Technology of Electronic and Optoelectronic Devices (FB16-8500)

Technology of Electronic and Optoelectronic Devices (FB16-8500)

(Prof. Dr. T. Kusserow/Prof. Dr. H. Hillmer)

Diese Vorlesung wird nur in Englisch gehalten.


The Lecture at Moodle (Link)


Topics covered in this lecture:

  • Fundamental concepts and cprocesses
  • Clean room technology
  • Vacuum technology
  • Materials of electronic and optoelectronic devices
  • Wafer fabrication
  • Deposition technology
  • Lithography methods
  • Etching processes
  • Doping of semiconductors, thermal annealing, wafer fusion/onding
  • Examples for typical device fabrication


  • Menz: Microsystem Technology, Wiley-VCH
  • Gerlach: Introduction to Microsystem Technology, Wiley
  • Jackson: Handbook of Semiconductor Technology, Wiley-VCH
  • van Zant: Microchip Fabrication, McGraw-Hill
  • Brodie: The Physics of Micro/Nano-Fabrication, Plenum Press
  • Cui: Nanofabrication, Springer
  • Cabrini: Nanofabrication Handbook, CRC Press
  • Frey: Handbook of Thin-Film Technology, Springer
  • Eckertova: Physics of Thin-Films, Plenum Press
  • Mack: Optical Lithography, Wiley
  • Kang: Micro/Nano Replication, Wiley
  • Nojiri: Dry Etching Technology for Semiconductors, Springer
  • Memming: Semiconductor Electrochemistry, Wiley-VCH