Past Projects
Overview
- Optical Sensor Array
- A Novel Technology for Highly Sensitive Gas Sensors
- Tunable Fabry-Pérot Filters
- Vertical Cavity Surface Emitting Laser (VCSEL) for the UV Range
- Safe and reliable structures
- Photonic Crystals
- Tunable Optical Sensor Array (TOSA)
- Development of shape specific polymeric nanoparticles and study of their dispersion and toxicology after pulmonary application in murine lung (NanoImprint Pharmakon, NIP)
- Quasi-Monolithic Integration for High-Frequency Applications
- Multilayer Structures for the Lithography in Extreme UV (EUVL)