaban, S. Bagatur, M. Soter, H. Hillmer, T. Fuhrmann-Lieker: Reversible Photo-Induced Reshaping of Imprinted Microstructures Using a Low Molecular Azo Dye. Polymers, 14(3):586, (2022). DOI: https://doi.org/10.3390/polym14030586

  • M. Künne, S. Hagemeier, E. Käkel, H. Hillmer und P. Lehmann: Investigation of measurement data of low-coherence interferometry at tilted surfaces in the 3D spatial frequency domain, De Gruyter, tm – Technisches Messen 2021; 88(S1): S1–S6.

  • W. Janik, A. Zygmanowski, H. Wolff and H. Hillmer: Non-invasive, time-efficient measurement of the plasma sodium concentration for individualized dialysis, SAGE 2021.

  • H. Hillmer, C. Woidt, Aliaksei Kobylinskiy, Matthias Kraus, André Istock, M. S. Q. Iskhandar, R. Brunner and T. Kusserow: Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology—A Comparison of Size Requirements, Performance, and New Concepts, Photonics 2021, 8.

  • M. H. Kamrul, S. Baby, S. Muringakodan, A. Nandakumar, M. S. Q. Iskhandar, V. Hillmer, Q. Li, G. Xu, and H. Hillmer: Energy Saving and Amortization Time Simulation for a Model Room with MEMS Smart Glazing, In: Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), Vol. 77, (2021).

  • A. Kobylinskiy, M. Kraus, X. Uwurukundo. H. Hillmer and R. Bruner: Simple but effective-strong efficiency boost for a linear variable filter-based spectrometer. In: Journal of Optical Microsystems (2021). DOI: 10.1117/1.jom.1.4.044501

  • H. Hillmer, C. Woidt, A. Kobylinskiy, M. Kraus, A. Istock, M.S. Q. Iskhandar, R. Brunner and T. Kusserow: Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology - A Comparison of Size Requirements, Performance, and new Concepts. In: MDPI Photonics Volume 8, Issue 8, pp. 332 (2021). DOI:10.3390/photonics8080332

  • M.R. Amirzada, Q. Li and H. Hillmer: MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces. In: Opt Quant Electron 53, 210 (2021). DOI: 10.1007/s11082-021-02846-7

  • H. Hillmer, C. Woidt, A. Istock, A. Kobylinskiy, D.T. Nguyen, N. Ahmed, R. Brunner and T. Kusserow: Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers. In: Nanomaterials, 11(1), 164 (2021). DOI: 10.3390/nano11010164

  • H. Hillmer, M.S.Q. Iskhandar, M.K.Hasan, S. Akhundzada, B. Al-Qargholi, A. Tatzel: MOEMS micromirror arrays in smart windows for daylight steering. In: J. Optical Microsystems, 1(1), 014502 (2021). DOI: 10.1117/1.JOM.1.1.014502
  • N. Worapattrakul, A. Tatzel, V. Viereck, H. Hillmer: Planar Free-Standing Metal Layer Fabrication: Implementing Sub-Structures in Micromirror Arrays for Light Steering Applications. In: Micro and Nano Systems Letters, (2020). DOI: https://doi.org/10.1186/s40486-020-00124-x
  • S. Nazemroaya, M. Iskhandar, Md K. Hasan, Q. Li, H. Hillmer: Concepts for clear View through 3D Structured Surfaces of MEMS Smart Glass: Design, Implementation, Characterization and Validation. In: Jahrbuch Oberflächentechnik, Leuze Verlag, Band 76, (2020). 
    ISBN: 978-3-87480-364-9
  • M. Kraus, E. Förster, V. Bagusat, T. Hönle, X. Uwurukundo, P. Bohnert, R. Brüning, H. Hillmer, R. Brunner: Compact, astigmatism corrected cross-grating spectrometer. In EPJ Web Conf., 238, 03005, (2020). DOI: https://doi.org/10.1051/epjconf/202023803005 
  • D. Löber, S. Dey, B. Kaban, F. Roesler, M. Maurer, H. Hillmer, R. Pietschnig: 3D Micro/Nanopatterning of a Vinylferrocene Copolymer. In: Molecules, 25(10), 2438, (2020). DOI: https://doi.org/10.3390/molecules25102438
  • A. Kobylinskiy, B. Laue, E. Förster, B. Höfer, Y. Shen, H. Hillmer, R. Brunner: Substantial increase in detection efficiency for filter array-based spectral sensors. (Editor's pick)
    In: Applied Optics, Vol. 59, No. 8 /10 No. 8 /10 March, pp. 2443-2451, (2020). DOI: https://doi.org/10.1364/AO.382714
  • M. Kraus, E. Förster, V. Bagusat, T. Hönle, X. Uwurkundo, P. Bohnert, R. Brünning, H. Hillmer, R. Brunner: Realization of a compact cross-grating spectrometer and validating experimental tests. In: Applied Optics, Vol. 59, No 5, (2020). DOI: https://doi.org/10.1364/AO.379595 
  • J. Meibaum, S. Krause, H. Hillmer, D. Marcelli, C. Strohhoefer: Identification and characterization of fluorescent substances in spent dialysis fluid. In: International Journal of Artificial Organs, 43(9):579-586 (2020). DOI: 10.1177/0391398820901826 Epub 2020 Feb 4. PMID: 32013679
  • F. Roesler, B. Kaban, D. Klintuch, U. Ha, C. Bruhn, H. Hillmer, R. Pietschnig: Tailoring Phospholes for Imprint of Fluorescent 3D Structures. In: European Journal of Inorganic Chemistry, (2019). DOI: https://doi.org/10.1002/ejic.201900742
  • M. S. Q. Iskhandar, B. Al-Qargholi, M. M. Khan, A. Tatzel, H. Luo, S. Nazemroaya, Q. Li, and H. Hillmer: Development of optical MEMS-based micromirror arrays for smart window applications: Implementation of subfield addressing and reliability measurements. In: Jahrbuch Oberflächentechnik, Leuze Verlag (Yearbook surface technology, Leuze publishing house), Vol. 52, (2019), ISBN number 978-3-87480-357-1
  • H. Wilke, N. M. Hoinka, T. Kusserow, T. Fuhrmann-Lieker, H. Hillmer: Determination of the saturation length and study of its effects in optical gain measurements of organic semiconductors using the variable stripe length method. In: Applied Physics Letters, Vol.115 173301 pp.1-4,  (2019). DOI: https://doi.org/10.1063/1.5121492
  • B. Allendorf, E. Käkel, U. Ha, S. Hagemeier, H. Hillmer, P. Lehmann: Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles. In: Optics Letters Vol. 44, Issue 14, pp. 3550-3553, (2019). DOI: https://doi.org/10.1364/OL.44.003550
  • M. Smolarczyk, L. Jablonka, S. Reuter, H. Hillmer: Self-Aligned Molding Technology (SAMT) for Fabrication of 3D Structures with a Foldable Imprint Mold. In: Applied Nanoscience, Online First Articles, (2019). DOI: https://doi.org/10.1007/s13204-019-01050-0
  • V. Bagusat, M. Kraus, E. Förster, D. Thomae, T. Hönle, R. Brüning, H. Hillmer, R. Brunner: Concept and optical design of a compact cross-grating spectrometer. In: Journal of the Optical Society of America A, Vol. 36, Issue 3, pp. 345-352, (2019)
  • M. Khan, B. Al-Qargholi, M. Iskhandar, S. Akhundzada, A. Tatzel, H. Hillmer: MEMS-basierte Mikrospiegel-Arrays für eine aktive Lichtlenkung in intelligenten Fenstern. In: Jahrbuch Oberflächentechnik, Band 74, pp. 119-132, (2018)
  • H. Hillmer, B. Al-Qargholi, M. M. Khan, N. Worapattrakul, H. Wilke, C. Woidt, A. Tatzel: Optical MEMS-based micromirror arrays for active light steering in smart windows. In: JJAP, Vol. 57, 08PA07, pp. 1-13, no. 8S2, (2018)
  • M. Khan, B. Al-Qargholi, M. Iskhandar, S. Akhundzada, A. Tatzel, H. Hillmer: MEMS-basierte Mikrospiegel-Arrays für eine aktive Lichtlenkung in intelligenten Fenstern. In: Jahrbuch Oberflächentechnik, Band 74, pp. 119-132 (2018)
  • J. Letnev, W. Hazenbiller, A. Osipowicz, A. Beglarian, H. Bouquet, G. Drexlin, F. Glück, J. Garbe, H. Hillmer, P. Marte, T. Thümmler, Ch. Weinheimer: Technical design and commissioning of a sensor net for fine-meshed measuring of the magnetic field at the KATRIN spectrometer. In: Journal of Instrumentation, Vol. 13, (2018)
  • Y. Shen, A. Istock, A. Zaman, C. Woidt, H. Hillmer: Fabrication and characterization of multi-stopband Fabry–Pérot filter array for nanospectrometers in the VIS range using SCIL nanoimprint technology. In: Applied Nanoscience, Vol. 8: Issue 6, pp. 1415–1425 (2018)
  • U-M. Ha, B. Kaban, A. Tomita, K. Krekić, D. Klintuch, R. Pietschnig, A. Ehresmann, D. Holzinger, H. Hillmer: Multifunctional guest–host particles engineered by reversal nanoimprint lithography. In: Applied Nanoscience, Vol. 8: Issue 5, pp. 1161–1169 (2018)
  • M. Taimoor, A. Alatawi, S. Reuter, H. Hillmer, T. Kusserow: Single-step inductively coupled plasma etching of sputtered Nb2O5/SiO2 multilayer stacks using chromium etch mask. In: Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films, Volume 35, pp. 4, Pages 041302, Doi 10.1116/1.4983683, Url: dx.doi.org10.1116/1.4983683, (2017)
  • Y. Saddeek; K. Saber; A. El-Maaref; H. Hillmer; H. Wilke; M. Abdelawwad: Spectroscopic Properties and Judd-Ofelt Analysis of Dy3+ ions in Molybdenum Borosilicate Glasses. In: Journal of Luminescene (2017), Manusript number: LUMIN_2017_774_R1
  • S. Reuter ; M. Smolarczyk ; A. Istock ; U. Ha ; O. Schneider ; N. Worapattrakul ; S. Nazemroaya ; H. Hoang ; L. Gomer ; F. Pilger ; M. Maniak ; H. Hillmer : Bending Properties of two- and three-dimensional-shaped nanoparticles fabricated via substrate conformal imprint lithography. In: Springer Science+Business Media Dordrecht, Journal of Nanoparticle Research (2017) 19: 184, dx.doi.org10.1007/s11051-017-3886-7
  • N. Götte ; T. Winkler ; T. Meinl ; T. Kusserow ; B. Zielinski ; C. Sarpe ; A. Senftleben ; H. Hillmer ; T. Baumert : Temporal Airy pulses for controlled high aspect ratio nanomachining of dielectrics. In: Optica. Vol. 3, (4), pp. 389-395 (2016) ; http://dx.doi.org/10.1364/OPTICA.3.000389
  • D. T. Nguyen ; M. Ababtain ; I. Memon ; A. Ullah ; A. Istock ; C. Woidt ; W. Xie ; P. Lehmann ; H. Hillmer : 3D nanoimprint for NIR Fabry-Pérot filter arrays: fabrication, characterization and comparison of different cavity designs. In: Applied Nanoscience. (2016),6,8, pp. 1127-1135; http://dx.doi.org/10.1007/s13204-016-0524-0 
  • V.R. Kolli ; C. Woidt ; H. Hillmer : Residual-layer-free 3D nanoimprint using hybrid soft templates. In: Microelectronic Engineering : Vol. 149, pp. 159-165 (2016)
  • J.C. Shrestha ; S. Blom ; B. Witzigmann ; H. Hillmer : Investigation of Relative Intensity Noise in Asymmetric External Cavity Semiconductor Laser Sensors: Influence of Dual-Line Spectral Separation and Linewidth Enhancement Factor. In: IEEE Sensors Journal : Vol. 15, pp. 6619-6624 (2015)
  • V.R. Kolli ; C. Woidt ; H. Hillmer : Patterning of Polymer Arrays with Enhanced Aspect-Ratio Using Hybrid Substrate Conformal Imprint Lithography. In: Haider F. Abdul Amir, Alexander M. Korsunsky and Maria Mucha (Ed.): Advanced Materials Research : Vol. 1119, pp. 179-183 (2015)
  • I. Memon ; Y. Shen ; A. Khan ; C. Woidt ; H. Hillmer : Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry-Pérot-filter-array-based nanospectrometers. In: Applied Nanoscience. pp.1-8 (2015); http://dx.doi.org/10.1007/s13204-015-0468-9
  • M.R. Amirzada ; A. Tatzel ; V. Viereck ; H. Hillmer : Surface roughness analysis of SiO2 for PECVD, PVD and IBD on different substrates. In: Applied Nanoscience. pp.1-8 (2015); http://dx.doi.org/10.1007/s13204-015-0432-8
  • A. Ullah; H. Wilke; I. Memon; Y. Shen ; D. T. Nguyen ; C. Woidt ; H. Hillmer: Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry–Pérot filter array with 3D nanoimprinted cavities. In: Journal of Micromechanics and Microengineering. Vol. 25, pp.055019 (2015); http://dx.doi.org/10.1088/0960-1317/25/5/055019
  • T. Fuhrmann-Lieker ; J. Lambrecht ; N. Hoinka ; M. Kiurski ; A. Wiske ; G. Hagelstein ; N. Yurttagül ; M. Abdel-Awwad ; H. Wilke ; F. Messow ; H. Hillmer ; J. Salbeck : Optical amplification and stability of spiroquaterphenyl compunds and blends. In: Journal of the European Optical Society - Rapid publications. Vol. 10, pp.15007 (2015); http://dx.doi.org/10.2971/jeos.2015.15007
  • M. Abdel-Awwad ; H. Luan ; F. Messow ; T. Kusserow ; A. Wiske ; A. Siebert; T. Fuhrmann-Lieker ; J. Salbeck ; H. Hillmer: Optical amplification and photodegradation in Films of spiro-quaterphenyl and its derivatives. In: Journal of Luminescence. Vol. 156, pp.47-54 (2015); http://dx.doi.org/10.1016/j.jlumin.2014.10.065
  • C. Schmidt ; M. Smolarczyk ; L. Gomer ; H. Hillmer ; A. Ehresmann: Artificial sub-µm magnetic patterning by He+ ion bombardment through a mask fabricated by Ultraviolet NanoImprint Lithography (UV-NIL). In: Nuclear Inst. and Methods in Physics Research, B Vol.322, pp.59-62 (2014); http://dx.doi.org/10.1016/j.nimb.2014.01.005
  • F. Messow ; C. Welch ; A. Eifert ; W.C. Ang ; N.S. Hoe ; T. Kusserow ; H. Hillmer: Deep single step vertical ICP-RIE etching of ion beam sputter deposited SiO2/Si multilayer stacks. In: Micorelectron. Eng. Vol. 113, pp.70-73 (2014); http://dx.doi.org/10.1016/j.mee.2013.07.018
  • X. Wang ; A. Albrecht ; H.H. Mai ; C. Woidt ; T. Meinl ; M. Hornung ; M. Bartels ; H. Hillmer: High resolution 3D NanoImprint technology: template fabrication, application in Fabry-Perot-filter-array-based optical nanospectrometers. In: Micorelectron. Eng. Vol. 110, pp.44-51 (2013); http://dx.doi.org/10.1016/j.mee.2013.04.038
  • Y. Monnai ; K. Altmann ; C. Jansen ; H. Hillmer ; M. Koch ; H. Shinoda: Terahertz beam focusing based and variable focusing using programmable diffraction gratings. In: Optics Express Vol. 21 Issue 2, pp.2347-2354 (2013); http://dx.doi.org/10.1364/OE.21.002347
  • Y. Monnai ; K. Altmann ; C. Jansen ; M. Koch ; H. Hillmer: Terahertz beam focusing based on plasmonic waveguide scattering. In: Applied Physics Letters 101, 151116 (2012), http://dx.doi.org/10.1063/1.4759042
  • T. Kusserow ; M. Wulf ; R. Zamora ; K. Kanwar ; H. Hillmer: Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching. In: Microelectronic Engineering (2013), 102, 25-28, http://dx.doi.org/10.1016/j.mee.2012.02.019
  • K. Schultz ; A. Tatzel ; N. Worapattrakul ; C. Woidt ; A. Jäkel ; V. Viereck ; H. Hillmer: Micro- and nano-scaled sensors and actuators for aerospace applications. In: IEEE Technical Digest INSS, E-ISBN 978-1-4673-1785-6 (2012), 102, 1-4, http://dx.doi.org/10.1109/INSS.2012.6240546
  • H. H. Mai ; A. Albrecht ; C. Woidt ; X. Wang ; V. Daneker ; O. Setyawati ; T. Woit ; K. Schultz ; M. Bartels ; H. Hillmer: 3D nanoimprinted Fabry-Pérot filter arrays and methodologies for optical characterization. In: Applied Physics B: Lasers and Optics (2012), 107, 755-764 DOI: http://dx.doi.org/10.1007/s00340-012-5063-0
  • U. Akcakoca ; B. Witzigmann ; R. Zamora ; T. Kusserow ; H. Hillmer: Frequency domain analysis of modes in a photonic crystal micro-opto-electro-mechanical system with periodically arranged circular holes. In: Optical and Quantum Electronics (2012), 44, 273-277
  • Y. Monnai ; H. Shinoda ; H. Hillmer: Focused terahertz radiation formed by coherently scattered surface plasmon polaritons from partially uncorrugated metal surfaces. In: Applied Physics B: Lasers and Optics 104 (2011), S.913-197, DOI: http://dx.doi.org/10.1007/s00340-011-4583-3
  • Y. Monnai ; H. Shinoda ; A. Jäkel ; V. Viereck ; H. Hillmer: Terahertz Focus Steering Technique for Quasi-Optical Networked Sensing Applications. IEEE Technical Digest INSS, (2011)
  • A. Albrecht ; X. Wang ; H. H. Mai ; T. Schotzko ; I. Memon ; M. Bartels ; M. Hornung ; H. Hillmer: High vertical resolution 3D Nano-Imprint Technology and its application in optical nanosensors, Nonlinear Optics and Quantum Optics , (2012), 43, 339-353
  • O. Setyawati ; M. Engenhorst ; M. Bartels ; V. Daneker ; S. Wittzack ; T. Woit ; F. Köhler ; H. Hillmer: Characterization of dry etching of TiO2/SiO2 distributed Bragg reflectors for tunable optical sensor arrays. Journal of Micro/Nanolithography, MEMS, and MOEMS, 9(04), Article 041110, DOI: http://dx.doi.org/10.1117/1.3524828 (2010)
  • M. Ahmad ; J. Sonksen ; N. Storch ; H. Krause ; J. Shrestha ; S. Blom ; A. Pötzel ; B. Kudhair ; H. Hillmer: Semiconductor laser based sensors for intelligently networking sensing systems. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8 (2010), S.101-106
  • A. Albrecht ; H. H. Mai ; V. Daneker ; X. Wang ; S. Schudy ; T. Woit ; K. Schultz ; C. Woidt ; O. Setyawati ; F. Köhler ; S. Wittzack ; M. Engenhorst ; M. Bartels ; H. Hillmer: Optical Characterization of High-resolution Optical Nanospectrometers for Networked Sensing Systems. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8 (2010), S.175-178
  • A. Jäkel ; J. Clobes ; Q. Li ; V. Viereck ; H. Hillmer: Integration of Actuable MEMS in Networked Sensing Systems. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8 (2010), S.61-64
  • X. Wang ; A. Albrecht ; S. Schudy ; T. Woit ; V. Daneker ; K. Schultz ; H. H. Mai ; F. Köhler ; S. Wittzack ; M. Bartels ; H. Hillmer: High-resolution, Low-cost Microsensors for Networked Sensing Systems: Optical Nanospectrometers with Nanoimprinted Cavities of Filter Arrays. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8 (2010), S.171-174
  • R. Zamora ; T. Kusserow ; M. Wulf ; K. Kanwar ; B. Witzigmann ; H. Hillmer: Structuring of 2D Photonic Crystal on InP Membranes as Polarizing Element for Optical MEMS Based Sensor Systems. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8 (2010), S. 179-182
  • Q. Li, A. Jäkel, V. Viereck and H. Hillmer: Design of self-assembling micromirror arrays for light guiding applications, Microsystem Technologies 16(5), 895-899, DOI: s00542-009-1001-4, (2010)
  • V. Viereck ; J. Ackermann ; Q. Li ; A. Jäkel ; J. Schmid ; H. Hillmer: Sun Glasses for Buildings based on Micro Mirror Arrays: Technology, Control by Networked Sensors and Scaling Potential (invited). IEEE Technical Digest INSS (2008), S. 135-139
  • H. Hillmer ; V. Viereck ; T. Kusserow ; Y. Wang ; S. Irmer ; N. Dharmarasu ; D. Todorov ; A. Jäkel ; Q. Li ; A. Hasse ; D. Bienhaus ; M. Bartels: Nanophotonic devices and components: micromachined motion, fabrication, characterization, scaling potential and applications. In: Technical digest 3rd Shanghai International Nanotechnology Symposium 2007 (2007), S. 245
  • H. Hillmer ; Y. Wang ; T. Kusserow ; N. Dharmarasu ; A. Hasse ; O. Mikami ; M. Bartels: Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems. In: WSEAS Transactions on Communications 6 (2007), S. 396
  • A. Kricke ; M. Joodaki ; N. Dharmarasu ; G. Kompa ; H. Hillmer: Quasi-monolithic integration of high-power GaN-based HEMTs for high-frequency applications. In: Semiconductor Science and Technology 22 (2007), S. 1245-1248 ; DOI: http://dx.doi.org/10.1088/0268-1242/22/11/011 
  • A. Hasse ; S. Irmer ; J. Daleiden ; N. Dharmarasu ; S. Hansmann ; H. Hillmer: Wide continuous tuning range of 221nm by InP / air-gap vertical-cavity filters. In: Electronics Letters 42 (2006), S. 974-975
  • H. Hillmer ; S. Irmer ; F. Römer ; A. Hasse ; J. Daleiden ; C. Prott ; S. Hansmann ; M. Strassner: MOEMS vertical-air-cavity filters are widely and continuously tunable around 1.55 microns. In: SPIE Newsroom  (2006), S. 1-4 ; DOI: http://dx.doi.org/10.1117/2.1200601.0005
  • T. Scholz ; T. Debski ; W. Barth ; F. Römer ; H. Hillmer: A high-resolution optical study of cantilever heterostructure layer geometries. In: Journal of Micromechanics and Microengineering 16 (2006), S. 2765-2770 http://dx.doi.org/10.1088/0960-1317/16/12/033
  • S. Irmer ; K. Alex ; J. Daleiden ; I. Kommallein ; M. Oliveira ; F. Römer ; A. Tarraf ; H. Hillmer: Surface micromachined optical low-cost all-air-gap filters based on stress-optimized Si3N4 layers. In: Journal of Micromechanics and Microengineering 15 (2005), S. 867-872 ; DOI: dx.doi.org/10.1088/0960-1317/15/4/027
  • M. Joodaki ; G. Kompa ; H. Hillmer: Thermomechanical stress analysis and measurement in quasi-monolithic integration technology (QMIT). In: IEEE Transactions on device and material reliability 5 (2005), S. 581-594
  • M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Heat transfer improvement in quasi-monolithic integration technology. In: Journal of Microlithography, Microfabrication, and Microsystems 4 (2005), S. 33011 ; URL: link.aip.org/link/
  • E. Ataro ; C. Prott ; F. Römer ; H. Hillmer: Tailored scaling: a possibility to improve the performance of ultra-wide continuously tunable photonic devices. In: Applied Physics B: Lasers and Optics 79 (2004), S. 87-93 ; DOI: http://dx.doi.org/10.1007/s00340-004-1500-z 
  • H. Hillmer: Periodische Nanostrukturen in der Photonik - Grundlagen, natürliche Vorbilder, Herstellung und Anwendungen in der hochbitratigen Kommunikationstechnik. In: Telekommunikation Aktuell 58 (2004), S. 10-18
  • H. Hillmer ; B. Klepser: Low-cost edge-emitting DFB laser arrays for DWDM communication systems implemented by bent and tilted waveguides. In: IEEE Journal of Quantum Electronics 40 (2004), S. 1377-1383
  • H. Hillmer ; F. Träger: Einführung in die Nanotechnologie. In: Telekommunikation Aktuell 58 (2004), S. 1
  • H. Hillmer ; C. Prott ; F. Römer ; S. Hansmann: Theoretical model calculations of long-haul edge-emitting communication lasers: comparison of fractally mixed, fine-pitched and continuously chirped DFB gratings. In: Semiconductor Science and Technology 19 (2004), S. 939-945 ;  DOI: http://dx.doi.org/10.1088/0268-1242/19/7/028
  • A. Tarraf ; F. Riemenschneider ; M. Strassner ; J. Daleiden ; S. Irmer ; H. Halbritter ; H. Hillmer ; P. Meissner: Continuously tunable 1.55-µm VCSEL implemented by precisely curved dielectric top DBR involving tailored stress. In: IEEE Phot. Technol. Lett. 16 (2004), S. 720-722
  • A. Tarraf ; J. Daleiden ; S. Irmer ; D. Prasai ; H. Hillmer: Stress investigation of PECVD dielectric layers for advanced optical MEMS. In: Journal of Micromechanics and Microengineering 14 (2004), S. 317-323 ; DOI: http://dx.doi.org/10.1088/0960-1317/14/3/001
  • J. Daleiden ; A. Tarraf ; S. Irmer ; F. Römer ; C. Prott ; E. Ataro ; M. Strassner ; H. Hillmer: Wide and continuous wavelength tuning of microcavity devices for optoelectronic applications. In: Journal of Microlithography, Microfabrication, and Microsystems 2 (2003), S. 265-274 ; http://link.aip.org/link/?JMM/2/265/1
  • J. Daleiden ; H. Hillmer: Multiple air-gap filters and constricted mesa lasers - material processing meets the front of optical device technology. In: Applied Physics B: Lasers and Optics 76 (2003), S. 821-832 ; dx.doi.org/10.1007/s00340-003-1216-5
  • H. Hillmer: Highlighting an interesting parallel between quantum electronics and quantum photonics (Letter to the Editor). In: MRS Bulletin 28 (2003), S. 547
  • H. Hillmer ; R. Germann: Introductory article: Photonic Materials for Optical Communications. In: MRS Bulletin 28 (2003), S. 340 - 344
  • S. Irmer ; J. Daleiden ; V. Rangelov ; C. Prott ; F. Römer ; M. Strassner ; A. Tarraf ; H. Hillmer: Ultra low biased widely continuously tunable fabry-Perot filter. In: IEEE Journal of Photonic Technologies Letters 15 (2003), S. 434-436
  • M. Joodaki ; G. Kompa ; H. Hillmer: An enhanced quasi-monolithic integration technology for microwave and millimeter wave applications. In: IEEE Transactions on advanced packaging 26 (2003), S. 402-409
  • C. Prott ; F. Römer ; E.O. Ataro ; J. Daleiden ; S. Irmer ; A. Tarraf ; H. Hillmer: Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs. In: IEEE J. of Select. Topics in Quantum. Electron. 9 (2003), S. 918-928
  • F. Römer ; C. Prott ; S. Irmer ; J. Daleiden ; A. Tarraf ; H. Hillmer ; M. Strassner: Tuning efficiency and linewidth of electrostatically actuated multiple air-gap filters. In: Applied Physics Letters 82 (2003), S. 176-178 ; http://link.aip.org/link/?APL/82/176/1
  • J. Daleiden ; V. Rangelov ; S. Irmer ; E. Römer ; M. Strassner ; C. Prott ; A. Tarraf ; H. Hillmer: Record tuning range of InP-based multiple air-gap MOEMS filter. In: Electronics Letters 38 (2002), S. 1270-1271
  • H. Hillmer: Prolegomena und Laudatio zu Von der Radartechnik zur modernen Kommunikationstechnik (invited). In: Telekommunikation Aktuell 56 (2002), S. 1 - 2
  • H. Hillmer ; J. Daleiden ; C. Prott ; F. Römer ; S. Irmer ; V. Rangelov ; A. Tarraf ; S. Schüler ; M. Strassner: Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices (invited). In: Applied Physics B: Lasers and Optics 75 (2002), S. 3-13 ; DOI: dx.doi.org/10.1007/s00340-002-0957-x
  • H. Hillmer: Der Transistor - die Entwicklung von den Anfängen bis zu den frühen integrierten Schaltungen. In: Der Fernmeldeingenieur 54 (2000), S. 1 - 107
  • H. Hillmer ; S. Marcinkevicius: Optically detected carrier transport in III/V semiconductor QW structures: experiments, model calculations and applications in fast 1.55 µm laser devices (invited). In: Applied Physics B: Lasers and Optics 66 (1998), S. 1-17 ; DOI: http://dx.doi.org/10.1007/s003400050350 
  • B. Klepser ; H. Hillmer: Investigations of thermal crosstalk in laser arrays for WDM applications. In: IEEE Journal of Lightwave Technology 16 (1998), S. 1888-1894
  • A. Hangleiter ; M. Geiger ; C. Knorr ; P. König ; D. Ottenwälder ; T. Riedl ; F. Scholz ; M. Zimmermann ; H. Hillmer ; F. Steinhagen ; H. Burkhard: Carrier Transport in InP-Based Lasers, Modulators, and Optical Switching Devices. In: Physica Status Solidi B Basic Research 204 (1997), S. 570-573
  • H. Hillmer: Heterostructures in the AlGaInAs material system: MBE growth and characterization (review paper). In: Research Trends 3 (1997), S. 159-185
  • H. Hillmer ; A. Grabmaier ; H. Burkhard: Study of Continuously distributed phase shifts by chirped distributed-feedback gratings for 1.55 µm DFB lasers. In: IEE Proceedings-Optoelectronics 144 (1997), S. 256-260
  • H. Hillmer ; R. Lösch ; W. Schlapp: Strain-balanced AlGaInAs/InP heterostructures with up to 50 QWs by MBE. In: Journal of Crystal Growth 175-176 (1997), S. 1120-1125 ;  DOI: http://dx.doi.org/10.1016/S0022-0248(96)00825-1 
  • S. Marcinkevicius ; H. Hillmer ; R. Lösch ; K. Fröjdh ; U. Olin: Interwell Carrier Distribution in InAlGaAs Quantum Well Laser Structures. In: Physica Status Solidi B Basic Research 204 (1997), S. 577-580
  • S. Marcinkevicius ; H. Hillmer ; R. Lösch ; U. Olin: Photoexcited carrier dynamics in InAlGaAs/InP quantum well laser structures. In: Applied Physics Letters 69 (1996), S. 1101-1103 ; URL: http://link.aip.org/link/?APL/69/1101/1 
  • M. Zimmermann ; S. Krämer ; A. Hangleiter ; F.S. and H.Hillmer ; H. Burkhard: Carrier transport in asymmetrically confined 1.55 mu m multiple quantum well laser structures. In: Applied Physics Letters 69 (1996), S. 2324-2326 URL..
  • T.F. Albrecht ; J.H.H. Sandmann ; J. Feldmann ; W. Stolz ; E.O. Göbel ; H. Hillmer ; R. Lösch ; W. Schlapp: Design and application of a femtosecond optical parametric oscillator for time-resolved spectroscopy of semiconductor heterostructures. In: Applied Physics B: Lasers and Optics 60 (1995), S. 459-467 ; DOI: http://dx.doi.org/10.1007/BF01081327 
  • S. Hansmann ; H. Hillmer ; H. Walter ; H. Burkhard ; B. Hübner ; E. Kuphal: Variation of coupling coefficients by sampled gratings in complex coupled distributed-feedback lasers. In: IEEE Journal of Selected Topics in Quantum Electronics 1 (1995), S. 341-345
  • H. Hillmer ; A. Grabmaier ; S. Hansmann ; H.L. Zhu ; H. Burkhard ; K. Magari: Tailored DFB laser properties by individually chirped gratings using bent waveguides. In: IEEE Journal of Selected Topics in Quantum Electronics 1 (1995), S. 356-362
  • H. Hillmer ; A. Grabmaier ; H. Zhu ; S. Hansmann ; A. Burkhard: Continuously chirped DFB gratings by specially bent waveguides for tunable lasers. In: IEEE Journal of Lightwave Technology 13 (1995), S. 1905-1912
  • H. Hillmer ; R. Lösch ; W. Schlapp: Compositional influence on photoluminescence linewidth and Stokes shift in In_xAl_zGa_1-x-zAs/In_yAl_uGa_1-u-yAs/InP heterostructures grown by molecular beam epitaxy. In: Journal of Applied Physics 77 (1995), S. 5440-5442
  • H. Hillmer ; R. Lösch ; W. Schlapp ; A. Pöcker ; H. Burkhard: MBE grown strain-compensated AlGaInAs/AlGaInAs/InP MQW laser structures. In: Electronics Letters 31 (1995), S. 1346-1348
  • H. Hillmer ; R. Lösch ; W. Schlapp ; A. Pocker: Characterization of high-quality molecular beam epitaxial grown InxAlzGa1-x-zAs/InyAluGa1-u-yAs/InP heterostructures. In: Journal of Crystal Growth 146 (1995), S. 159-163 ; DOI: dx.doi.org/10.1016/0022-0248(94)00576-1
  • H. Hillmer: Bent waveguides improve DFB laser performance : Fiberoptic components handbook (invited). In: Laser focus world 31 (1995), S. 117-122
  • H. Hillmer ; S. Hansmann ; H. Burkhard: Facet influence on wavelength tunability and linewidth chirp in InGaAs/InAlGaAs quantum-well distributed feedback lasers under high-bit-rate modulation. In: Optical Engineering 34 (1995), S. 2985-2992 URL..
  • H. Hillmer: Arbitrarily chirped DFB gratings for photonic devices using a new method based on bent waveguides. In: Pure and Applied Optics 4 (1995), S. 365-374 ; DOI: http://dx.doi.org/10.1088/0963-9659/4/4/012
  • H. Hillmer ; R. Lösch ; W. Schlapp ; H. Burkhard: MBE growth and study of strain-compensated Al_zGa_1-z-xIn_xAs/Al_uGa_1-u-vIn_vAs/InP quantum wells. In: Physical Review B 52 (1995), S. R17025+ URL..
  • V. Hofsäß ; J. Kuhn ; C. Kaden ; V. Härle ; H. Burkhard ; F. Scholz ; H. Schweizer ; H. Hillmer ; R. Lösch ; W. Schlapp: Optical integration of laterally modified multiple quantum well structures by implantation enhanced intermixing to realize gain coupled DFB lasers. In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 106 (1995), S. 471-476
  • V. Hofsäss ; J. Kuhn ; H. Schweizer ; H. Hillmer ; R. Lösch ; W. Schlapp: Interdiffusion behavior in n-doped and undoped GaInAs/AlGaInAs multiple-quantum-well structures grown by molecular-beam epitaxy. In: Journal of Applied Physics 78 (1995), S. 3534-3536 URL..
  • S. Mohrdiek ; H. Burkhard ; F. Steinhagen ; H. Hillmer ; R. Lösch ; W. Schlapp ; R. Göbel: 10-Gb/s standard fiber transmission using directly modulated 1.55-µm quantum-well DFB lasers. In: IEEE Photon. Technol. Lett. 7 (1995), S. 1357-1359
  • S. Mohrdiek ; H. Burkhard ; H. Walter ; H. Schöll ; F. Steinhagen ; H. Hillmer ; R. Lösch ; W. Schlapp ; R.G. Göbel ; H. Janning ; B. Kempf ; S. Hansmann ; A. Mattheus: Multigigabit/s standard fibre transmission by injection-locked directly modulated lasers. In: Pure and Applied Optics: Journal of the European Optical Society Part A 4 (1995), S. 409-415(7) URL..
  • F. Steinhagen ; H. Hillmer ; R. Lösch ; W. Schlapp ; H. Walter ; R. Göbel ; E. Kuphal ; H.L. Hartnagel ; H. Burkhard: AlGaInAs/InP 1.5µm MQW DFB laser diodes exceeding 20 GHz bandwidth. In: Electronics Letters 31 (1995), S. 274-275
  • H.W. Dinges ; H. Hillmer ; H. Burkhard ; R. Lösch ; H. Nickel ; W. Schlapp: Study of In0.53Ga0.47As/In0.52Al0.48As quantum wells on InP by spectroscopic ellipsometry and photoluminescence. In: Surface Science 307-309 (1994), S. 1057-1060 URL..
  • S. Hansmann ; H. Burkhard ; H. Walter ; H. Hillmer: A tractable large-signal dynamic model-application to strongly coupled distributed feedback lasers. In: IEEE Journal Lightwave Technology 12 (1994), S. 952-956
  • S. Hansmann ; H. Walter ; H. Hillmer ; H. Burkhard: Static and dynamic properties of InGaAsP-InP distributed feedback lasers - a detailed comparison between experiment and theory. In: IEEE Journal of Quantum Electronics 30 (1994), S. 2477-2484
  • H. Hillmer ; A. Grabmaier ; S. Hansmann ; H. Burkhard: Continuously distributed phase shifts in chirped DFB lasers using bent waveguides. In: Electronics Letters 30 (1994), S. 1483-1484
  • H. Hillmer ; S. Hansmann ; H. Burkhard ; H. Walter ; A. Krost ; D. Bimberg: Study of wavelength shift in InGaAs/InAlGaAs QW DFB lasers based on laser parameters from a comparison of experiment and theory. In: IEEE Journal of Quantum electronics 30 (1994), S. 2251-2261
  • H. Hillmer ; H.L. Zhu ; A. Grabmaier ; S. Hansmann ; H. Burkhard ; K. Magari: Novel tunable semiconductor lasers using continuously chirped distributed feedback gratings with ultrahigh spatial precision. In: Applied Physics Letters 65 (1994), S. 2130-2132 URL..
  • H. Hillmer ; S. Hansmann ; H. Walter ; H. Burkhard: Experimental and theoretical study of the facet phase influence on the wavelength shift in InGaAs/InAlGaAs quantum well distributed feedback lasers. In: Applied Physics Letters 64 (1994), S. 698-700 URL..
  • H. Hillmer ; T. Kuhn: Study of carrier capture and vertical transport in quantum well heterostructures. In: Semiconductor Science and Technology 9 (1994), S. 727-729 URL..
  • H. Hillmer ; T. Kuhn ; A. Greiner ; S. Hansmann ; H. Burkhard: The role of vertical transport and capture of electrons and holes for the transient optical response in quantum-well heterostructures. In: Optical and Quantum Electronics 26 (1994), S. S691-S703 URL..
  • A. Mecozzi ; A. Sapia ; P. Spano ; H. Burkhard ; S. Hansmann ; H. Hillmer: Nonlinearities in high-index-coupled Lambda/4-shifted distributed-feedback semiconductor lasers. In: IEE Proceedings-Optoelectronics 141 (1994), S. 8-12
  • A. Griesinger ; C. Kaden ; N. Lichtenstein ; J.H. and G.Lehr ; R. Bergmann ; A. Menschig ; H. Schweizer ; H. Hillmer ; H.W.P. Koops ; J. Kretz ; M. Rudolph: Investigations of artificial nanostructures and lithography techniques with a scanning probe microscope. In: J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. (USA) 11 (1993), S. 2441-2445 URL..
  • S. Hansmann ; H. Hillmer ; H. Janning ; H. Burkhard: Theoretical and experimental study of inhomogeneously pumped distributed feedback lasers. In: Journal of Applied Physics 73 (1993), S. 7138-7144 URL..
  • H. Hillmer ; A. Forchel ; C.W. Tu: An optical study of the lateral motion of two-dimensional electron-hole pairs in GaAs/AlGaAs quantum wells. In: Journal of Physics: Condensed Matter 5 (1993), S. 5563-5580 URL..
  • H. Hillmer ; K. Magari ; Y. Suzuki: Chirped gratings for DFB laser diodes using bent waveguides. In: IEEE Journal of Photonic Technologies Letter 5 (1993), S. 10-12
  • H. Hillmer ; A. Forchel ; S. Hansmann ; M. Morohashi ; .E. Lopez ; H.P. Meier ; K. Ploog: Erratum: Optical investigations on the mobility of two-dimensional excitons in GaAs/Ga1-xAlxAs quantum wells. In: Physical Review B 47 (1993), S. 6863+ URL..
  • H. Hillmer ; H. Zhu ; H. Burkhard: Enhanced tunability of asymmetric three-section InGaAsP/InP distributed feedback lasers. In: Journal of Applied Physics 73 (1993), S. 1035-1038 URL..
  • H. Hillmer ; C.W. Tu: Two-dimensional electron-hole pair diffusivities in thin GaAs/AlGaAs Quantum Wells. In: Applied Physics A: Materials Science & Processing 56 (1993), S. 445-448 URL..
  • S. Hansmann ; H. Burkhard ; K. Dahlhof ; W. Schlapp ; R. Losch ; H. Nickel ; H. Hillmer: Design and realization of InGaAs/GaAs strained layer DFB quantum well lasers. In: Lightwave Technology, Journal of 10 (1992), S. 620-625 URL..
  • H. Hillmer ; A. Forchel ; R. Sauer ; C.W. Tu: Enhanced exciton mobilities in GaAs/AlGaAs and InGaAs/InP quantum wells. In: Semiconductor Science and Technology 7 (1992), S. B235-B239 URL..
  • H. Hillmer ; A. Forchel ; C.W. Tu: Enhancement of electron-hole pair mobilities in thin GaAs/AlxGa1-xAs quantum wells. In: Physical Review B 45 (1992), S. 1240+ URL..
  • H. Hillmer ; S. Hansmann ; A. Forchel: Comment on "Radiative recombination processes of the many-body states in multiple quantum wells". In: Physical Review B 45 (1992), S. 8782+ URL..
  • H. Hillmer ; S. Hansmann ; H. Burkhard: 1.53 µm InGaAsP-InP first-order Lambda/4-shifted distributed feedback lasers with high coupling coefficients. In: IEEE Journal of Quantum Electronics 27 (1991), S. 1753-1758
  • H. Hillmer ; A. Forchel ; T. Kuhn ; G. Mahler ; H.P. Meier: Optical studies of vertical ambipolar transport and interface recombination velocities in GaAs/Al0.5Ga0.5As double-quantum-well heterostructures. In: Physical Review B 43 (1991), S. 13992+ URL..
  • H. Hillmer ; S. Hansmann ; H. Burkhard: Realization of high coupling coefficients in 1.53 mu m InGaAsP/InP first-order quarter-wave shifted distributed feedback lasers. In: Applied Physics Letters 57 (1990), S. 534-536 URL..
  • H. Hillmer ; A. Forchel ; R. Sauer ; C.W. Tu: Interface-roughness-controlled exciton mobilities in GaAs/Al0.37Ga0.63As quantum wells. In: Physical Review B 42 (1990), S. 3220+ URL..
  • H. Hillmer ; A. Forchel ; S. Hansmann ; M. Morohashi ; E. Lopez ; H.P. Meier ; K. Ploog: Optical investigations on the mobility of two-dimensional excitons in GaAs/Ga1-xAlxAs quantum wells. In: Physical Review B 39 (1989), S. 10901 URL..
  • H. Hillmer ; A. Forchel ; S. Hansmann ; M. Morohashi ; H.P. Meier ; K. Ploog: Experimental and theoretical study of scattering mechanisms for 2D excitons in GaAs/AlGaAs quantum wells. In: Solid-State Electronics 32 (1989), S. 1771-1775 URL..
  • H. Hillmer ; S. Hansmann ; A. Forchel ; M. Morohashi ; E. Lopez ; H.P. Meier ; K. Ploog: Two-dimensional exciton transport in GaAs/GaAlAs quantum wells. In: Applied Physics Letters 53 (1988), S. 1937-1939 URL..
  • H. Hillmer ; A. Forchel ; S. Hansmann ; E. Lopez ; G. Weimann: High resolution studies of 2 D plasma transport in GaAs/GaAlAs quantum wells. In: Solid-State Electronics 31 (1988), S. 485-488 URL..
  • H. Hillmer ; T. Kuhn ; B. Laurich ; A. Forchel ; G. Mahler: Experimental and theoretical investigations of free exciton transport in Si. In: Physica Scripta 35 (1987), S. 520
  • H. Hillmer ; G. Mayer ; A. Forchel ; K.S. Löchner ; E. Bauser: Optical time-of-flight investigation of ambipolar carrier transport in GaAlAs using GaAs/GaAlAs double quantum well structures. In: Applied Physics Letters 49 (1986), S. 948-950 URL..
  • A. Forchel ; B. Laurich ; H. Hillmer ; G. Trankle ; M. Pilkuhn: Optical studies of fast plasma transport in Si. In: Journal of Luminescence 30 (1985), S. 67-81 DOI: 10.1016/0022-2313(85)90044-4
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Non Refereed Publications

  • H. Hillmer, M. S. Iskhandar, B. Elsaka and Th. Kusserow: Nanophotonic sensorics: methodologies, resolution and miniaturization limits. In: CINSaT Newsletter No. 11, December 2021. p.05-07.
  • A. Kobylinskiy, B. Laue, E. Förster, B. Höfer, Y. Shen, M. Kraus, X. Uwurukundo, H. Hillmer, R. Brunner: Einfacher, aber wirkungsvoller Ansatz zur Effizienzsteigerung filterbasierter Sensoren Konzept der spektralen Vorselektion.In: DGaO-Proceedings 2021 ISSN: 1614-8436

  • M. Knoblich, M. Kraus, E.Förster, H.-J. Dobschal, D.Stumpf, L. Werner, X.  Uwurukundo, H. Hillmer, R. Brunner: Konzept für ringförmige Grautonlithografie zur Herstellung rotationssymmetrischer mikrooptischer Elemente. In: Tagungsband,  21. NWK 2021

  • H. Hillmer, M. S. Iskhandar and E. Lochridge : Smart glass has a bright future. In: SPIE Newsroom 2021, https://www.spie.org/news/smart-glass-has-a-bright-future

  • M. Knoblich, M. Kraus, E.Förster, H.-J. Dobschal, D.Stumpf, L. Werner, X.  Uwurukundo, H. Hillmer, R. Brunner: Konzept für ringförmige Grautonlithografie zur Herstellung rotationssymmetrischer mikrooptischer Elemente. In: Tagungsband,  21. NWK 2021

  • H. Hillmer, M. S. Iskhandar and E. Lochridge : Smart glass has a bright future. In: SPIE Newsroom 2021, https://www.spie.org/news/smart-glass-has-a-bright-future

  • M. Kraus, E. Förster, V. Bagusat, T. Höhnle, X. Uwurukundo, P. Bohnert, R. Brüning, H. Hillmer R. Brunner: Kompaktes Kreuzgitter-Spektrometer – Design, Umsetzung und Funktionsnachweis. In: Tagungsband,  21. NWK 2021

  • A. Kobylinskiy, B. Laue, E. Förster, B. Höfer, Y. Shen, E. Förster, H. Hillmer R. Brunner: Erhebliche Steigerung der Detektionseffizienz für Filterarray-basierte Spektralsensoren. In: Tagungsband,  21. NWK 2021

  • M. S. Iskhandar, K. Hasan, C. Woidt, H. Hillmer: 3D Micro- and Nanostructurization: Optical MEMS arrays for Smart Glass. In: CINSaT Newsletter No. 8 June 2020. p.12-16

  • H. Hillmer: Der Laser: Aufbau, Funktionsweise und Anwendungen. In: Tagungsband, SFN Schülerkongress 2020

  • H. Hillmer ; M. Iskhandar ; Q. Li (invited Key note): Smart glass based on micromirror arrays: Fundamentals and applications in daylight steering, energy saving and personal lighting. In; Technical digest of 22nd Annual Meeting of China Assosciaion for Science and Technology, China Germany Young Scientists Forum, Qingdao China, 13.08.2020
  • M. Lotzgeselle ; M. Taimoor ; Y. Gao ; H.V. Demir ; H. Wilke ; M. Maniak ; C. Dang ; H. Hillmer ; Th. Kusserow: Properties of CdSe/CdS/ZnS Colloidal Quantum Dots in a Host Polymer for Infiltration in Photonic Devices. In: ICMAT 2019, Singapore, 2019, S. SS-09/4 (Abstract link)
  • M. Taimoor ; S. Reuter ; S. Henning ; M. Lotzgeselle ; H. Hillmer ; Th. Kusserow: Distribution of Cavity-modes in Narrowband Filters with Chirped Thin-Films. In: DGaO-Proceedings 2019, ISSN: 1614-8436 – urn:nbn:de:0287-2019-P041-4, Darmstadt, 2019, S. P41 (Link)
  • M. Iskhandar ; H. Luo ; K. A. Ekaputera ; B. Al-Qargholi ; M. Khan ; H. Hillmer: Design, Fabrication and Characterization of Subfield Addressing in Micromirror Arrays for Smart Window Applications. In: Technical digest of IEEE OMN 2019, ISBN: 978-1- 7281- 4501-3, p. 192-193, 2019
  • H. Hillmer ; B. Al-Qargholi ; M. Khan ; M. Iskhandar ; H. Wilke ; A. Tatzel: Optical MEMS based micromirror arrays: fabrication, characterization and potential applications in smart active windows. In: Technical digest of IEEE OMN 2019, ISBN: 978-1- 7281- 4501-3, pp. 188-189, 2019
  • H. Hillmer: Der Laser: Aufbau, Funktionsweise und Anwendungen (mit in dem Vortrag integrierter Lasershow). In: VDE Hessen, VDE News online, Nov.2017
  • H. Hillmer: Faszination Licht und der Nanokosmos - was die Elektrotechnik von der Natur lernen kann. In: VDE Hessen, VDE News online, Juni 2017
  • H. Hillmer: High resolution 3D nanoimprint lithography. In: Verhandlungen mit der DPG, ISSN 0420-0195, 2017, S. 92
  • A. Tatzel ; H. Hillmer: Mikrosystemtechnik für die Lichtlenkung in aktiven Fenstern. In: Hessen Nanotech News,2016,51,1,pp.10-11
  • S. Reuter ; M. Taimoor ; H. Hillmer ; T. Kusserow: Distribution of Cavity-modes in Narrowband Filters with Chirped Thin-Films. In: dgao-processings, 2016, A23
  • H. Wilke ; C. Heume ; S. Alfihed ; N. Hoinka ; T. Fuhrmann-Lieker ; T. Kusserow ; H. Hillmer: Hybrid Vertical Cavity Surface-Emitting Laser in the Ultraviolet Spectral Range. In IEEE International Conference on Optical MEMS and Nanophotonics,2016,115-116
  • W. Xie ; S. Hagemeier ; C. Woidt ; H. Hillmer ; P. Lehmann: Influence of edges and steep slopes in 3D interference and confocal microscopy. In: Proc. SPIE 9890, Optical Micro- and Nanometrology VI(2016),doi:10.1117/12.2228307
  • H. Hillmer; A. Istock; Y. Shen; U.-M. Ha; T. Meinl; C. Woidt: Potentiale einer berührungslosen optischen Messtechnik für Backindustrie mit dem Nanospektrometer Sensor. In: Baker's Day, Bremerhaven, 3.3.2016, Technical Digest, S. 11-12 (2016)
  • T. Kusserow ; M. Taimoor ; S. Reuter ; H. Hillmer: Narrowband Chirped Thin Film Filters with Distributed Cavity. In: IEEE Optical MEMS and Nanophotonics Conference, MO2.5 1-2 (2015)
  • T. Kusserow ; R. Zamora ; H. Hillmer: A comparison of Thin-Film Materials as Hard Mask Layer for Nanostructure Fabrication by Focused Ion Beam Milling and Plasma Etching. In: ICMAT 2015, T-PO3-29 (2015)
  • M. Taimoor ; A. Alatawi ; S. Reuter ; H. Hillmer ; T. Kusserow: Investigation of a Structuring Process for Surface Emitting Lasers (CoreSEL) with Distributed Cavities. In: ICMAT 2015, T2-4 (2015)
  • M. Taimoor ; S. Reuter ; H. Hillmer ; T. Kusserow: Narrowband Optical Thin-film Filters with Distributed Cavity Modes. In: ICMAT 2015, K-PO2-16 (2015)
  • H. Hillmer: High Resolution 3D Nanoimprint and MEMS Technologies for Energy Saving, Nanosensorics and Pharmacy (invited). In: Technical Digest of SINC 2014, Riyadh, 32-34 (2014)
  • Y. Khan ; N. Götte ; T. Meinl ; T. Kusserow ; A. Senftleben ; T. Baumert ; H. Hillmer: Modelling, design and fabrication of dielectric photonic crystal structures using temporally asymmetric shaped femtosecond laser pulses. In: Technical Digest of OMN 2014, Glasgow, 207-208 (2014)
  • T. Meinl ; N.Götte ; Y. Khan ; T. Kusserow; C. Sarpe ; J. Köhler ; M. Wollenhaupt ; A. Senftleben ; T. Baumert ; H. Hillmer: Temporally shaped femtosecond laser pulses as direct patterning method for dielectric materials in nanophotonic applications. In: Proc. SPIE 9126 Nanophotonics V, 91262B (2014)
  • A. Tatzel ; B. Einwögerer ; I. Bergmair ; N. Worapattrakul ; B. Khudhair ; V. Viereck ; H. Hillmer: Micromirror arrays for smart personal environments. In: NATO Nanoscience Advances in CBRN Agents Detection, Information and Energy Security, Sozopol, Bulgaria (2014)
  • S. Blom ; J. Shreshta ; N. Storch ; J. Sonksen ; H. Hillmer: Technology for a highly sensitive sensor system based on competing modes in semiconductor lasers. In: NATO Nanoscience Advances in CBRN Agents Detection, Information and Energy Security, Sozopol, Bulgaria (2014)
  • T. Meinl ; N. Götte ; Y. Khan ; T. Kusserow ; C. Sarpe ; J. Köhler ; M. Wollenhaupt ; A. Senftleben ; T. Baumert ; H. Hillmer: Material processing of dielectric via temporally shaped femtosecond laser pulses as direct patterning method for nanophotonic applications. In: NATO Nanoscience Advances in CBRN Agents Detection, Information and Energy Security, Sozopol, Bulgaria (2014)
  • M. Smolarczyk ; S. Reuter ; L. Jablonka ; H. Hillmer: Implementation of A Novel Self-Aligned NanoShaping (SANS) Technology to Fabricate 3D Nanoparticles. In: Technical Digest of 13th Int. Conf. Nanoimprint and Nanoprint Technology (NNT2014) (2014), 24A-7-4
  • S. Reuter ; A. Istock ; M. Smolarczyk ; U.-M. Ha ; O. Schneider ; L. Gomer ; H. Hillmer: Fabrication of 2D and 3D Shaped Micro- and Nanoparticles via Substrate Conformal Imprint Lithography. In: Technical Digest of 13th Int. Conf. Nanoimprint and Nanoprint Technology (NNT2014) (2014),34P-4-22
  • N. Worapattrakul ; V. Viereck ; H. Hillmer: Fabrication of Flexible SU-8 Moulds by A New Direct 3D Patterning Approach for Nanoimprint Lithography Apllications. In: Technical Digest of 13th Int. Conf. Nanoimprint and Nanoprint Technology (NNT2014) (2014), 23P-4-42
  • N. Götte ; T. Winkler ; C. Sarpe ; B. Zielinski ; J. Köhler ; T. Kusserow ; T. Meinl ; Y. Khan ; H. Hillmer ; M. Wollenhaupt ; A. Senftleben ; T. Baumert : Real Time Observation of Transient Electron Density in High Bandgap Dielectrics Irradiated with Tailored Femtosecond Laser Pulses. In: DPG Frühjahrstagung 2014 (2014)
  • N. Götte ; C. Sarpe ; J. Köhler ; T. Kusserow ; T. Meinl ; Y. Khan ; H. Hillmer ; M. Wollenhaupt ; T. Baumert : Generation of Functional Structures in Dielectrics on the Nanometer Scale via Shaped Femtosecond Laser Pulses. In: Conference on Laser Ablation (COLA), P1-02 (2013)
  • T. Kusserow ; N. Götte ; Y. Khan ; T. Meinl ; C. Sarpe ; J. Köhler ; S. Schudy ; M. Wollenhaupt ; T. Baumert ; H. Hillmer: Dielectric Photonic Crystal Structures Fabricated by Direct Patterning with Shaped Femtosecond Laser Pulses. In: ICMAT 2013 (2013), Symposium Q, ICMAT 13-A-1626
  • T. Kusserow ; S. Schudy ; M. Taimoor ; T. Meinl ; H. Hillmer: Narrowband Chirped Optical Filters with Distributed Cavity Modes. In: ICMAT 2013 (2013), Symposium M, ICMAT 13-A-1631
  • S. Schudy ; L. Gomer ; M.A. Smolarczyk ; T. Sharbatitehrani ; H. Hillmer: Replica Molding Techniques for Large Area Application of Nanoimprint with Soft Stamps. In: ICMAT 2013 (2013), Symposium M, ICMAT 13-A-1536
  • S. Schudy ; M.A. Smolarczyk ; L. Gomer ; A.T. Istock ; O. Schneider ; N. Worapattrakul ; F. Pilger; H. Hillmer: Polymer nanoparticles shaped in two and three dimensions by substrate conformal imprint lithography. In: ICMAT 2013 (2013), Symposium H, ICMAT 13-A-1528
  • N. Götte ; C. Sarpe ; J. Köhler ; L. Englert ; D. Otto ; T. Kusserow ; T. Meinl ; Y. Khan ; H. Hillmer ; M. Wollenhaupt ; T. Baumert: Generation of Functional Structures in Dielectrics on Nanometer Scale via Shaped Femtosecond Laser Pulses. In: DPG Frühjahrstagung 2013 (2013)
  • N. Götte ; C. Sarpe ; J. Köhler ; L. Englert ; D. Otto ; T. Kusserow ; T. Meinl ; Y. Khan ; H. Hillmer ; M. Wollenhaupt ; T. Baumert: Generation of Functional Structures in Dielectrics on Nanometer Scale via Shaped Femtosecond Laser Pulses. In: nano 3D (2012)
  • T. Kusserow ; Y. Khan ; R. Zamora ; F. Messow ; H. Hillmer: Guided-mode Resonances in Dielectric Photonic Crystals Slabs with Low Index Contrast. In: IEEE Optical MEMS and Nanophotonics Conference (2012), 170-171
  • H. Hillmer ; A. Albrecht ; C. Woidt ; X. Wang ; S. Schudy ; N. Worapattrakul ; F. Pilger ; M. Smolarcyk ; A. Jäkel ; V. Viereck: High resolution 3D nanoimprint and MEMS technologies for nanophotonic sensors, light steering and pharmacy. In: 2011 Shanghai International Nanotechnology Cooperation Symposium (SINCS2011), (2011)
  • V. Viereck; A. Jäkel ; U. Neumann; A. Schwank; H. Hillmer; J. Schmid: Active Windows with micro mirror arrays for improved utilization of daylight in buildings. In: Proc. Solar World Congress 2011
  • U. Akcakoca ; B. Witzigmann ; R. Zamora ; T. Kusserow ; H. Hillmer: Design and Analysis of Polarization Selective Tunable Photonic Crystal Filters. In: 11th International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD), 2011, TuD4
  • R. Zamora ; M. Benes ; T. Kusserow ; H. Hillmer ; U. Akcakoca ; B. Witzigmann: Optical Characterization of Photonic Crystals as Polarizing Structures for Tunable Optical MEMS Devices. In: International Conference on Optical MEMS and Nanophotonics (OMN), 2011, 83-84, DOI: 10.1109/OMEMS.2011.6031069
  • Y. Monnai ; A. Jäkel ; V. Viereck ; H. Hillmer ; H. Shinoda: A Proposal of MEMS Structures Implementing Terahertz Phased Arrays. In: Proc. Sensing Forum 2011
  • T. Kusserow ; M.I. Hafiz ; M.A. Ahmed ; T. Graf ; H. Hillmer: Nanopatterning of Dielectric Thin-films on the Facets of Optical Fibers. In: ICMAT 2011, 2011, S. J11.1-3
  • T. Kusserow ; B. Schiel ; H. Hillmer: Diffraktiv optische Elemente für künstlerische und darstellende Anwendungen. In: dgao-proceedings, 2011, S.A-20
  • T. Kusserow ; M. Wulf ; R. Zamora ; K. Kanwar ; H. Hillmer: Processing of Photonic Crystals in InP Membranes by Focused Ion Beam Milling and Plasma Etching. In: ICMAT 2011, 2011, S. BB 7-3
  • T. Kusserow ; R. Zamora ; M. Wulf ; U. Akcakoca ; R. Marklein ; B. Witzigmann ; H. Hillmer: Polarisationsselektive InP MOEMS Filter mit Photonischen Kristallen. In: dgao-proceedings, 2011, S.B-3
  • U. Akcakoca ; R. Marklein ; B. Witzigmann ; H. Hillmer: Electromagnetic analysis of polarization and frequency selective tunable optical MEMS. In: 10th International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD), IEEE, Atlanta 2010, S.81-82
  • H.H. Mai ; O. Setyawati ; V. Daneker ; C. Woidt ; T. Woit ; K. Schultz ; S. Schudy ; M. Engenhorst ; X. Wang ; S. Wittzack ; F. Köhler ; A. Albrecht ; M. Bartels ; H. Hillmer: Verification and calibration of spectral properties of high-resolution nano sensor arrays using microscope spectrometers. In: Technical Digest MOC´10, 16th Microoptics Conference, MC3, 2010, S.22-23
  • O. Setyawati ; H. Mai ; C. Woidt ; S. Schudy ; M. Engenhorst ; S. Wittzack ; F. Köhler ; M. Bartels ; H. Hillmer: Low-cost micromachined tunable Fabry-Pérot filters for optical nano sensor arrays. In: Technical Digest MOC´10, 16th Microoptics Conference, TB4, 2010, S.64-65
  • O. Setyawati ; M. Engenhorst ; S. Wittzack ; F. Köhler ; C. Woidt ; T. Woit ; V. Daneker ; M. Bartels ; H. Hillmer: Dry etching of TiO2/SiO2 DBR mirrors for tunable optical sensor arrays. In: SPIE Proceedings Photonic West MOEMS-MEMS 2010, ISBN: 9780819479877, SPIE, 2010, 7591 (Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III), 75910R-(1 - 8)
  • A. Jäkel, J. Clobes, Q. Li, V. Viereck, and H. Hillmer, “Integration of actuable MEMS in networked sensing systems,” in IEEE Technical Digest INSS. pp. 61-64  (2010).
  • M. Bartels ; S. Wittzack ; F. Köhler ; X. Wang ; A. Albrecht ; S. Schudy ; M. Engenhorst ; H. H. Mai ; O. Setyawati ; T. Woit ; C. Woidt ; H. Hillmer: High Vertical Resolution 3D Nanoimprint Technology for Nanophotonic Applications. In: IEEE/LEOS International Conference on Optical MEMS and Nanophotonics 2009 (2009)
  • M. Bartels ; X. Wang ; T. Kusserow ; F. Koehler ; S. Wittzack ; H. Hillmer: 3D nanoimprint templates with ultra-high vertical precision. In: ICMAT 2009 & IUMRS-ICA 2009 (2009)
  • H. Hillmer ; V. Viereck ; Q. Li ; A. Jäkel: Sonnenbrillen für Innenräume. In: Cluster Chemie Newsletter 1 (2009), S. 3
  • A. Jäkel ; Q. Li , V. Viereck ; H. Hillmer: Development of Electrostatically Driven Micromirror Arrays for Daylight Guiding on Large Areas. In: IEEE/LEOS International Conference on Optical MEMS and Nanophotonics 2009 S.41-42 (2009)
  • A. Jäkel ; Q. Li , V. Viereck ; H. Hillmer: Großflächiges Mikrospiegelsystem zur Tageslichtlenkung. In: Tagungsband Mikrosystemtechnik Kongress 2009 S.868-871 (2009)
  • T. Kusserow ; S. Irmer ; D. Nethaji ; H. Hillmer ; B. Vengatesan: Tunable Fabry-Perot-filters based on InP/air-gap mirrors. In: Photonik International 1 (2009), S. 14-16 URL..
  • T. Kusserow ; M. Wulf ; R. Zamora ; B. Vengatesan ; B. Witzigmann ; H. Hillmer: Photonic Crystal Polarizer Element on InP/Air Membranes for Optical MEMS Applications. In: ICMAT 2009 & IUMRS-ICA 2009 (2009)
  • Q. Li ; A. Jäkel ; V. Viereck ; J. Schmid ; H. Hillmer: Design and fabrication of self-assembling micromirror arrays. In: Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736211 (2009) doi:10.1117/12.821686
  • J. Sonksen ; M. Ahmad ; N. Storch ; H. Krause ; S. Blom ; A. Pötzl ; H. Hillmer: Controlling and Tuning the Emission of Semiconductor Optical Amplifier for Sensor Application by Means of Fiber Bragg Gratings. In: 8th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronics (MINO '09) (2009)
  • V. Viereck ; Q. Li ; A. Jäkel ; H. Hillmer: Großflächige Anwendung von optischen MEMS: Mikrospiegel-Arrays zur Tageslichtlenkung. In: Photonik 2 (2009), S. 28-29
  • V. Viereck ; Q. Li ; A. Jäkel ; H. Hillmer: Large-area applications of optical MEMS: micromirror arrays guide daylight, optimize indoor illumination. In: Photonik International 2 (2009), S. 48-49
  • Q. Li, A. Jäkel, V. Viereck, J. Schmid, and H. Hillmer, “Design and fabrication of self-assembling micromirror arrays,” in SPIE Europe Microtechnologies for the New Millennium, Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 7362-11, 7362-36 (2009).
  • S. Wittzack ; F. Köhler ; X. Wang ; O. Setyawati ; T. Woit ; A. Albrecht ; M. Engenhorst ; S. Schudy ; C. Woidt ; M. Bartels ; H. Hillmer: Hochpräzise Nanoimprint-Templates für 3D-Strukturen (invited). In: Galvanotechnik (2009), Band 100, Heft 10, S. 2376-2382
  • M. Wulf ; T. Kusserow ; R. Zamora ; H. Hillmer: A Polarizing Element using the Guided-Mode Resonance in a Photonic Crystal Slab. In: 1st IEEE Germany Student Conference (2009)
  • M. Bartels ; F. Köhler ; S. Wittzack ; X. Wang ; H. Hillmer: Ultra precise Nanoimprint templates (invited). In: NanoS 03.08 (2008), S. 18-22
  • M. Bartels ; V. Viereck ; Q. Li ; J. Ackermann ; A. Jäkel ; J. Schmid ; H. Hillmer: Die Sonnenbrille fürs Büro: Mikrospiegel-Arrays zur Lichtlenkung. In: Tagungsband Thüringer Gernz- und Oberflächentage und Thüringer Kolloquium "Dünne Schichten in der Optik" (2008), S. 66-70
  • V. Viereck, J. Ackermann, Q. Li, A. Jäkel, J. Schmid, and H. Hillmer: Sun glasses for buildings based on micro mirror arrays: Technology, control by networked sensors and scaling potential (invited),” in IEEE Technical Digest, pp. 135–139 (2008).
  • H. Hillmer ; F. Köhler ; S. Wittzack: Höchstauflösende 3D- NanoImprint-Stempel für Massenmarkt-Anwendungen. In: Hessen Nanotech news 2 (2008), S. 6
  • H. Krause ; J. Sonksen ; J. Baumann ; U. Troppenz ; W. Rehbein ; V. Viereck ; H. Hillmer: RIN-spectra of a two-mode lasing two-section DFB-laser for optical sensor application. In: Procceedings of the SPIE Photonics Europe Conference 6997, April 2008 (2008)
  • H. Krause ; J. Sonksen ; M. Ahmad ; V. Viereck ; O. Mikami ; H. Hillmer: Aufbau eines Faserbasierten Laserresonators mit zwei Fabry-Pérot Kavitäten und einer gemeinsamen aktiven Zone für Sensorikanwendungen. In: 109. DGaO Konferenz (2008), S. B24
  • T. Kusserow ; H. Hillmer: Optoelektronische Bauelemente für die höchstbitratige Tele- und Datenkommunikation - Elektrisch einstellbare optische Filter. In: Hessen Nanotech news 2 (2008), S. 4
  • T. Kusserow ; S. Ferwana ; T. Nakamura ; T. Hayakawa ; N. Dharmarasu ; B. Vengatesan ; H. Hillmer: Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices. In: SPIE Photonics Europe 2008 (2008)
  • H. Wacker ; J. Börcsök ; H. Hillmer: The Channel Capacity and Probability of Undetected Error in the Case of Redundant Data Transmission. In: Techn. Digest, Int. Workshop on Principles of Safety Communications (2008), S. 17-22
  • H. Wacker ; J. Börcsök ; H. Hillmer: Redundant Data Transmission via Different Types of Binary Channels (invited). In: Proceedings of the 7th WSEAS Int. Conf. on Applied Computer & Applied Computational Science (ACACOS '08) (2008), S. 609-615
  • H. Wacker ; J. Börcsök ; H. Hillmer: Redundant Optical Data Transmission Using Semiconductor Lasers. In: The 6th ACS/IEEE International Conference on Computer Systems and Applications (AICCSA-08) (2008), S. 1040-1045
  • T. Kusserow ; R. Zamora ; J. Sonksen ; T. Nakamura ; T. Hayakawa ; B. Vengatesan ; N. Dharmarasu ; H. Hillmer: Monolithic Integration of a Tunable Photodetector Based on InP/airgap Fabry-Pérot Filters. In: Proc. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (2008)
  • T. Kusserow ; M. Wulf ; N. Dharmarasu ; H. Hillmer: Herstellung und Charakterisierung von nanophotonischen Strukturen mit Hilfe fokussierter Ionenstrahlen. In: DGaO Proceedings 2008 (2008)
  • H. Hillmer: Die vielen Väter des Transistors - Meilensteine in der Geschichte des Festkörperverstärkers (invited). In: Physik in unserer Zeit, 6, S. 296-300 (2008)
  • H. Hillmer: Die Meilensteine bei der Entwicklung des Transistors (invited). In: Zeitschrift für Physik (2008)
  • J. Ackermann ; V. Viereck ; N. Dharmarasu ; H. Hillmer: Mikrosystemtechnische Lichtlenksysteme auf der Basis von Mikrospiegelarrays für Photovoltaische Anlagen an Gebäuden. In: Tagungsband des Mikrosystemtechnik Kongress Dresden 2007 (2007)
  • V. Viereck, Q. Li, J. Ackermann, A. Schwank, S. Araujo, A. Jäkel, S. Werner, N. Dharmarasu, J. Schmid, and H. Hillmer, “Novel large area applications using optical MEMS,” in Proc. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, pp. 55-56  (2007).
  • V. Viereck, Q. Li, A. Jäkel, S. Werner, J. Ackermann, N. Dharmarasu, and H. Hillmer, Innovative Lichtlenksysteme zur Tageslichtnutzung und zur Wärmeregulierung in Gebäuden auf der Basis von Mikrospiegelarrays, in hessen-nanotech NEWS 1/07, pp. (2007).
  • H. Hillmer, V. Viereck, T. Kusserow, Y. Wang, S. Irmer, N. Dharmarasu, D. Todorov, A. Jäkel, Q. Li, A. Hasse, D. Bienhaus, and M. Bartels, “Nanophotonic devices and components: micromachined motion, fabrication, characterization, scaling potential and applications,” in Technical digest 3rd Shanghai International Nanotechnology Symposium, p. 245 (2007).
  • H. Hillmer: Innovative Lichtlenksysteme auf Basis von Mikrospiegelarrays. In: hessen-nanotech NEWS 1/07 (2007), S. 5
  • H. Hillmer ; T. Kusserow ; N. Dharmarasu ; S. Irmer ; J. Daleiden ; A. Hasse ; M. Bartels ; B. Vengatesan ; T. Hayakawa: Micromachined tunable 1.55µm vertical cavity, multiple air-gap filters and lasers: fabrication, characterization, scaling potential and applications (invited). In: technical Digest, OECC/IOOC 2007 Yokohama, 12E2-1 (2007), S. 428
  • H. Hillmer ; Y. Wang ; T. Kusserow ; N. Dharmarasu ; A. Hasse ; M. Bartels: Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems. In: Proceedings of WSEAS 2007 (2007)
  • H. Hillmer ; J. Schmid: Tandem Vortrag: Nano- und Mikrotechnologien im Dienste der nachhaltigen Entwicklung. In: 4. Nanotechnologieforum Hessen: What's next for International Nanomarkets (2007)
  • H. Hillmer: Micromirror arrays: sun glasses for buildings. (invited, key note). In: NanoEquity Europe, Hilton Frankfurt (2007)
  • T. Kusserow ; N. Dharmarasu ; S. Irmer ; H. Hillmer ; T. Nakamura ; T. Hayakawa ; B. Vengatesan: Durchstimmbare Fabry-Pérot Filter auf der Basis von InP/Luft DBR-Spiegeln. In: Tagungsband der DGaO 2007 (2007) URL..
  • T. Kusserow ; S. Irmer ; D. Nethaji ; H. Hillmer ; B. Vengatesan: Weit durchstimmbare Fabry-Perot-Filter mit InP/Luft-Spiegeln. In: Photonik 6 (2007), S. 64-66 URL..
  • V. Viereck ; Q. Li ; J. Ackermann ; A. Schwank ; S. Araujo ; A. Jäkel ; S. Werner ; N. Dharmarasu ; J. Schmid ; H. Hillmer: Novel Large Area Applications Using Optical MEMS. In: Proc. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (2007), S. 55-56
  • V. Viereck ; Q. Li ; A. Jäkel ; S. Werner ; J. Ackermann ; N. Dharmarasu ; H. Hillmer: Innovative Lichtlenksysteme zur Tageslichtnutzung und zur Wärmeregulierung in Gebäuden auf der Basis von Mikrospiegelarrays. In: Tagungsband des Mikrosystemtechnik Kongress Dresden 2007 (2007)
  • Y. Wang ; T. Kusserrow ; S. Irmer ; A. Hasse ; M. Bartels ; N. Dharmarasu ; H. Hillmer ; J. Börcsök ; O. Mikami: Optics in Computer Architectures: Basis of WDM, Technologies and Potentials. In: Proc. Second International Conference on Systems ICONS '07 (2007), S. 50
  • H. Hillmer ; T. Kusserow ; N. Dharmarasu ; S. Irmer ; J. Daleiden ; M. Bartels ; T. Nakamura ; T. Hayakawa ; B. Vengatesan ; A. Hasse ; S. Hansmann: Strain-balanced In(GaAs)P heterostructures for tunable multiple InP/air-gap DBR Fabry-Pérot filters. In: Proceedings of 20th Int. Conf. on Engineering Physics (ICEP) (2006), S. 18
  • H. Hillmer ; T. Kusserow ; N. Dharmarasu ; S. Irmer ; J. Daleiden ; M. Bartels ; T. Nakamura ; T. Hayakawa ; B. Vengatesan ; A. Hasse ; S. Hansmann: Strain-balanced In(GaAs)P heterostructures for tunable multiple InP/air-gap DBR Fabry-Pérot filters. In: VGS 9 Proceedings (2006) (2006)
  • H. Hillmer: Nanotechnology in optics: foundations, implementations, applications and future potential. In: 6th WSEAS International Conference on APPLIED COMPUTER SCIENCE (ACS'06) (2006)
  • H. Hillmer: Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems. In: 6th WSEAS International Conference on APPLIED COMPUTER SCIENCE (ACS'06) (2006)
  • M. Joodaki ; H. Hillmer: Technological requirements for a self-aligned lateral SiGe HBT with the SiGe layer formed by Ge ion implantation in Si including theoretical performance. In: Proc. 8th International Conference on Solid-State and Integrated Circuit Technology ICSICT '06 (2006), S. 231-234
  • M. Joodaki ; A. Kricke ; H. Hillmer ; G. Kompa: Interconnects Analyses in Quasi-Monolithic Integration Technology (QMIT). In: Proc. Electrical Performance of Electronic Packaging (2006), S. 229-232
  • T. Kusserow ; N. Dharmarasu ; H. Hillmer: Tailored Stress in InP/GaInAs Layers for InP/Air-Gap DBR-Filters with Photonic Crystals. In: Proc. IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference (2006), S. 88-89
  • H. Halbritter ; F. Riemenschneider ; B. Kögel ; A.T. and M.Strassner ; S. Irmer ; H. Hillmer ; I. Sagnes ; P. Meissner: MEMS-tunable and wavelength selective receiver front end. In: Proc. 18th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2005 (2005), S. 68-71
  • H. Hillmer ; A. Tarraf ; F. Riemenschneider ; S.I. and H.Halbritter ; J. Daleiden ; F. Römer ; C. Prott ; E. Ataro ; A. Hasse ; M. Strassner ; S. Hansmann ; P. Meissner: Wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for filters and VCSELs using micromachined actuation (Invited Paper) (Proceedings Paper). In: SPIE Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks (2005), S. 14-28
  • T. Scholz ; T. Debski ; F. Römer ; S. Irmer ; V. Viereck ; M. Bartels ; W. Barth ; H. Hillmer: High resolution optical characterization of cantilever arrays and multiple air-gap cavities for scanning probe microscopy, communication, analytics and sensing. In: Proc. IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference (2005), S. 123-124
  • F. Römer ; M. Streiff ; C. Prott ; S. Irmer ; A.W. and B.Witzigmann ; H. Hillmer: Transfer function simulation of all-air-gap filters based on eigenmodes. In: Proc. 4th International Conference on Numerical Simulation of Optoelectronic Devices NUSOD '04 (2004), S. 105-106
  • A. Tarraf ; M. Nestler ; S. Martin ; U. Poll ; D.R. and J.Dienelt ; H. Neumann ; B. Rauschenbach ; S. Irmer ; F. Römer ; V. Daneker ; H. Hillmer: Dual Ion Beam Sputter Deposition System for EUVL Masks. In: XUV Technologies and Applications seminar, Bad Honnef, 2004, Germany (2004)
  • A. Tarraf ; M. Nestler ; U. Poll ; D. Roth ; J.D. and H.Neumann ; B. Rauschenbach ; S. Irmer ; F. Römer ; H. Hillmer: A novel dual ion beam sputter deposition system for implementing low defect density and high-quality EUVL masks. In: 3rd International EUVL Symposium, NOVEMBER 1-4, 2004, Miyazaki, Japan (2004)
  • J. Daleiden ; S. Irmer ; E. Ataro ; C. Prott ; V. Rangelov ; F. Römer ; M. Strassner ; A. Tarraf ; H. Hillmer: Continuously tunable air-gap micro-cavity devices for optical communication systems. In: SPIE Proc. Vol. 4871 (2003), S. 145-159
  • J. Daleiden ; S. Irmer ; A. Tarraf ; F. Römer ; C. Prott ; E. Ataro ; M. Strassner ; H. Hillmer: Multiple air-gap InP-based VCSELs and filters with ultra-wide wavelength tuning-flexibility and shape of the membranes. In: Proc. IEEE/LEOS International Conference on Optical MEMS (2003), S. 36-37
  • H. Hillmer ; J. Daleiden ; S. Irmer ; F. Römer ; C. Prott ; A. Tarraf ; M. Strassner ; E. Ataro ; T. Scholz: Potential of micromachined photonics: miniaturization, scaling and applications in continuously tunable vertical air-cavity filters (invited). In: SPIE Proc. series Vol. 4947 (2003), S. 196-211
  • H. Hillmer ; J. Daleiden ; C. Prott ; F. Römer ; S. Irmer ; E. Ataro ; A. Tarraf ; D. Gutermuth ; I. Kommallein ; M. Strassner: Ultrawide continuously tunable 1.55µm vertical air-cavity wavelength-selective elements for VCSELs using micromachined electrostatic actuation (invited). In: SPIE Proc. series Vol. 5246 (2003), S. 18-32
  • H. Hillmer ; J. Daleiden ; C. Prott ; S.Irmer ; F. Römer ; E. Ataro ; A. Tarraf ; H. Rühling ; M. Maniak ; M. Strassner: Bionics: Precise colour tuning by interference in nature and technology - applications in surface micromachined 1.55 microns vertical air cavity filters. In: SPIE Proc. series Vol. 4983 (2003), S. 203-214
  • H. Hillmer ; C. Prott ; J. Daleiden ; F. Römer ; S. Irmer ; E. Ataro ; M. Strassner: 142nm electrostatically actuated tuning using surface-micromachined vertical air-cavity wavelength-selective elements for applications in 1.55µm VCSEL's. In: SPIE Proc. series Vol. PW2 (2003)
  • H. Hillmer: Ultra-wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for VCSEL's using micromachined electrostatic actuation.. In: ITCOM 2003, Orlando, USA (2003)
  • S. Irmer ; J. Daleiden ; C. Prott ; V. Rangelov ; F. Römer ; M. Strassner ; A. Tarraf ; H. Hillmer: Continuously tunable InP based multiple-air-gap MOEMS filter with ultra wide tuning range. In: SPIE Proc. Vol. 4945 (2003), S. 21-29
  • A. Tarraf ; J. Daleiden ; V. Rangelov ; F. Römer ; C. Prott ; S. Irmer ; E. Ataro ; H. Hillmer: Novel low-cost and simple fabrication technology for tunable dielectric air-gap devices. In: SPIE Proc. series Vol. 4945 (2003), S. 9-20
  • J. Daleiden ; S. Irmer ; V. Rangelov ; F. Römer ; A. Tarraf ; C. Prott ; M. Strassner ; H. Hillmer: Record wavelength tuning of 127nm for vertical cavity Fabry-Pérot filter. In: Proceedings of the Optical MEMS Conference, Lugano, CH, 20-23 August 2002 (2002), S. 169
  • J. Daleiden ; S. Irmer ; V. Rangelov ; F. Römer ; A. Tarraf ; C. Prott ; M. Strassner ; H. Hillmer: Record wavelength tuning of 127 nm for vertical cavity Fabry-Pérot filter. In: Proc. Conference Digest Optical MEMs 2002 IEEE/LEOS International Conference on (2002), S. 169-170
  • H. Hillmer ; J. Daleiden ; C. Prott ; F. Römer ; A. Tarraf ; S. Irmer ; V. Rangelov ; S. Schüler ; M. Strassner: Ultra-wide continuously tunable 1.55µm vertical air-cavity filters and VCSEL's based on micromachined electrostatic actuation. In: SPIE Proc. series Vol. 4646 (2002), S. 145
  • H. Hillmer: Potential of micromachined photonics: miniaturization, scaling and applications in continuously tunable vertical air-cavity filters.. In: Phot. Fabr. Europe 2002, Brügge, Belgium (2002)
  • H. Hillmer: Continuously tunable air gap microcavity devices for optical communication systems. (invited). In: ITCOM 2002, Boston, USA (2002)
  • M. Joodaki ; G. Kompa ; H. Hillmer: New generation quasi-monolithic integration technology (QMIT). In: Proc. 52nd Electronic Components and Technology Conference (2002), S. 641-645
  • M. Joodaki ; T. Senyildiz ; G. Kompa ; H. Hillmer: Heat transfer and thermal stress analysis in the new generation Quasi-Monolithic Integration Technology (QMIT). In: IEEE Technical Digest ECTC, 52th. Conf., P373, Seattle, USA, 2002 (2002)
  • J. Piprek ; Y. Chiu ; S. Zhang ; J.E. Bowers ; C. Prott ; H. Hillmer: High-Efficiency MQW Electroabsorption Modulators. In: ECS Proceedings of International Symposium on Integrated Optoelectronics, Philadelphia, Pennsylvania, 12-17 May, 2002 (2002)
  • F. Römer ; C. Prott ; J. Daleiden ; S. Irmer ; M. Strassner ; A. Tarraf ; H. Hillmer: Micromechanically tunable air gap resonators for long wavelength VCSEL's. In: Proc. IEEE 18th International Semiconductor Laser Conference (2002), S. 13-14
  • A. Tarraf ; J. Daleiden ; F. Römer ; C. Prott ; V. Rangelov ; S. Irmer ; E. Ataro ; H. Hillmer: A novel low-cost tunable dielectric air-gap filter. In: Proc. Conference Digest Optical MEMs 2002 IEEE/LEOS International Conference on (2002), S. 175-176
  • M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Optimization of thermal resistance in quasi monolithic integration technology (QMIT) structure. In: Proc. Seventeenth Annual IEEE Symposium Semiconductor Thermal Measurement and Management (2001), S. 12-17
  • M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Optimization of Quasi-Monolithic Integration Technology (QMIT) with respect to Thermal Resistance and Induced Thermal Stress for Power Applications. In: International Microwave Symposium IEEE MTT-S 2001, Phoenix, Arizona, USA (2001)
  • M. Joodaki ; G. Kompa ; T. Leinhos ; R. Kassing ; H. Hillmer: Simulation and measurement of thermal stress in quasi-monolithic integration technology (QMIT). In: Conf. Proc. 51st Electronic Components & Technology Conference ECTC (2001), S. 715-720
  • M. Joodaki ; G. Kompa ; T. Leinhos ; R. Kassing ; H. Hillmer: Thermal stress in Quasi Monolithic Integration Technology (QMIT). In: German wireless week of Microwave and optronics MIOP 2001 (2001)
  • J. Daleiden ; N. Chitica ; M. Strassner ; C. Prott ; F. Roemer ; A. Tarraf ; H. Hillmer: Micromechanically Tunable Optical Devices. In: Summer School and European Optical Society Topical Meeting on Semiconductor Microcavity Photonics, October 21-25, 2000 (2000)
  • H. Hillmer ; C. Prott ; M. Strassner ; N. Chitica ; J. Daleiden: Mikrosystemtechnische Konzepte in der optischen Datenübertragung: Neuartige abstimmbare DFB-Laser und Bragg-Filter (invited). In: Tagungsband "Optik in der Rechentechnik", Hagen 27.-28.9.2000 (2000), S. 75-85
  • M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Static thermal design of quasi monolithic integration technology (QMIT). In: Proc. 8th IEEE International Symposium on High Performance Electron Devices for Microwave and Optoelectronic Applications (2000), S. 117-122
  • M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Static Thermal Design of Quasi-Monolithic Integrated Technology (QMIT). In: Conf. Proc. 8th IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications EDMO 2000 (2000)
  • H. Hillmer ; B. Klepser: Semiconductor lasers for high bit rate optical data transmission - Investigations to increase the yield of laser arrays (invited). In: SPIE Proc. series, Vol. 3688 (1998), S. 308-317
  • H. Hillmer ; S. Marcinkevicius: Ultrafast modulation of 1.55µm AlGaInAs/InP DFB QW laser structures: optically detected carrier dynamics, limiting mechanisms and applications (invited). In: SPIE Proc. series, Vol. 3734 (1998), S. 282-293
  • H. Hillmer ; S. Marcinkevicius: Optically detected carrier transport and capture in III/V- semiconductor QW structures: high resolution experiments, model calculations and applications in fast 1.55µm lasers (invited). In: SPIE Proc. series, Vol. 3683 (1998), S. 196-207
  • H. Hillmer: Semiconductor lasers for high bit rate optical data transmission. (invited). In: Semiconductor Laser workshop, Optoelectronic of mesoscopic solids Marburg, Germany (1998)
  • H. Hillmer: Optically detected carrier transport and capture in III/V-semiconductor QW structures: high resolution experiments, model calculations and applications in ultrafast 1.55µm lasers. In: IX Conference on Laser Optics'98, LO'98 St. Petersburg Russia (1998)
  • H. Hillmer: Ultrafast modulation of 1.55µm AlGaInAs/InP DFB QW lasers. In: 16th Int. Conf. on Coherent and Nonlinear Optics '98, ICONO '98, Moscow Russia (1998)
  • H. Hillmer: Semiconductor lasers for high bit rate optical data transmission. (invited). In: 6th Int. Conf. on Industrial Lasers & Laser Applications'98, ILLA'98, Shatura (1998)
  • B. Klepser ; H. Hillmer: Thermal crosstalk of laser arrays and the influence on yield. In: Proc. 10th International Conference on Indium Phosphide and Related Materials, Tskuba Japan (1998), S. 295-298
  • H. Hillmer: Chirped DFB gratings using bent waveguides to tailor specific laser properties (invited). In: SPIE Proc. series Vol. 2713 (1996), S. 139-149
  • H. Hillmer ; A. Greiner ; F. Steinhagen ; R. Lösch ; W. Schlapp ; E. Binder ; T. Kuhn ; H. Burkhard: Carrier and photon dynamics in InAlGaAs/InP MQW laser structures: Influence of carrier transport on high frequency modulation. In: Hot Carriers in Semiconductors (1996), S. 583
  • H. Hillmer ; A. Greiner ; F. Steinhagen ; R. Lösch ; W. Schlapp ; E. Binder ; T. Kuhn ; H. Burkhard: Carrier and photon dynamics in transversally asymmetric AlGaInAs/InP MQW lasers (invited). In: SPIE Proc. series, Vol. 2693 (1996), S. 352-368
  • H. Hillmer ; R. Lösch ; W. Schlapp ; F. Steinhagen ; H. Burkhard: Strain-compensated MBE grown AlGaInAs/AlGaInAs/InP QWs for photonic devices. In: Proc. Eighth International Conference on Indium Phosphide and Related Materials IPRM ´96 (1996), S. 565-568
  • H. Hillmer ; H. Zhu: Self-aligned processing techniques for semiconductor stripe lasers. In: SPIE Proc. series, Vol. 2886, Semiconductor Lasers II (1996), S. 25-33
  • H. Hillmer: Carrier and photon dynamics in vertically asymmetric high-speed InAlGaAs/InP MQW lasers. In: Lasers and Integrated Optoelectronics OE/LASE´96, San Jose, California USA (1996)
  • S. Marcinkevicius ; H. Hillmer ; R. Lösch ; U. Olin: Carrier Dynamics in 1.55 µm InAlGaAs Quantum Well Laser Structures. In: Proc. Conference on Lasers and Electro-optics Europe CLEO/Europe (1996), S. 81
  • F. Steinhagen ; H. Hillmer ; R. Lösch ; W. Schlapp ; R. Göbel ; E. Kuphal ; H. Hartnagel ; H. Burkhard: High-speed complex coupled strain-compensated AlGaInAs/InP 1.5 µm DFB laser diodes. In: Proc. Eighth International Conference on Indium Phosphide and Related Materials IPRM ´96 (1996), S. 777-780
  • H. Zhu ; H. Hillmer: Self-aligned processing techniques for semiconductor stripe lasers. In: Semiconductor Lasers II , SPIE proceedings series, Vol. 2886 (1996), S. 25-33
  • H. Zhu ; H. Hillmer ; H. Burkhard ; H.I. Hartnagel: A novel self aligned processing technique for mushroom-stripe lasers. In: Proc. th IEEE International Semiconductor Laser Conference (1996), S. 109-110
  • M. Zimmermann ; S. Krämer ; F. Steinhagen ; H.H. and H.Burkhard ; A. Ougazzaden ; C. Kazmierski ; A. Hangleiter: Experimental determination of the intraband relaxation time in strained quantum well lasers. In: Hot Carriers in Semiconductors, Plenum, New York, 1996 (1996), S. 591
  • R. Zimmermann ; S. Krämer ; F. Steinhagen ; H. Hillmer ; H. Burkhard ; A. Hangleiter: Parasitic-free study of carrier transport in asymmetric 1.55 µm MQW laser structures. In: Proc. Eighth International Conference on Indium Phosphide and Related Materials IPRM ´96 (1996), S. 169-172
  • S. Bozorgui ; H. Hillmer ; A. Destrez ; Z. Toffano: Chirped grating DBR lasers using bent waveguides. In: Proc. , Volume 1. IEEE Lasers and Electro-Optics Society Annual Meeting 8th Annual Meeting (1995), S. 264-265
  • H. Burkhard ; S. Mohrdiek ; H. Schöll ; H. Hillmer ; S. Hansmann ; A. Mattheus: Effects of injected light and optical feedback on directly modulated MQW lasers and OTDM multi-GBit/s system performance. In: Physics and Simulation of Optoelectronic Devices III, SPIE proceedings series, Vol. 2399 (1995), S. 684
  • H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties (invited). In: SPIE Proc. series, Vol. 3713 (1995), S. 139-149
  • H. Hillmer ; S. Hansmann ; H. Burkhard ; A. Grabmaier: Design and performance of advanced chirped grating DFB lasers. In: Technical digest of IOOC´95 (1995), S. 36, FB1-3
  • H. Hillmer ; S. Hansmann ; H. Burkhard ; A. Grabmaier ; E. Kuphal: Application of DFB lasers with individually chirped gratings. In: Laser Diodes and Applications, SPIE Proc. series, Vol. 2382 (1995), S. 211
  • H. Hillmer ; W. Schlapp ; R. Lösch: Chips aus dem Eis. In: Vision 1/95 (1995), S. 50
  • H. Hillmer ; H. Burkhard ; E. Seebald ; K. Kiesel: Ultrahigh resolution chirped distributed feedback gratings fabricated by electron-beam lithography using bent waveguides for low-cost photonic components. In: The 38th International symposium on electron, ion, and photon beams (1995), S. 2853-2858 URL..
  • H. Hillmer: Chirped DFB gratings using bent waveguides to tailor specific laser properties. In: 5th Int. Conf. Laser Technologies ´95, Industrial Lasers and Laser Applications ´95, ILLA´95, Shatura, 24. - 26.4.1995 (1995)
  • H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties. In: 15th Int. Conf. on Coherent and Nonlinear Optics '95 , ICONO '95 (1995)
  • H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties. In: 5th Laser Optics Conf. LO ´95, St. Petersburg Russia (1995)
  • J. Kovac ; H. Schmidt ; C. Kaden ; H.P. Gauggel ; V. Hofsäß ; J. Kuhn ; H. Schweizer ; A. Hase ; H. Künzel ; H. Hillmer: Carrier dynamics of gain-coupled and index-coupled InGaAs/InGaAlAs quantum well DFB lasers. In: Conference on Ultrafast Electronics and Optoelectronics, Dana Point, USA, Technical Digest (1995) (1995)
  • F. Steinhagen ; H. Hillmer ; S. Hansmann ; S.M. and R.Lösch ; W. Schlapp ; H. Walter ; R. Göbel ; H.W. Dinges ; E. Kuphal ; H.L. Hartnagel ; H. Burkhard: AlGaInAs/InP 1.5 µm DFB laser diodes for high capacity transmission modules. In: Technical digest of IOOC´95 (1995), S. 52, FB2-6
  • H.W. Dinges ; H. Burkhard ; H. Hillmer ; R. Lösch ; W. Schlapp: Spectroscopic ellipsometry, a useful tool to determine the refractive indices and to study the interfaces of InGaAs and InAlGaAs layers on InP in the wavelength range from 280nm to 1900nm. In: ICFSI-4 Jülich, Formation of Semiconductor Interfaces, Proceedings (1994), S. 676-679
  • A. Greiner ; T. Kuhn ; H. Hillmer ; S. Hansmann ; H. Burkhard: Carrier transport in quantum well lasers: A comparison between different heterostructures. In: NATO ASI on Quantum transport in ultrasmall devices (1994)
  • A. Greiner ; T. Kuhn ; H. Hillmer ; S. Hansmann ; H. Burkhard: Influence Of Carrier Transport On The Turn-on Delay In A Separate Confinement Heterostructure Quantum Well Laser. In: Proc. Conference on Lasers and Electro-Optics Europe (1994), S. 419-420
  • S. Hansmann ; H. Walter ; H. Hillmer ; H. Burkhard: Novel method to optimize complex coupling coefficients by sampled gratings. In: Proc. th IEEE International Semiconductor Laser Conference (1994), S. 167-168
  • H. Hillmer ; S. Hansmann ; H. Burkhard ; H. Walter ; H. Janning ; R. Göbel: Facet influence on wavelength tunability and linewidth-chirp under high bit rate modulation in InGaAs/InAlGaAs QW DFB lasers. In: Linear and Nonlinear Integrated Optics, SPIE proceedings series, Vol. 2212 (1994), S. 200
  • H. Hillmer ; H.L. Zhu ; S. Hansmann ; A. Grabmaier ; K. Magari ; H. Burkhard: Tailored DFB laser properties by individually chirped gratings using bent waveguides. In: Proc. th IEEE International Semiconductor Laser Conference (1994), S. 55-56
  • H. Hillmer: Exciton dissociation controlled diffusivities in thin GaAs/AlGaAs quantum wells, DBP-Telekom (1993)
  • H. Hillmer ; S. Hansmann ; H. Burkhard: AlzGa1-x-zInxAsySb1-y a promising pentanary material system for optoelectronic devices - two dimensional vertical and parallel valence-band masses for [100] and [111] oriented substrates, DBP Telekom (1993)
  • H. Hillmer ; H. Zhu ; H. Burkhard: Large wavelength tunability of asymmetric 3-section DFB lasers under cw and pulsed bias. In: Laser Diode Technology and Application, SPIE proceedings series, Vol. 1850 (1993), S. 165
  • F. Steinhagen ; R. Lösch ; W. Schlapp ; H. Nickel ; S. Hansmann ; H. Hillmer ; H. Janning ; H.L. Hartnagel ; H. Burkhard: MBE grown strained and unstrained InGaAs/InAlGaAs MQW lasers. In: Proc. Fifth International Conference on Indium Phosphide and Related Materials (1993), S. 549-552
  • S. Hansmann ; H. Hillmer ; H. Burkhard: Theoretical and experimental investigation of inhomogeneously pumped DFB lasers. In: Proceedings ECOC´92, Berlin (1992), S. 233
  • H. Hillmer: Chirped DFB gratings for optoelectronic components - a new implementation method using bent waveguides. In: DBP-Telekom, FI 65TB31E (1992)
  • H. Hillmer ; H. Burkhard ; S. Hansmann: Valence-band masses in different two-dimensional materials for the design of quantum devices, DBP Telekom (1991)
  • H. Hillmer ; S. Hansmann ; H. Burkhard: 1.53 µm InGaAsP-InP first order Lambda/4 shifted DFB lasers with high coupling coefficients. In: Proc. Conference Digest Semiconductor Laser Conference 12th IEEE International (1990), S. 198-199
  • G. Bacher ; A. Forchel ; H. Hillmer ; H. Nickel ; W. Schlapp ; R. Lösch: Studies of ambipolar transport in InGaAs/GaAs strained layer quantum wells. In: Proceedings of 20th International Conference on Semiconductor Physics, Thessaloniki (1989)
  • H. Hillmer ; G. Mayer ; A. Forchel ; K.S. Löchner ; E. Bauser: Optical Time-of-Flight investigation of ambipolar carrier transport in specially designed GaAs/GaAlAs quantum well structures. In: Springer series in Electronics and Photonics, High speed electronics 22 (1986), S. 97
  • F. Martelli ; R. Zachai ; H. Hillmer ; G. Mayer: Radiative recombination of two dimensional carriers in Si-MOS structures: Time dependence. In: Proceedings of the 18th International Conference on the Physics of Semiconductors, Stockholm (1986)
  • A. Forchel ; B. Laurich ; G. Tränkle ; H. Hillmer ; G. Mahler ; T.X. Hoai ; A. Axmann: High speed electron-hole plasma transport in Si. In: Proceedings of the 17th International Conference on the Physics of Semiconductors, San Francisco (1985)

Invited Papers

  • M. H. Kamrul, S. Baby, S. Muringakodan, A. Nandakumar, M. S. Q. Iskhandar, V. Hillmer, Q. Li, G. Xu, and H. Hillmer: Energy Saving and Amortization Time Simulation for a Model Room with MEMS Smart Glazing, In: Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), Vol. 77, (2021).

  • H. Hillmer, C. Woidt, Aliaksei Kobylinskiy, Matthias Kraus, André Istock, M. S. Q. Iskhandar, R. Brunner and T. Kusserow: Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology—A Comparison of Size Requirements, Performance, and New Concepts, Photonics 2021, 8.

  • H. Hillmer, C. Woidt, A. Istock, A. Kobylinskiy, D.T. Nguyen, N. Ahmed, R. Brunner and T. Kusserow: Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers. In: Nanomaterials 2021, 11. DOI: 10.3390/nano11010164

  • H. Hillmer, M.S.Q. Iskhandar, M.K.Hasan, S. Akhundzada, B. Al-Qargholi, A. Tatzel, "MOEMS micromirror arrays in smart windows for daylight steering"  J. Optical Microsystems 1(1), 014502 (2021). DOI: 1.JOM.1.1.014502
  • S. Nazemroaya, M. Iskhandar, Md K. Hasan, Q. Li, H. Hillmer: Concepts for clear View through 3D Structured Surfaces of MEMS Smart Glass: Design, Implementation, Characterization and Validation. In: Jahrbuch Oberflächentechnik, Leuze Verlag, Band 76, (2020)
  • H. Hillmer, M. Iskhandar, Q. Li: Smart glass based on micromirror arrays: Fundamentals and applications in daylight steering, energy saving and personal lighting. In: Technical digest of 22nd Annual Meeting of China Association for Science and Technology, China Germany Young Scientists Forum, Qindao China, (2020)
  • M. Khan, B. Al-Qargholi, M. Iskhandar, S. Akhundzada, A. Tatzel, H. Hillmer: MEMS-basierte Mikrospiegel-Arrays für eine aktive Lichtlenkung in intelligenten Fenstern. In: Jahrbuch Oberflächentechnik, Band 74, pp. 119-132, (2018)
  • H. Hillmer, B. Al-Qargholi, M. M. Khan, N. Worapattrakul, H. Wilke, C. Woidt, A. Tatzel: Optical MEMS-based micromirror arrays for active light steering in smart windows. In: JJAP, Vol. 57, 08PA07, pp. 1-13, no. 8S2, (2018)
  • H.Hillmer: High resolution 3D nanoimprint lithography. In: Verhandlungen mit der DPG, ISSN 0420-0195, 2017, S. 92
  • B. Khudhair ; V. Viereck ; H. Hillmer: The Application of Micromirrors in Architecture to Yield more Natural Light. In:IGS, Intelligent Glass Solution (2014)
  • A. Jäkel ; Q. Li ; V. Viereck ; H. Hillmer: Active Windows for Daylight Guiding Applications. In: A. Voß (Hrsg.): Nanotechnology and Energy : Pan Stanford Publishing, (2010)
  • J. Sonksen ; M. Ahmad ; N. Storch ; H. Krause ; S. Blom ; A. Pötzl ; H. Hillmer: Controlling and Tuning the Emission of Semiconductor Optical Amplifier for Sensor Application by Means of Fiber Bragg Gratings. In: Proceedings of the 8th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronics (2009), S. 59-63
  • V. Viereck ; Q. Li ; A. Jäkel ; H. Hillmer: Large-area applications of optical MEMS: micromirror arrays guide daylight, optimize indoor illumination. In: Photonik International 2 (2009), S. 48-49
  • S. Wittzack ; F. Köhler ; X. Wang ; O. Setyawati ; T. Woit ; A. Albrecht ; M. Engenhorst ; S. Schudy ; C. Woidt ; M. Bartels ; H. Hillmer: Hochpräzise Nanoimprint-Templates für 3D-Strukturen (invited). In: Galvanotechnik (2009), Band 100, Heft 10, S. 2376-2382
  • M. Bartels ; F. Köhler ; S. Wittzack ; X. Wang ; H. Hillmer: Ultra precise Nanoimprint templates (invited). In: NanoS 03.08 (2008), S. 18-22
  • N. Dharmarasu ; H. Hillmer: Compound semiconductors. In: Y.B. Gianchandani ; O. Tabata ; H. Zappe (Hrsg.): Comprehensive Microsystems : Elsevier, Amsterdam (2008), S. 25-55
  • H. Hillmer: Die vielen Väter des Transistors - Meilensteine in der Geschichte des Festkörperverstärkers (invited). In: Physik in unserer Zeit (2008)
  • H. Hillmer: Die Meilensteine bei der Entwicklung des Transistors (invited). In: Zeitschrift für Physik (2008)
  • V. Viereck ; J. Ackermann ; Q. Li ; A. Jäkel ; J. Schmid ; H. Hillmer: Sun Glasses for Buildings based on Micro Mirror Arrays: Technology, Control by Networked Sensors and Scaling Potential (invited). In: 5th International IEEE Conference on Networked Sensing Systems(INSS) 2008.,Technical Digest (2008), S. 135-139
  • H. Wacker ; J. Börcsök ; H. Hillmer: Redundant Data Transmission and Nonlinear Codes (invited). In: WSEAS Transactions on Communications 7 (2008), S. 594-604
  • H. Hillmer ; S. Hansmann: Semiconductor lasers. In: F. Träger (Hrsg.): Springer Handbook of Lasers and Optics : Springer Verlag, (2007), S. 695-726
  • H. Hillmer ; S. Irmer ; F. Römer ; A. Hasse ; J. Daleiden ; C. Prott ; S. Hansmann ; M. Strassner: MOEMS vertical-air-cavity filters are widely and continuously tunable around 1.55 microns. In: SPIE Newsroom 10.1117/2.1200601.0005 (2006), S. 1-4 URL..
  • H. Hillmer ; J. Salbeck: 8. Materialien der Optoelektronik - Grundlagen und Anwendungen. In: R. Kassing (Hrsg.): Bergmann/Schaefer: Lehrbuch der Experimentalphysik, Festkörper : Walter de Gruyter Verlag, (2005), S. 707-820
  • H. Hillmer: Periodische Nanostrukturen in der Photonik - Grundlagen, natürliche Vorbilder, Herstellung und Anwendungen in der hochbitratigen Kommunikationstechnik. In: Telekommunikation Aktuell 58 (2004), S. 10-18
  • H. Hillmer ; F. Träger: Einführung in die Nanotechnologie. In: Telekommunikation Aktuell 58 (2004), S. 1
  • H. Hillmer ; R. Germann: Introductory article: Photonic Materials for Optical Communications. In: MRS Bulletin 28 (2003), S. 340 - 344
  • H. Hillmer: Prolegomena und Laudatio zu Von der Radartechnik zur modernen Kommunikationstechnik (invited). In: Telekommunikation Aktuell 56 (2002), S. 1 - 2
  • H. Hillmer ; J. Daleiden ; C. Prott ; F. Römer ; S. Irmer ; V. Rangelov ; A. Tarraf ; S. Schüler ; M. Strassner: Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices (invited). In: Applied Physics B: Lasers and Optics 75 (2002), S. 3-13 URL..
  • H. Hillmer: Der Transistor - die Entwicklung von den Anfängen bis zu den frühen integrierten Schaltungen. In: Der Fernmeldeingenieur 54 (2000), S. 1 - 107
  • H. Hillmer ; S. Marcinkevicius: Optically detected carrier transport in III/V semiconductor QW structures: experiments, model calculations and applications in fast 1.55 µm laser devices (invited). In: Applied Physics B: Lasers and Optics 66 (1998), S. 1-17 URL..
  • H. Hillmer: Heterostructures in the AlGaInAs material system: MBE growth and characterization (review paper). In: Research Trends 3 (1997), S. 159-185
  • H. Hillmer: Bent waveguides improve DFB laser performance : Fiberoptic components handbook (invited). In: Laser focus world 31 (1995), S. 117-122

Granted Patents

  • H. Hillmer; G. Xu: Lichttechnisches modul für eine gebäudefassade (Lighting module for a building facade). EP 4102024 B1 (2024)
  • H. Hillmer: Verfahren Und Anordnung Zur Herstellung Von Nano-Imprintstempeln Sowie Mikromechanisch Abstimmbares Filter/Detektor-Array (Method and arrangement for the production of nano-imprint stamps ...). EP 2268569 B1 (2019)
  • B. Khudhair; V. Viereck; H. Hillmer: Verfahren zur Herstellung einer Mikrostruktur in einer Fotolithographietechnik (Microstructure and method of producing a microstructure in a photolithography technique). EP 3362854 B1 (2022)
  • H. Hillmer; F. Pilger; S. Reuter; M. Smolarcyk; N. Worapattrakul: Nano-Formgebungsstruktur (Nanoshaping-Structure). EP 2771161 B1 (2017)
  • R. Brunner; H. Hillmer; A. Gatto: Spektralsensor zur spektralen Analyse einfallenden Lichts, DE 10 2014 108 138 B4 (2016)
  • H. Hillmer : Optisches Filter und Verfahren zu seiner Herstellung. DE 10 2006 039 071 (2012)
  • H. Hillmer; T. Kusserow: Optische Dünnschichtstruktur mit einer verteilten Kavität. DE 102009026449 B4 (2014)
  • H. Hillmer: Sensorvorrichtung und Verfahren zur Ermittlung einer physikalischen Größe (Sensor device and process for determining a physical value). DE 10 2004 037519 B4 (2008), US 81 20075 B2 (2012), EP 1771720 B1 (2012)
  • H. Hillmer: Mikrolaser-Bauelement und Verfahren zu dessen Herstellung. DE 103 31 586 B4 (2006)
  • H. Hillmer ; J. Schmid ; I. Stadler: System zur Gestaltung von großen Flächen an Gebäuden oder mobilen Systemen durch großflächige Beugungsmuster. DE 103 58 812 B4 (2006)
  • H. Hillmer ; J. Schmid ; I. Stadler: Mikrospiegelarray. DE 103 58 967 B4 (2006), EP 1700152 B1 (2008), US 7677742 B2 (2010), AT 407382 E (2008)
  • E. Ataro; J. Daleiden; D. Gutermuth; H. Hillmer; S. Irmer; C. Prott; F. Römer; A. Tarraf: Verfahren zur Herstellung eines mikromechanischen Bauelements und damit hergestelltes Bauelement. DE 103 57 421 B4 (2008)
  • J. Daleiden; H. Hillmer; S. Irmer; C. Prott; V. Rangelow; F. Römer; S. Schüler; A. Tarraf: Mikromechanisch aktuierbares, optoelektronisches Bauelement. DE 103 18 767 B4 (2008)
  • J. Daleiden; H. Hillmer; S. Irmer; A. Tarraf: Leitfähige Haltepfosten in luftspaltbasierenden, optoelektronischen Bauelementen. DE 103 53 546 B4 (2007)
  • W. Betz; R. Göbel; H. Hillmer; R. Lösch; A. Pöcker; W. Schlapp: Verfahren zur Herstellung einer kalibrierten Längenskala im Nanometerbereich für technische Geräte, die der hochauflösenden bis ultrahochauflösenden Abbildung von Strukturen dienen (Method for manufacturing a calibrated scale in the nanometer range for technical devices used for the high resolution or ultrahigh-resolution imaging of structures and such scale). DE 196 04 348 C2 (2003), US 6231668 B1 (2001).
  • H. Hillmer ; B. Klepser: Verfahren und Anordnung zur Wellenlängen-Abstimmung einer optoelektronischen Bauelemente-Anordnung (Method and device for tuning the wavelength of an optoelectronic component arrangement). EP 1036428 B1 (2001), CA 2299452 C (2005), AT 206251 E (2001), US 7054340 B1 (2006)
  • H. Hillmer ; B. Klepser: Wellenlängenabstimmbares optoelektronisches Bauelement. EP 976183 B1 (2002), US 6,208,793 B1 (2001), JP 4232912 B2 (2001), AU 6090198 A (1998), AT 219609 E (2002)
  • H. Hillmer; B. Klepser: Verfahren zur Wellenlängen-Abstimmung einer optoelektronischen Bauelemente-Anordnung. EP 956625 B1 (2004), CA 2279632 C (2005), AT 265099 E (2004), US 6219362 B1 (2001)
  • H. Hillmer: Verfahren zur Ausnutzung scheibenförmigen Ausgangsmaterials bei der Herstellung optoelektronischer Bauelemente mit Gittern variabler Gitterperiode (Method for optimized utilization of base material in the manufacture of optoelectronic components with variable-period gratings). EP 747739 B1 (2006), US 5834158 A (1998), CA 2177650 C (2007), AT 326020 E (2006)
  • H. Hillmer: Optoelektronisches Halbleiter-Bauelement mit verbesserter Wellenlängen-Durchstimmbarkeit und reduzierter optischer Linienbreite. DE 4420389 B4 (2007)
  • H. Hillmer: Verfahren zur Herstellung eines optoelektronischen Bauelements mit einer definierten axialen Variation des Kopplungskoeffizienten und definierter axialer Verteilung der Phasenverschiebung (Process for the production of an optoelectronic component having a defined axial variation of the coupling coefficient and a defined axial distribution of the phase shift). US 5601731 A (1997)
  • H. Hillmer: Optoelektronisches Multi-Wellenlängen Bauelement (Optoelectronic Multiwavelength component). DE 44 32 410 B4 (2007), EP 704946 B1 (2003), US 5,600,743 A (1997), AT 215353 E (2003)

Filed Patents

  • Winkelbasiertes Filterspektrometer 2023 
  • R. Brunner, M. Kraus, A. Kobylinskiy, H. Hillmer,  Filterbasiertes Spektrometer, DE 10 2022 122 543 A1 (2022)
  • H. Hillmer, G. Xu, MEMS Display WO 2023117196 A1 (2022), EP 4202528 A1 (2021)
  • G. Schulze, G. Xu, Transparente Verbundstruktur mit einer Mikrospiegelvorrichtung, DE 10 2021 120 910.2 (2021)
  • H. Hillmer, Spiegel-Shutter Array, DE 10 22020 123 024 A1 (2020)
  • M. Feldmann; U. Ha; H. Heim; H. Hillmer; P. Sälzer: Kunststoffverbundwerkstoff mit mindestens einem in eine Kunststoffmatrix eingebrachten Füllstoff. DE 10 2018 119 964 A1 (2018)
  • D. Bienhaus; H. Hillmer: Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung. DE 10 2008 009 215 A1 (2008)
  • H. Hillmer ; M. Rohrbach: Verfahren und Vorrichtung zur Reflexion von Strahlung im EUV- oder Röntgen-Wellenlängenbereich sowie Verfahren zur Herstellung eines Materials mit einem dafür geeigneten Brechungsindex. DE 10 2005 027 422 A1 (2005)
  • H. Hillmer; T. Baumert: Multimembranbasiertes optoelektronisches Bauelement mit photonischer Kristallstruktur. (2004)
  • H. Hillmer; J. Schmid; I. Stadler: Oberflächengestaltung mit 2-dimensionalen Anordnungen von diffraktiven, optischen Elementen. DE 10358937 A1 (2003)
  • H. Hillmer; B. Klepser: Optoelektronisches Bauelement mit räumlich einstellbar Temperaturverteilung. (Optoelectronic component). DE 19717545 A1 (1997), WO 1998038710 A1 (1998), AU 1998067252 A (1998)
  • H. Hillmer: Optoelektronisches Bauelement mit einem Rückkopplungsgitter mit axial veränderbarer Korrugationsperiode. DE 19500135 A1 (1995)
  • H. Hillmer: Optoelektronisches Bauelement mit axialer Gitterperiodenmodulation. DE 19500136 A1 (1995)
  • S. Hansmann; H. Hillmer: Optoelektronisches Bauelement mit verteilter Rückkopplung und variierbarem Kopplungskoeffizient. DE 4334525 A1 (1993)
  • H. Hillmer: 3-Sektions-DFB-Halbleiterlaser mit erweitertem Wellenlängendurchstimmungsbereich. DE 4301830 A1 (1993)
  • H. Hillmer: Optoelektronisches Bauelement mit Rückkopplungsgitter, mit axial quasi-kontinuierlich und nahezu beliebig variierbarem Gitterkopplungskoeffizienten, mit quasi-kontinuierlich axial verteilbarer Brechungsindex Variation, sowie mit axial nahezu beliebig verteilbarer und variierbarer Phasenverschiebung. DE 4322164 A1 (1993)
  • H. Hillmer: Auf DFB oder DBR-Gitter basierendes optoelektronisches Bauelementmit quasi-kontinuierlich axial verteilbarer Brechungsindex Variation, mit axial beliebig verteilbarer und variierbarer Phasenverschiebung, sowie mit axial quasi-kontinuierlich variierbarem Gitter-Kopplungskoeffizienten. DE 4322163 A1 (1993)
  • H. Hillmer: Lichtwellenleiter zur kontinuierlichen Phasenverschiebung der DFB Gitterperiode für auf DFB Gitterfeldern mit konstanter Gitterperiode basierende optoelektronische Elemente. DE 423350 A1 (1992)

Invited Talks

  • Intelligente Fenster durch nanotechnologische und mikrosystemtechnische Technologien,   Tagungsreihe: Materials for the European Green Deal, Hessen Agentur, online-presentation 11.7.2021
  • Smart Glass based on micromirror arrays, Key note speech, Association for Science and Technology, Qingdao (2020)
  • Optical MEMS based micromirror arrays: fabrication, characterization and potential applications in smart active windows, Optical MEMS and Nanophotonics, Daejeon, Südkorea (2019)
  • “Presentation on Project Nanoscale”, China Society for the Promotion of Science and Technology Commercialization, Peking, China (2018)
  • Smart personal environments based on optical sensors and actuators:  Active windows and nanospectrometers in applications and business case”, Sino German Science and Technology Park, Jimo, China (2018)
  • Sensors and Actuators for Optical Smart Personal Environments: Design, Micromachining, Nanoimprinting and Characterization, MJIIT University of Technology, Malaysia (2018)
  • H. Hillmer: Methodology of 3D nanostructurization: applications for sensors and actuators in smart personal environments and for pulmonal drug application using 3D nanoparticles, Leibniz-Institut für Festkörper- und Werkstoffforschung (IFW), Dresden, 02.02.2018
  • H. Hillmer: MASH - Multifunctional Anisotropically Shaped Hybrid-Particles, CINSaT Newsletter, pp. 15-16, 1/2018
  • H. Hillmer: Der Laser: Aufbau, Funktionsweise und Anwendungen(mit in den Vortrag integrierter Lasershow), VDE Kassel, 14.12.2017
  • H. Hillmer: Transmission controllable glazing, NEXT Buildings Newsletter, Dez. 2017, p. 10
  • H. Hillmer: Smart personal environments based on micromachined nanophotonics for active windows and food quality sensorics, Keio University, Tokyo, Japan, 24.11.2017
  • H. Hillmer: MEMS based micromirror arrays ,MOC17, Tokyo, Japan, 22.11. 2017
  • H. Hillmer: Report on workpackage 2 - R&D on transmission controllable glazings, Lyon, Frankreich, 19.10.2017
  • H. Hillmer: Schwerpunkt Elektronik und Photonik, Einführungstage FB16, Kassel,17.10.2017
  • H. Hillmer: Faszination Elektrotechnik, Tag der Technik, Kassel, 27.09.2017
  • H. Hillmer: Nanophotonics for medical-, information- and engergy-technology, International Summer University (ISU) Nano, Kassel, 12.07.2017
  • H. Hillmer, Laudatio Bertha-Benz Preis, Heidelberg, 01.06.2017
  • H. Hillmer: Schwerpunkt Elektronik und Photonik, Tag der offenen Tür, Universität Kassel, 20.04.2017
  • H. Hillmer: High resolution 3D nanoimprint lithography; Symposium on Nanostructuring beyond Conventional Lithography, Dresden, 22.03.2017
  • H. Hillmer: 3D Nanostructures, Frühjahrkolloquium CINSaT, Friedrichroda, 15.02.2017
  • H. Hillmer: Functionalizable particles with magnetic properties, CINSaT Newsletter, pp.14-15, 1/2017
  • H. Hillmer; A. Istock; Y. Shen; U.-M. Ha; T. Meinl; C. Woidt: Potentiale einer berührungslosen optischen Messtechnik für Backindustrie mit dem Nanospektrometer Sensor. In: Baker's Day, Bremerhaven, 3.3.2016, Technical Digest, S. 11-12 (2016)
  • H. Hillmer: High Resolution 3D Nanoimprint and MEMS Technologies for Energy Saving, Nanosensorics and Pharmacy (invited). In: Technical Digest of SINC 2014, Riyadh, 32-34 (2014)
  • Fabrication of Nanospectrometers for Medical Devices with High Resolution 3D Nanoimprint Lithography,Symposium on Nanoimprint Lithography - the big picture, Delft University of Technology, Netherlands, 27.06.2012
  • Nanotechnology for advanced energy applications: Micro-mirror arrays for intelligent light steering, 1st Saudi International Nanotechnology Conference 2010, Riyadh, Saudi Arabien, 29.11.2010
  • Micromachining: Foundations, Technological Fabrication and Selected Applications such as "Sunglasses for the Office Window" (lecture and experiments), International Summer School "Act-Control-Move: Beyond Networked Sensors" + "Internet of things", Leibniz Zentrum für Informatik Dagstuhl, organisiert von ETH Zürich, 17.8.2010
  • High vertical resolution 3D nanoimprint technology and its application in optical nanosensors (invited talk), International Conference on advances in molecular nonlinear optics AMARIS, Paris-Cachan, 28.5.2010
  • Sonnenlichtlenkende Mikrospiegelarrays für effiziente Energietechnologien (invited talk), 8.GRE-Kongress "Effizienz Bauen" Kassel, 23.4.2010
  • J. Sonksen ; M. Ahamd ; N. Storch ; H. Krause ; S. Blom ; A. Pötzl ; H. Hillmer: Controlling and Tuning the Emission of Semiconductor Optical Amplifier for Sensor Application by Means of Fiber Bragg Gratings. In: 8th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronics (MINO ´09) (2009)
  • Sun Glasses for Buildings based on Micro Mirror Arrays: Technology, Control by Networked Sensors and Scaling Potential (invited), 5th In. Conf. On Networked Sensing Systems (INSS), Kanazawa, Japan, 19.6.2008
  • H. Wacker ; J. Börcsök ; H. Hillmer: Redundant Data Transmission via Different Types of Binary Channels (invited). In: Proceedings of the 7th WSEAS Int. Conf. on Applied Computer & Applied Computational Science (ACACOS ´08) (2008), S. 609-615
  • H. Hillmer ; T. Kusserow ; N. Dharmarasu ; S. Irmer ; J. Daleiden ; A. Hasse ; M. Bartels ; B. Vengatesan ; T. Hayakawa: Micromachined tunable 1.55µm vertical cavity, multiple air-gap filters and lasers: fabrication, characterization, scaling potential and applications (invited). In: technical Digest, OECC/IOOC 2007 Yokohama, 12E2-1 (2007), S. 428
  • H. Hillmer ; J. Schmid: Tandem Vortrag: Nano- und Mikrotechnologien im Dienste der nachhaltigen Entwicklung. In: 4. Nanotechnologieforum Hessen: What´s next for International Nanomarkets (2007)
  • H. Hillmer: Micromirror arrays: sun glasses for buildings. (invited, key note). In: NanoEquity Europe, Hilton Frankfurt (2007)
  • H. Hillmer: Nanotechnology in optics: foundations, implementations, applications and future potential. In: 6th WSEAS International Conference on APPLIED COMPUTER SCIENCE (ACS´06) (2006)
  • H. Hillmer: Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems. In: 6th WSEAS International Conference on APPLIED COMPUTER SCIENCE (ACS´06) (2006)
  • H. Hillmer ; A. Tarraf ; F. Riemenschneider ; S.I. and H.Halbritter ; J. Daleiden ; F. Römer ; C. Prott ; E. Ataro ; A. Hasse ; M. Strassner ; S. Hansmann ; P. Meissner: Wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for filters and VCSELs using micromachined actuation (Invited Paper) (Proceedings Paper). In: SPIE Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks (2005), S. 14-28
  • J. Daleiden ; S. Irmer ; E. Ataro ; C. Prott ; V. Rangelov ; F. Römer ; M. Strassner ; A. Tarraf ; H. Hillmer: Continuously tunable air-gap micro-cavity devices for optical communication systems. In: SPIE Proc. Vol. 4871 (2003), S. 145-159
  • H. Hillmer ; J. Daleiden ; S. Irmer ; F. Römer ; C. Prott ; A. Tarraf ; M. Strassner ; E. Ataro ; T. Scholz: Potential of micromachined photonics: miniaturization, scaling and applications in continuously tunable vertical air-cavity filters (invited). In: SPIE Proc. series Vol. 4947 (2003), S. 196-211
  • H. Hillmer ; J. Daleiden ; C. Prott ; F. Römer ; S. Irmer ; E. Ataro ; A. Tarraf ; D. Gutermuth ; I. Kommallein ; M. Strassner: Ultrawide continuously tunable 1.55µm vertical air-cavity wavelength-selective elements for VCSELs using micromachined electrostatic actuation (invited). In: SPIE Proc. series Vol. 5246 (2003), S. 18-32
  • H. Hillmer: Ultra-wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for VCSEL´s using micromachined electrostatic actuation.. In: ITCOM 2003, Orlando, USA (2003)
  • H. Hillmer: Potential of micromachined photonics: miniaturization, scaling and applications in continuously tunable vertical air-cavity filters.. In: Phot. Fabr. Europe 2002, Brügge, Belgium (2002)
  • H. Hillmer: Continuously tunable air gap microcavity devices for optical communication systems. (invited). In: ITCOM 2002, Boston, USA (2002)
  • H. Hillmer ; C. Prott ; M. Strassner ; N. Chitica ; J. Daleiden: Mikrosystemtechnische Konzepte in der optischen Datenübertragung: Neuartige abstimmbare DFB-Laser und Bragg-Filter (invited). In: Tagungsband "Optik in der Rechentechnik", Hagen 27.-28.9.2000 (2000), S. 75-85
  • H. Hillmer ; B. Klepser: Semiconductor lasers for high bit rate optical data transmission - Investigations to increase the yield of laser arrays (invited). In: SPIE Proc. series, Vol. 3688 (1998), S. 308-317
  • H. Hillmer ; S. Marcinkevicius: Ultrafast modulation of 1.55µm AlGaInAs/InP DFB QW laser structures: optically detected carrier dynamics, limiting mechanisms and applications (invited). In: SPIE Proc. series, Vol. 3734 (1998), S. 282-293
  • H. Hillmer ; S. Marcinkevicius: Optically detected carrier transport and capture in III/V- semiconductor QW structures: high resolution experiments, model calculations and applications in fast 1.55µm lasers (invited). In: SPIE Proc. series, Vol. 3683 (1998), S. 196-207
  • H. Hillmer: Semiconductor lasers for high bit rate optical data transmission. (invited). In: Semiconductor Laser workshop, Optoelectronic of mesoscopic solids Marburg, Germany (1998)
  • H. Hillmer: Optically detected carrier transport and capture in III/V-semiconductor QW structures: high resolution experiments, model calculations and applications in ultrafast 1.55µm lasers. In: IX Conference on Laser Optics'98, LO'98 St. Petersburg Russia (1998)
  • H. Hillmer: Ultrafast modulation of 1.55µm AlGaInAs/InP DFB QW lasers. In: 16th Int. Conf. on Coherent and Nonlinear Optics '98, ICONO '98, Moscow Russia (1998)
  • H. Hillmer: Semiconductor lasers for high bit rate optical data transmission. (invited). In: 6th Int. Conf. on Industrial Lasers & Laser Applications'98, ILLA'98, Shatura (1998)
  • H. Hillmer: Chirped DFB gratings using bent waveguides to tailor specific laser properties (invited). In: SPIE Proc. series Vol. 2713 (1996), S. 139-149
  • H. Hillmer ; A. Greiner ; F. Steinhagen ; R. Lösch ; W. Schlapp ; E. Binder ; T. Kuhn ; H. Burkhard: Carrier and photon dynamics in transversally asymmetric AlGaInAs/InP MQW lasers (invited). In: SPIE Proc. series, Vol. 2693 (1996), S. 352-368
  • H. Hillmer: Carrier and photon dynamics in vertically asymmetric high-speed InAlGaAs/InP MQW lasers. In: Lasers and Integrated Optoelectronics OE/LASE ´96, San Jose, California USA (1996)
  • H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties (invited). In: SPIE Proc. series, Vol. 3713 (1995), S. 139-?149
  • H. Hillmer: Chirped DFB gratings using bent waveguides to tailor specific laser properties. In: 5th Int. Conf. Laser Technologies ´95, Industrial Lasers and Laser Applications ´95, ILLA´95, Shatura, 24. - 26.4.1995 (1995)
  • H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties. In: 15th Int. Conf. on Coherent and Nonlinear Optics '95 , ICONO '95 (1995)
  • H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties. In: 5th Laser Optics Conf. LO ´95, St. Petersburg Russia (1995)