Thin-Film Technology and Characterization

Thin films form the technological foundation of modern micro- and nano-systems such as microchips, sensors, MEMS and optical microdevices. While these components are often designed from an electrical or optical perspective, their reliability and performance are strongly governed by mechanical properties and interface behavior. The ability to characterize materials at micro- and nanoscale is therefore paramount for modern mechanical engineering.

Offered in cooperation with INA/FB16, the course combines established microfabrication expertise with mechanical thin-film characterization. It broadens the perspective of mechanical engineers towards manufacturing approaches at micro- and nano-scale and provides students with the skills to bridge fabrication and materials testing.

The focal points are:

Microfabrication

• Fundamental concepts and processes
• Cleanroom technology
• Vacuum technology
• Materials for electronic devices
• Wafer fabrication
• Thin-film deposition technology
• Lithography methods
• Etching processes
• Doping of semiconductors, thermal annealing, wafer fusion/onding
• Examples for typical device fabrication

Mechanical characterization of Thin Films

• Nanoindentation
• Scratch Tests
• Micromechanical Testing
• Bulge Testing

• Beamer, Tafel E-learning

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