Publikationen

Bücher, Buchkapitel und Bände als Gastherausgeber

M. H. Qasim, J. Chen, M. S. Q. Iskhandar, M. K. Hasan, S. Baby, B. Elsaka, D. Löber, G. Xu, and H. Hillmer „ Advancements in Surface Modification and Coloring Technologies for MEMS-Based Smart Windows: Ultra-Thin Highly Absorbing Films and C-V Measurements of Smart Glass as Sustainable Energy Solutions”, Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), Vol. 79, (2023)
M. K. Hasan, S. Liebermann, M. S. Q. Iskhandar, D. Löber, Q. Li, G. Xu, and H. Hillmer, Personalized Light Steering in Buildings Utilizing 2D Actuation in MEMS Micromirror Arrays, Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), ISBN 978-3-87480-380-9, Vol. 78, pp. 217-237, (2022)
H. Hillmer, C. Woidt, A. Kobylinskiy, M. Kraus, A. Istock, M.S. Q. Iskhandar, R. Brunner and T. Kusserow, Monography “Optical Fiber Interferometric Sensors - New Production Methodologies and Novel Applications”, Chapter 1: entitled “Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology - A Comparison of Size Requirements, Performance, and new Concepts”. MDPI Publishing house, Basel, Eds: Maria de Fatima Domingues, Nélia J. Alberto, Paulo André, pp. 05-50, ISBN 978-3-0365-2249-4 (2022)
M. K. Hasan, S. Baby, S. Muringakodan, A. Nandakumar, M. S. Q. Iskhandar, V. Hillmer, Q. Li, G. Xu, and H. Hillmer: Energy Saving and Amortization Time Simulation for a Model Room with MEMS Smart Glazing: Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), ISBN 978-3-87480-369-4, Vol. 77, pp. 163-188, (2021)
S. Nazemroaya, M. Iskhandar, Md K. Hasan, Q. Li, H. Hillmer: Concepts for clear View through 3D Structured Surfaces of MEMS Smart Glass: Design, Implementation, Characterization and Validation. Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), ISBN: 978-3-87480-364-9, Vol. 76, S. 101-115, (2020)
M. S. Q. Iskhandar, B. Al-Qargholi, M. M. Khan, A. Tatzel, H. Luo, S. Nazemroaya, Q. Li, and H. Hillmer: Development of optical MEMS-based micromirror arrays for smart window applications: Implementation of subfield addressing and reliability measurements. Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), Vol. 75, pp. 93-107, ISBN 978-3-87480-357-1 (2019)
M. Khan, B. Al-Qargholi, M. Iskhandar, S. Akhundzada, A. Tatzel, H. Hillmer: MEMS-basierte Mikrospiegel-Arrays für eine aktive Lichtlenkung in intelligenten Fenstern. Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), Band 74, pp. 119-132 , ISBN 978-3-87480-349-6 (2018)
N. Götte, T. Kusserow, T. Winkler, C. Sarpe, L. Englert, D. Otto, T. Meinl, Y. Khan, B. Zielinski, A. Senftleben, M. Wollenhaupt, H. Hillmer, and T. Baumert: Temporally shaped femtosecond laser pulses for creation of functional sub-100 nm structures in dielectrics. K. König and A. Ostendorf (Editor): Optically Induced Nanostructures: de Gruyter, Berlin, pp. 47-72 (2015)
T. Meinl, N. Götte, Y. Khan, T. Kusserow, C. Sarpe, J. Köhler, M. Wollenhaupt, A. Senftleben, T. Baumert, H. Hillmer: Material Processing of Dielectrics via Temporally Shaped Femtosecond Laser Pulses as Direct Patterning Method for Nanophotonic Applications. P. Petkov, D. Tsiulyanu, W. Kulisch, C. Popov (Editors): Nanoscience Advances in CBRN Agents Detection, Information and Energy Security: Springer Science+ Business Media, Dordrecht, pp. 29-34 (2015)
S. Blom, J. Shrestha, N. Storch, J. Sonksen, H. Hilllmer: Technology for a Highly Sensitive Sensor System Based on Competing Modes in Semiconductor. P. Petkov, D. Tsiulyanu, W. Kulisch, C. Popov (Editors): Nanoscience Advances in CBRN Agents Detection, Information and Energy Security: Springer Science+ Business Media, Dordrecht, pp. 409-414 (2015)
A. Tatzel, B. Einwögerer, I. Bergmair, N. Worapattrakul, B. Khudhair, V. Viereck, H. Hillmer: Micromirror Arrays for Smart Personal Environments. P. Petkov, D. Tsiulyanu, W. Kulisch, C. Popov (Editors): Nanoscience Advances in CBRN Agents Detection, Information and Energy Security: Springer Science+ Business Media, Dordrecht, pp. 505-510 (2015)
H. Hillmer, T. Kusserow: Semiconductor lasers. F. Träger (Editor): Springer Handbook of Lasers and Optics, 2nd ed. Springer Verlag, pp 757-792, (2012)
A. Jäkel, Q. Li, V. Viereck, H. Hillmer: Active Windows for Daylight Guiding Applications. A. Voß (Editor): Nanotechnology and Energy: Pan Stanford Publishing, pp. 72-80 (2012)
C. Woidt, O. Setyawati, A. Albrecht, M. Engenhorst, V. Daneker, T. Woit, S. Wittzack, F. Köhler, H. H. Mai, M. Bartels and H. Hillmer: Micromachined Tunable Fabry-Pérot Filter Integrated into a Miniaturized Spectrometer for Low-Cost Applications. Johann Peter Reithmaier, Perica Paunovic, Wilhelm Kulisch, Cyril Popov, Plamen Petkov (Editors): Nanotechnological Basis for Advanced Sensors: Springer, Dordrecht, pp. 537-541 (2011)
T. Kusserow, M. Wulf, R. Zamora, B. Vengatesan, B. Witzigmann, H. Hillmer: Photonic Crystal Polarizer Element on InP/Air Membranes for Optical MEMS Applications. S. Chua; J. Teng; A. Danner (Editors): Compound Semiconductor Photonics: Pan Stanford, Singapore, pp. 66-68 (2010)
N. Dharmarasu, H. Hillmer: Compound semiconductors. Y.B. Gianchandani; O. Tabata; H. Zappe (Editor): Comprehensive Microsystems: Elsevier, Amsterdam, pp 25-51 (2008)
H. Hillmer; S. Hansmann: Semiconductor lasers. F. Träger (Editor): Springer Handbook of Lasers and Optics Springer Verlag, pp. 695-726 (2007)
H. Hillmer; Y. Wang; T. Kusserow; S. Irmer; N. Dharmarasu; A. Hasse; M. Bartels; M. Schwarz; J. Börcsök, O. Mikami: Optoelectronic technologies for optical data communication in safety computer systems for process control and fabrication. T. Aven J.E. Vinnem (Editor): Risk, reliability and Societal Safety: Taylor & Francis, pp. 377-384 (2007)
M. Joodaki, H. Hillmer: RF SiGe HBTs: Some new trends for low cost, high performance and high power. S.B. Kobadze (Editor): Solid State Electronics Research Advances: Nova Science Publishers, pp. 345-368 (2007)
H. Hillmer; J. Salbeck: 8. Materialien der Optoelektronik - Grundlagen und Anwendungen. R. Kassing (Editor): Bergmann/Schaefer: Lehrbuch der Experimentalphysik, Festkörper: Walter de Gruyter Verlag, pp. 707-820 (2005)
H. Hillmer, F. Träger: Einführung in die Nanotechnologie. Telekommunikation Aktuell 58, pp. 1 (2004)
H. Hillmer, R. Germann: Introductory article: Photonic Materials for Optical Communications. MRS Bulletin 28, pp. 340-344 (2003)
H. Hillmer: Der Transistor - die Entwicklung von den Anfängen bis zu den frühen integrierten Schaltungen. Der Fernmeldeingenieur 54, pp. 1-107 (2000)
R. Schatz, D. McDonald, H. Hillmer: Parameter extraction. G. Guekos (Editor): Photonic Devices for Telecommunications: Springer Verlag, Heidelberg, pp. 235-268 (1999)
H. Hillmer: Das Materialsystem AlGaInAs - Grundlagen, Eigenschaften und Anwendungen in der Photonik, Habilitationsschrift TH Darmstadt (1996)
H. Hillmer: 3. Materialien für die optische Nachrichtentechnik und deren Eigenschaften, Halbleiter, Gläser, Polymere und LiNbO₃: Optische Telekommunikationssysteme: Damm Verlag, pp. 63–108 (1996)
H. Hillmer: Ambipolarer Ladungsträger-Transport in Halbleiter-Heterostrukturen. Universität Stuttgart, Diss. (1989)
G. Mahler, T. Kuhn, A. Forchel, H. Hillmer: Optical decay and spatial relaxation. H. Haug (Editor): Nonlinear optical properties of semiconductors: Academic Press, pp. 159 (1988)

Referierte Veröffentlichungen

A. Kobylinskiy, M. Kraus, L. Werner, H. Hillmer and R. Brunner, Light folding improves sensor efficiency, Optics and Photonics News. (2023) https://www.optica-opn.org/home/articles/volume_34/december_2023/extras/light_folding_improves_sensor_efficiency/
B. Elsaka, P. Kästner, E. Käkel, R. Donatiello, and H. Hillmer, Investigation of the influence of sublayer thickness on pairing of metallic MEMS shutter blades, (invited), Appl. Sci., 13, 1538 (2023), https://doi.org/10.3390/app13031538
M. Knoblich, X. Uwurukundo, D. Stumpf, M. Kraus, H. Hillmer R. Brunner, „Annular Gray Tone Lithography for the Fabrication of Rotationally Symmetric Continuous Relief Meso- and Microscale Optical Elements”. Photonics 10, 1000 (2023), doi.org/10.3390/photonics10091000
E. Förster, S. Cumme, M. Kraus, H.-J. Dobschal, H. Hillmer, and R. Brunner: Catadioptric sensor concept with interlaced beam paths for imaging and pinpoint spectroscopy, Applied Optics, Vol. 62, pp. 5170-5178, (2023) https://doi.org/10.1364/AO.492506
L. Werner, E. Förster, M. Kraus, H. Hillmer and R. Brunner, Extreme Refractive-, Diffractive- and Hybrid-Hyperchromats: Minimizing the Equivalent Abbe Number of a Two-Lens
System, Photonics 2023, 10, 556. https://doi.org/10.3390/photonics10050556
C. Johannes, S. Macher, L. Niklaus, M. Schott, H. Hillmer, M. Hartung, and H. P. Heim, “Flexible Electrochromic Device on Polycarbonate Substrate with PEDOT:PSS and Color-Neutral TiO₂ as Ion Storage Layer”, Polymers, 15, 1982 (2023), doi.org/10.3390/polym15091982
X. Yang, P. Kästner, E. Käkel, M. Smolarczyk, S. Liu, Q. Li, and H. Hillmer, Study of Dynamics in Metallic MEMS Cantilevers - Pull-in Voltage and Actuation Speed, Appl. Sci. 2023, 13, 1118 (2023), https://doi.org/10.3390/app13021118
M. K. Hasan, S. Liebermann, M. S. Q. Iskhandar, D. Löber, Q. Li, G. Xu, and H. Hillmer, Personalized Light Steering in Buildings Utilizing 2D Actuation in MEMS Micromirror Arrays, Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), ISBN 978-3-87480-380-9, Vol. 78, pp. 217-237, (2022)
A. Kobylinskiy, L. Werner, M. Kraus, H. Hillmer and R. Brunner, Folded beam path architecture for highly efficient filter-based spectral sensors, J. Applied Optics , Vol. 61, No. 33, 9996 (2022), doi.org/10.1364/AO.475260
E. Förster, D. Stumpf, L. Werner, H. Hillmer, and R. Brunner, Hyperchromatic lens doublets with extremely small equivalent Abbe-number employing diffractive elements and refractive materials with exceptional properties, JOSA A Vol. 39, No. 10, pp 1992-2000 (2022) doi.org/10.1364/JOSAA.473546
S. Akhundzada, X. Yang, J. Fiedler, E. Käkel, B. Al-Qargholi, S. Buhmann, A. Ehresmann, and H. Hillmer: A novel approach to construct self-assembled 3D MEMS arrays, Microsystem Technologies, 28, 2139-2148 (2022), https://doi.org/10.1007/s00542-022-05361-1
M. Kraus, T. Hönle, E. Förster, P. Sadlowski, D. Stumpf, A. Schöneberger, B. Laue, R. Brüning, H. Hillmer and R. Brunner, Compact double-pass Echelle spectrometer employing a crossed diffraction grating, Optics express, Vol. 30, pp. 31336-31353, DOI: 10.1364/OE.465208 (2022).
M. Knoblich, M. Kraus, D. Stumpf, L. Werner, H. Hillmer and R. Brunner: Variable ring-shaped lithography for the fabrication of meso- and micro-scale binary optical elements. Applied Optics, Vol. 61, Issue 8, pp. 2049-2059, DOI: 10.1364/AO.451395 (2022)
B. Kaban, S. Bagatur, M. Soter, H. Hillmer, T. Fuhrmann-Lieker: Reversible Photo-Induced Reshaping of Imprinted Microstructures Using a Low Molecular Azo Dye. Polymers, 14, 586, , DOI: 10.3390/polym14030586 (2022)
M. Rothenburger, M. Horn, X. Yu, G. Schulze, K. Muyllaert, P. Zacharias, L. Brabetz, H. Hillmer: Multilevel battery converter with cascaded H-bridges on cell level-battery management system or a renewed attempt for Power Electronic Building Blocks, Technical Digest,2022 24th European Conference on Power Electronics and Applications (EPE' 22 ECCE Europe), ISBN:978-9-0758-1539-9
M. Rothenburger, H. Hillmer, T. Scholl, G. Schulze, K. Muyllaert: Scalable battery cell cascaded H-bridge converter, Technical Digest,pp. 95-100, Power and Energy Student Summit/Power Electronics Student Summit (PESS/ PELSS 2022), ISBN: 978-3-8007-6013-8
K. Hasan, S. Baby, S. Muringakodan, A. Nandakumar, M. S. Q. Iskhandar, V. Hillmer, Q. Li, G. Xu, and H. Hillmer: Energy Saving and Amortization Time Simulation for a Model Room with MEMS Smart Glazing. Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), ISBN 978-3-87480-369-4, pp. 163-188, Vol. 77, (2021)
A. Kobylinskiy, M. Kraus, X. Uwurukundo. H. Hillmer and R. Brunner: Simple but effective-strong efficiency boost for a linear variable filter-based spectrometer. Journal of Optical Microsystems Vol. 1(4), pp. 044501-1 - 044501-14, DOI: 10.1117/1.JOM.1.4.044501 (2021)
W. Janik, A. Zygmanowski, H. Wolff and H. Hillmer: A first proof of-of-concept for the non-invasive, time-efficient measurement of the plasma sodium concentration for individualized dialysis, The International Journal of Artificial Organs, Vol. 45, Issue 11, pp 889-897, DOI: 10.1177/03913988221120831, (2022)
M. Künne, S. Hagemeier, E. Käkel, H. Hillmer und P. Lehmann: Investigation of measurement data of low-coherence interferometry at tilted surfaces in the 3D spatial frequency domain, De Gruyter, tm – Technisches Messen; 88(S1): S65–S70, DOI: 10.1515/teme-2021-0051 (2021)
H. Hillmer, C. Woidt, A. Kobylinskiy, M. Kraus, A. Istock, M.S. Q. Iskhandar, R. Brunner and T. Kusserow: Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology - A Comparison of Size Requirements, Performance, and new Concepts. MDPI Photonics, Vol. 8, 332, pp. 1-46, DOI:10.3390/photonics8080332 (2021)
M.R. Amirzada, Q. Li and H. Hillmer: MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces. Opt Quant Electron 53, 210, DOI: 10.1007/s11082-021-02846-7 (2021)
H. Hillmer, C. Woidt, A. Istock, A. Kobylinskiy, D.T. Nguyen, N. Ahmed, R. Brunner and T. Kusserow: Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers. Nanomaterials, 11(1), 164, DOI: 10.3390/nano110101641 (2021)
H. Hillmer, M.S.Q. Iskhandar, M.K. Hasan, S. Akhundzada, B. Al-Qargholi, A. Tatzel: MOEMS micromirror arrays in smart windows for daylight steering. J. Optical Microsystems, 1(1), 014502-1 - 014502-18 (2021), DOI:10.1117/1.JOM.1.1.014502
N. Worapattrakul, A. Tatzel, V. Viereck, H. Hillmer: Planar Free-Standing Metal Layer Fabrication: Implementing Sub-Structures in Micromirror Arrays for Light Steering Applications. Micro and Nano Syst Lett8, 20, https://doi.org/10.1186/s40486-020-00124-x, (2020)
S. Nazemroaya, M. Iskhandar, Md K. Hasan, Q. Li, H. Hillmer: Concepts for clear View through 3D Structured Surfaces of MEMS Smart Glass: Design, Implementation, Characterization and Validation. Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), ISBN: 978-3-87480-364-9, Vol. 76, S. 101-115, (2020)
D. Löber, S. Dey, B. Kaban, F. Roesler, M. Maurer, H. Hillmer, R. Pietschnig: 3D Micro/Nanopatterning of a Vinylferrocene Copolymer. MDPI Molecules, 25(10), 2438, (2020)
A. Kobylinskiy, B. Laue, E. Förster, B. Höfer, Y. Shen, H. Hillmer, R. Brunner: Substantial increase in detection efficiency for filter array-based spectral sensors. (Editor's pick), Applied Optics, Vol. 59, pp. 2443-2451, (2020) DOI: 10.1364/AO.382714
M. Kraus, E. Förster, V. Bagusat, T. Hönle, X. Uwurkundo, P. Bohnert, R. Brüning, H. Hillmer, R. Brunner: Realization of a compact cross-grating spectrometer and validating experimental tests. Applied Optics, Vol. 59, No 5, pp. 1338-1346 (2020) , DOI: 10.1364/AO.379595 (2020)
J. Meibaum, S. Krause, H. Hillmer, D. Marcelli, C. Strohhoefer: Identification and characterization of fluorescent substances in spent dialysis fluid. The International Journal of Artificial Organs, 43(9): 579-586. (2020) doi:10.1177/0391398820901826
F. Roesler, B. Kaban, D. Klintuch, U. Ha, C. Bruhn, H. Hillmer, R. Pietschnig: Tailoring Phospholes for Imprint of Fluorescent 3D Structures. European Journal of Inorganic Chemistry, 4820-4825 (2019)
M. S. Q. Iskhandar, B. Al-Qargholi, M. M. Khan, A. Tatzel, H. Luo, S. Nazemroaya, Q. Li, and H. Hillmer: Development of optical MEMS-based micromirror arrays for smart window applications: Implementation of subfield addressing and reliability measurements. Jahrbuch Oberflächentechnik, Leuze Verlag (Yearbook surface technology, Leuze publishing house), ISBN 978-3-87480-357-1, Vol. 52, pp. 93-107.(2019)
H. Wilke, N.M. Hoinka, T. Kusserow, T. Fuhrmann-Lieker, H. Hillmer: Determination of the saturation length and study of its effects in optical gain measurements of organic semiconductors using the variable stripe length method. In: Applied Physics Letters Vol.115 173301 pp.1-4 (2019)
B. Allendorf, E. Käkel, U. Ha, S. Hagemeier, H. Hillmer, P. Lehmann: Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles. In: Optics Letters Vol. 44, Issue 14, pp. 3550-3553 (2019)
M. Smolarczyk, L. Jablonka, S. Reuter, H. Hillmer: Self-Aligned Molding Technology (SAMT) for Fabrication of 3D Structures with a Foldable Imprint Mold. Applied Nanoscience, 9(6), pp.1255-1263 (2019) doi 10.1007/s13204-019-01050-0
V. Bagusat, M. Kraus, E. Förster, D. Thomae, T. Hönle, R. Brüning, H. Hillmer, R. Brunner: Concept and optical design of a compact cross-grating spectrometer. In: Journal of the Optical Society of America A, Vol. 36, Issue 3, pp. 345-352, (2019) DOI: 10.1364/JOSAA.36.000345
M. Khan, B. Al-Qargholi, M. Iskhandar, S. Akhundzada, A. Tatzel, H. Hillmer: MEMS-basierte Mikrospiegel-Arrays für eine aktive Lichtlenkung in intelligenten Fenstern. Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), Band 74, pp. 119-132 , ISBN 978-3-87480-349-6 (2018)
H. Hillmer, B. Al-Qargholi, M. M. Khan, N. Worapattrakul, H. Wilke, C. Woidt, A. Tatzel: Optical MEMS-based micromirror arrays for active light steering in smart windows. In: Japanese Journal of Applied Physics, Vol. 57, No. 8S2, 08PA07, pp. 1-13 (2018)
M. Khan, B. Al-Qargholi, M. Iskhandar, S. Akhundzada, A. Tatzel, H. Hillmer: MEMS-basierte Mikrospiegel-Arrays für eine aktive Lichtlenkung in intelligenten Fenstern. In: Jahrbuch Oberflächentechnik, Band 74, pp. 119-132 (2018)
J. Letnev, W. Hazenbiller, A. Osipowicz, A. Beglarian, H. Bouquet, G. Drexlin, F. Glück, J. Garbe, H. Hillmer, P. Marte, T. Thümmler, Ch. Weinheimer: Technical design and commissioning of a sensor net for fine-meshed measuring of the magnetic field at the KATRIN spectrometer. Journal of Instrumentation, Vol. 13, T08010 (2018), doi.org/10.1088/1748-0221/13/08/T08010
Y. Shen, A. Istock, A. Zaman, C. Woidt, H. Hillmer: Fabrication and characterization of multi-stopband Fabry–Pérot filter array for nanospectrometers in the VIS range using SCIL nanoimprint technology. In: Applied Nanoscience, Vol. 8: Issue 6, pp. 1415–1425 (2018)
U-M. Ha, B. Kaban, A. Tomita, K. Krekić, D. Klintuch, R. Pietschnig, A. Ehresmann, D. Holzinger, H. Hillmer: Multifunctional guest–host particles engineered by reversal nanoimprint lithography. In: Applied Nanoscience, Vol. 8: Issue 5, pp. 1161–1169 (2018)
M. Taimoor, A. Alatawi, S. Reuter, H. Hillmer, T. Kusserow: Single-step inductively coupled plasma etching of sputtered Nb2O5/SiO2 multilayer stacks using chromium etch mask. In: Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films, Volume 35, 4, Issue 4, pp 041302/1-5 (2017)
Y. Saddeek, K. Saber, A. El-Maaref, H. Hillmer, H. Wilke, M. Abdelawwad: Spectroscopic properties and Judd-Ofelt analysis of Dy³⁺ ions in molybdenum borosilicate glasses. In: Journal of Luminescene, Volume 196, pp. 477-484 (2018)
S. Reuter, M. Smolarczyk, A. Istock, U. Ha, O. Schneider, N. Worapattrakul, S. Nazemroaya, H. Hoang, L. Gomer, F. Pilger, M. Maniak, H. Hillmer: Bending Properties of two- and three-dimensional-shaped nanoparticles fabricated via substrate conformal imprint lithography. In: Springer Science+Business Media Dordrecht, Journal of Nanoparticle Research 19: 184, pp. 1-13 (2017)
N. Götte, T. Winkler, T. Meinl, T. Kusserow, B. Zielinski, C. Sarpe, A. Senftleben, H. Hillmer, T. Baumert: Temporal Airy pulses for controlled high aspect ratio nanomachining of dielectrics. In: Optica. Vol. 3, (4), pp. 389-395 (2016)
D. T. Nguyen, M. Ababtain, I. Memon, A. Ullah, A. Istock, C. Woidt, W. Xie, P. Lehmann, H. Hillmer: 3D nanoimprint for NIR Fabry-Pérot filter arrays: fabrication, characterization and comparison of different cavity designs. In: Applied Nanoscience. Volume 6, Issue 8, pp. 1127-1135 (2016)
V.R. Kolli, C. Woidt, H. Hillmer: Residual-layer-free 3D nanoimprint using hybrid soft templates. In: Microelectronic Engineering: Vol. 149, pp. 159-165 (2016)
J.C. Shrestha, S. Blom, B. Witzigmann, H. Hillmer: Investigation of Relative Intensity Noise in Asymmetric External Cavity Semiconductor Laser Sensors: Influence of Dual-Line Spectral Separation and Linewidth Enhancement Factor. In: IEEE Sensors Journal: Vol. 15, pp. 6619-6624 (2015)
V.R. Kolli, C. Woidt; H. Hillmer: Patterning of Polymer Arrays with Enhanced Aspect-Ratio Using Hybrid Substrate Conformal Imprint Lithography. In: Haider F. Abdul Amir, Alexander M. Korsunsky and Maria Mucha (Ed.): Advanced Materials Research: Vol. 1119, pp. 179-183 (2015)
I. Memon, Y. Shen, A. Khan, C. Woidt, H. Hillmer: Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry-Pérot-filter-array-based nanospectrometers. In: Applied Nanoscience, Volume 6, Issue4, pp. 599-606 (2016)
M.R. Amirzada, A. Tatzel, V. Viereck, H. Hillmer: Surface roughness analysis of SiO2 for PECVD, PVD and IBD on different substrates. In: Applied Nanoscience. Volume 6, Issue 2, pp. 215-222 (2016)
A. Ullah, H. Wilke, I. Memon, Y. Shen; D. T. Nguyen, C. Woidt, H. Hillmer: Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry–Pérot filter array with 3D nanoimprinted cavities. In: Journal of Micromechanics and Microengineering. Volume 25, pp. 055019 1-8 (2015)
T. Fuhrmann-Lieker, J. Lambrecht, N. Hoinka, M. Kiurski, A. Wiske, G. Hagelstein, N. Yurttagül, M. Abdel-Awwad, H. Wilke, F. Messow, H. Hillmer, J. Salbeck: Optical amplification and stability of spiroquaterphenyl compunds and blends. In: Journal of the European Optical Society - Rapid publications. Vol. 10, pp. 15007 (2015)
M. Abdel-Awwad, H. Luan, F. Messow, T. Kusserow, A. Wiske, A. Siebert, T. Fuhrmann-Lieker, J. Salbeck, H. Hillmer: Optical amplification and photodegradation in Films of spiro-quaterphenyl and its derivatives. In: Journal of Luminescence. Vol. 156, pp. 47-54 (2015)
C. Schmidt, M. Smolarczyk, L. Gomer, H. Hillmer, A. Ehresmann: Artificial sub-µm magnetic patterning by He⁺ ion bombardment through a mask fabricated by Ultraviolet NanoImprint Lithography (UV-NIL). In: Nuclear Inst. and Methods in Physics Research, B Volume 322, pp. 59-62 (2014)
F. Messow, C. Welch, A. Eifert, W.C. Ang, N.S. Hoe, T. Kusserow, H. Hillmer: Deep single step vertical ICP-RIE etching of ion beam sputter deposited SiO₂/Si multilayer stacks. In: Micorelectron. Eng. Vol. 113, pp. 70-73 (2014)
X. Wang, A. Albrecht, H.H. Mai, C. Woidt, T. Meinl, M. Hornung, M. Bartels, H. Hillmer: High resolution 3D NanoImprint technology: template fabrication, application in Fabry-Perot-filter-array-based optical nanospectrometers. In: Micorelectron. Eng. Volume 110, pp. 44-51 (2013)
Y. Monnai, K. Altmann, C. Jansen, H. Hillmer, M. Koch, H. Shinoda: Terahertz beam focusing based and variable focusing using programmable diffraction gratings: Optics Express Volume. 21 Issue 2, pp. 2347-2354 (2013)
Y. Monnai, K. Altmann, C. Jansen, M. Koch, H. Hillmer: Terahertz beam focusing based on plasmonic waveguide scattering. In: Applied Physics Letters, Volume 101, Issue 15, pp. 151116 1-3(2012)
T. Kusserow, M. Wulf, R. Zamora, K. Kanwar, H. Hillmer: Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching. In: Microelectronic Engineering, Volume 102, pp. 25-28 (2013)
K. Schultz, A. Tatzel, N. Worapattrakul, C. Woidt, A. Jäkel, V. Viereck, H. Hillmer: Micro- and nano-scaled sensors and actuators for aerospace applications. In: IEEE Technical Digest INSS, E-ISBN 978-1-4673-1786-3/12 (2012)
H. H. Mai, A. Albrecht, C. Woidt, X. Wang, V. Daneker, O. Setyawati, T. Woit, K. Schultz, M. Bartels, H. Hillmer: 3D nanoimprinted Fabry-Pérot filter arrays and methodologies for optical characterization. In: Applied Physics B: Lasers and Optics, Volume 107, Issue 3, pp. 755-764 (2012)
U. Akcakoca, B. Witzigmann, R. Zamora, T. Kusserow, H. Hillmer: Frequency domain analysis of modes in a photonic crystal micro-opto-electro-mechanical system with periodically arranged circular holes. In: Optical and Quantum Electronics, Volume 44, Issue 3-5, pp. 273-277 (2012)
Y. Monnai, H. Shinoda, H. Hillmer: Focused terahertz radiation formed by coherently scattered surface plasmon polaritons from partially uncorrugated metal surfaces. In: Applied Physics B: Lasers and Optics, Volume 104, Issue 4, pp. 913-917 (2011)
Y. Monnai, H. Shinoda, A. Jäkel, V. Viereck, H. Hillmer: Terahertz Focus Steering Technique for Quasi-Optical Networked Sensing Applications. IEEE Technical Digest INSS (2011)
Q. Li, A. Jäkel, V. Viereck and H. Hillmer: Design of self-assembling micromirror arrays for light guiding applications, Microsystem Technologies 16(5), 895-899 (2010)
A. Albrecht, X. Wang, H. H. Mai, T. Schotzko, I. Memon, M. Bartels, M. Hornung, H. Hillmer: High vertical resolution 3D Nano-Imprint Technology and its application in optical nanosensors, Nonlinear Optics and Quantum Optics, Volume 43, pp. 339-353 (2012)
O. Setyawati, M. Engenhorst, M. Bartels, V. Daneker, S. Wittzack, T. Woit, F. Köhler, H. Hillmer: Characterization of dry etching of TiO2/SiO2 distributed Bragg reflectors for tunable optical sensor arrays. Journal of Micro/Nanolithography, MEMS, and MOEMS, Volume 9, No 04, pp. 041110 1-6 (2010)
M. Ahmad, J. Sonksen, N. Storch, H. Krause, J. Shrestha, S. Blom, A. Pötzel, B. Kudhair, H. Hillmer: Semiconductor laser-based sensors for intelligently networking sensing systems. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8, pp. 101-106 (2010),
A. Albrecht, H. H. Mai, V. Daneker, X. Wang, S. Schudy, T. Woit, K. Schultz, C. Woidt; O. Setyawati, F. Köhler, S. Wittzack, M. Engenhorst, M. Bartels, H. Hillmer: Optical Characterization of High-resolution Optical Nanospectrometers for Networked Sensing Systems. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8, pp. 175-178 (2010)
A. Jäkel, J. Clobes, Q. Li, V. Viereck, H. Hillmer: Integration of Actuable MEMS in Networked Sensing Systems. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8, pp. 61-64 (2010)
X. Wang, A. Albrecht, S. Schudy, T. Woit, V. Daneker, K. Schultz, H. H. Mai, F. Köhler, S. Wittzack, M. Bartels, H. Hillmer: High-resolution, Low-cost Microsensors for Networked Sensing Systems: Optical Nanospectrometers with Nanoimprinted Cavities of Filter Arrays. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8, pp. 171-174 (2010)
R. Zamora, T. Kusserow, M. Wulf, K. Kanwar, B. Witzigmann, H. Hillmer: Structuring of 2D Photonic Crystal on InP Membranes as Polarizing Element for Optical MEMS Based Sensor Systems. IEEE Technical Digest INSS, ISBN 978-1-4244-7910-8, pp. 179-182 (2010)
Q. Li, A. Jäkel, V. Viereck, H. Hillmer: Design of self-assembling micromirror arrays for light guiding applications. Microsystem Technologies, Volume 16, Issue 5, pp 895–899 (2009)
V. Viereck, J. Ackermann, Q. Li, A. Jäkel, J. Schmid, H. Hillmer: Sun Glasses for Buildings based on Micro Mirror Arrays: Technology, Control by Networked Sensors and Scaling Potential (invited). IEEE Technical Digest INSS, pp. 135-139 (2008)
H. Hillmer, V. Viereck, T. Kusserow, Y. Wang, S. Irmer, N. Dharmarasu, D. Todorov, A. Jäkel, Q. Li, A. Hasse, D. Bienhaus, M. Bartels: Nanophotonic devices and components: micromachined motion, fabrication, characterization, scaling potential and applications. In: Technical digest 3rd Shanghai International Nanotechnology Symposium 2007, pp. 245 (2007)
H. Hillmer, Y. Wang, T. Kusserow, N. Dharmarasu, A. Hasse, O. Mikami, M. Bartels: Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems. In: WSEAS Transactions on Communications 6, pp. 396 (2007)
A. Kricke, M. Joodaki, N. Dharmarasu, G. Kompa, H. Hillmer: Quasi-monolithic integration of high-power GaN-based HEMTs for high-frequency applications. In: Semiconductor Science and Technology Volume 22, No 11, pp. 1245-1248 (2007)
A. Hasse, S. Irmer, J. Daleiden, N. Dharmarasu, S. Hansmann, H. Hillmer: Wide continuous tuning range of 221nm by InP / air-gap vertical-cavity filters. In: Electronics Letters, Volume 42, Issue 17, pp. 974-975 (2006)
H. Hillmer, S. Irmer, F. Römer, A. Hasse, J. Daleiden, C. Prott, S. Hansmann, M. Strassner: MOEMS vertical-air-cavity filters are widely and continuously tunable around 1.55 microns. In: SPIE Newsroom 10.1117/2.1200601.0005, pp. 1-4 (2006)
T. Scholz, T. Debski, W. Barth, F. Römer, H. Hillmer: A high-resolution optical study of cantilever heterostructure layer geometries. In: Journal of Micromechanics and Microengineering Volume16, No. 12, pp. 2765-2770 (2006)
S. Irmer, K. Alex, J. Daleiden, I. Kommallein, M. Oliveira, F. Römer, A. Tarraf, H. Hillmer: Surface micromachined optical low-cost all-air-gap filters based on stress-optimized Si3N4 layers. In: Journal of Micromechanics and Microengineering Volume 15, No.4, pp. 867-872 (2005)
M. Joodaki, G. Kompa, H. Hillmer: Thermomechanical stress analysis and measurement in quasi-monolithic integration technology (QMIT). In: IEEE Transactions on device and material reliability, Volume 5, No.3, pp. 581-594 (2005)
M. Joodaki, G. Kompa, H. Hillmer, R. Kassing: Heat transfer improvement in quasi-monolithic integration technology. In: Journal of Microlithography, Microfabrication, and Microsystems, Volume 4, pp. 33011/1-7 (2005)
E. Ataro, C Prott, F. Römer, H. Hillmer: Tailored scaling: a possibility to improve the performance of ultra-wide continuously tunable photonic devices. In: Applied Physics B: Lasers and Optics, Volume79, Issue1, pp. 87-93 (2004)
H. Hillmer: Periodische Nanostrukturen in der Photonik - Grundlagen, natürliche Vorbilder, Herstellung und Anwendungen in der hochbitratigen Kommunikationstechnik. In: Telekommunikation Aktuell 58, pp. 10-18 (2004)
H. Hillmer, B. Klepser: Low-cost edge-emitting DFB laser arrays for DWDM communication systems implemented by bent and tilted waveguides. In: IEEE Journal of Quantum Electronics 40, pp. 1377-1383 (2004)
H. Hillmer, F. Träger: Einführung in die Nanotechnologie. In: Telekommunikation Aktuell 58, pp. 1 (2004)
H. Hillmer, C. Prott, F. Römer, S. Hansmann: Theoretical model calculations of long-haul edge-emitting communication lasers: comparison of fractally mixed, fine-pitched and continuously chirped DFB gratings. In: Semiconductor Science and Technology 19, pp. 939-945 (2004)
A. Tarraf, F. Riemenschneider, M. Strassner, J. Daleiden, S. Irmer, H. Halbritter, H. Hillmer, P. Meissner: Continuously tunable 1.55-µm VCSEL implemented by precisely curved dielectric top DBR involving tailored stress. In: IEEE Phot. Technol. Lett. 16, pp .720-722 (2004)
A. Tarraf, J. Daleiden, S. Irmer, D. Prasai, H. Hillmer: Stress investigation of PECVD dielectric layers for advanced optical MEMS. In: Journal of Micromechanics and Microengineering 14, pp. 317-323 (2004)
J. Daleiden, A. Tarraf, S. Irmer, F. Römer, C. Prott, E. Ataro, M. Strassner, H. Hillmer: Wide and continuous wavelength tuning of microcavity devices for optoelectronic applications. In: Journal of Microlithography, Microfabrication, and Microsystems 2, pp. 265-274 (2003)
J. Daleiden, H. Hillmer: Multiple air-gap filters and constricted mesa lasers - material processing meets the front of optical device technology. In: Applied Physics B: Lasers and Optics 76, pp. 821-832 (2003)
H. Hillmer: Highlighting an interesting parallel between quantum electronics and quantum photonics (Letter to the Editor). In: MRS Bulletin 28, pp. 547 (2003)
H. Hillmer, R. Germann: Introductory article: Photonic Materials for Optical Communications. In: MRS Bulletin 28, pp. 340–344 (2003)
S. Irmer, J. Daleiden, V. Rangelov, C. Prott, F. Römer, M. Strassner, A. Tarraf, H. Hillmer: Ultra low biased widely continuously tunable fabry-Perot filter. In: IEEE Journal of Photonic Technologies Letters 15, pp. 434-436 (2003)
M. Joodaki, G. Kompa, H. Hillmer: An enhanced quasi-monolithic integration technology for microwave and millimeter wave applications. In: IEEE Transactions on advanced packaging 26, pp. 402-409 (2003)
C. Prott, F. Römer, E.O. Ataro, J. Daleiden, S. Irmer, A. Tarraf, H. Hillmer: Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs. In: IEEE J. of Select. Topics in Quantum. Electron. 9, pp. 918-928 (2003)
F. Römer, C. Prott, S. Irmer, J. Daleiden, A. Tarraf, H. Hillmer, M. Strassner: Tuning efficiency and linewidth of electrostatically actuated multiple air-gap filters. In: Applied Physics Letters 82, pp. 176-178 (2003)
J. Daleiden, V. Rangelov, S. Irmer, E. Römer, M. Strassner, C. Prott, A. Tarraf, H. Hillmer: Record tuning range of InP-based multiple air-gap MOEMS filter. In: Electronics Letters 38, pp. 1270-1271 (2002)
H. Hillmer: Prolegomena und Laudatio zu Von der Radartechnik zur modernen Kommunikationstechnik (invited). In: Telekommunikation Aktuell 56, pp. 1-2 (2002)
H. Hillmer, J. Daleiden, C. Prott, F. Römer, S. Irmer, V. Rangelov, A. Tarraf, S. Schüler, M. Strassner: Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices (invited). In: Applied Physics B: Lasers and Optics 75, pp. 3-13 (2002)
H. Hillmer: Der Transistor - die Entwicklung von den Anfängen bis zu den frühen integrierten Schaltungen. In: Der Fernmeldeingenieur 54, pp. 1-107 (2000)
H. Hillmer, S. Marcinkevicius: Optically detected carrier transport in III/V semiconductor QW structures: experiments, model calculations and applications in fast 1.55 µm laser devices (invited): Applied Physics B: Lasers and Optics 66, pp. 1-17 (1998)
B. Klepser, H. Hillmer: Investigations of thermal crosstalk in laser arrays for WDM applications. In: IEEE Journal of Lightwave Technology 16, pp. 1888-1894 (1998)
A. Hangleiter, M. Geiger, C. Knorr, P. König, D. Ottenwälder, T. Riedl, F. Scholz, M. Zimmermann, H. Hillmer, F. Steinhagen, H. Burkhard: Carrier Transport in InP-Based Lasers, Modulators, and Optical Switching Devices. In: Physica Status Solidi B Basic Research 204, pp. 570-573 (1997)
H. Hillmer: Heterostructures in the AlGaInAs material system: MBE growth and characterization (review paper). In: Research Trends 3, pp. 159-185 (1997)
H. Hillmer, A. Grabmaier, H. Burkhard: Study of Continuously distributed phase shifts by chirped distributed-feedback gratings for 1.55 µm DFB lasers. In: IEE Proceedings-Optoelectronics 144, pp. 256-260 (1997)
H. Hillmer, R. Lösch, W. Schlapp: Strain-balanced AlGaInAs/InP heterostructures with up to 50 QWs by MBE. In: Journal of Crystal Growth 175-176, pp. 1120-1125(1997)
S. Marcinkevicius, H. Hillmer, R. Lösch, K. Fröjdh, U. Olin: Interwell Carrier Distribution in InAlGaAs Quantum Well Laser Structures. In: Physica Status Solidi B Basic Research 204, pp. 577-580 (1997)
S. Marcinkevicius, H. Hillmer, R. Lösch, U. Olin: Photoexcited carrier dynamics in InAlGaAs/InP quantum well laser structures. In: Applied Physics Letters 69, pp. 1101-1103 (1996)
M. Zimmermann, S. Krämer, A. Hangleiter, F.S. and H. Hillmer, H. Burkhard: Carrier transport in asymmetrically confined 1.55 mu m multiple quantum well laser structures. In: Applied Physics Letters 69, pp. 2324-2326 (1996)
T.F. Albrecht, J.H.H. Sandmann, J. Feldmann, W. Stolz, E.O. Göbel, H. Hillmer, R. Lösch, W. Schlapp: Design and application of a femtosecond optical parametric oscillator for time-resolved spectroscopy of semiconductor heterostructures. In: Applied Physics B: Lasers and Optics 60, pp. 459-467 (1995)
S. Hansmann, H. Hillmer, H. Walter, H. Burkhard, B. Hübner, E. Kuphal: Variation of coupling coefficients by sampled gratings in complex coupled distributed-feedback lasers. In: IEEE Journal of Selected Topics in Quantum Electronics 1, pp. 341-345 (1995)
H. Hillmer, A. Grabmaier, S. Hansmann, H.L. Zhu, H. Burkhard, K. Magari: Tailored DFB laser properties by individually chirped gratings using bent waveguides. In: IEEE Journal of Selected Topics in Quantum Electronics 1, pp. 356-362 (1995)
H. Hillmer, A. Grabmaier, H. Zhu, S. Hansmann, A. Burkhard: Continuously chirped DFB gratings by specially bent waveguides for tunable lasers. In: IEEE Journal of Lightwave Technology 13, pp. 1905-1912 (1995)
H. Hillmer, R. Lösch, W. Schlapp: Compositional influence on photoluminescence linewidth and Stokes shift in In_xAl_zGa_1-x-zAs/In_yAl_uGa_1-u-yAs/InP heterostructures grown by molecular beam epitaxy. In: Journal of Applied Physics 77, pp. 5440-5442 (1995)
H. Hillmer, R. Lösch, W. Schlapp, A. Pöcker, H. Burkhard: MBE grown strain-compensated AlGaInAs/AlGaInAs/InP MQW laser structures. In: Electronics Letters 31, pp. 1346-1348 (1995)
H. Hillmer, R. Lösch, W. Schlapp, A. Pocker: Characterization of high-quality molecular beam epitaxial grown InxAlzGa1-x-zAs/InyAluGa1-u-yAs/InP heterostructures. In: Journal of Crystal Growth 146, pp. 159-163 (1995)
H. Hillmer: Bent waveguides improve DFB laser performance: Fiberoptic components handbook (invited). In: Laser focus world 31, pp. 117-122 (1995)
H. Hillmer, S. Hansmann, H. Burkhard: Facet influence on wavelength tunability and linewidth chirp in InGaAs/InAlGaAs quantum-well distributed feedback lasers under high-bit-rate modulation. In: Optical Engineering 34, pp. 2985-2992 (1995)
H. Hillmer: Arbitrarily chirped DFB gratings for photonic devices using a new method based on bent waveguides. In: Pure and Applied Optics 4, pp. 365-374 (1995)
H. Hillmer, R. Lösch, W. Schlapp, H. Burkhard: MBE growth and study of strain-compensated AlzGa1−z−xInxAs/AluGa1−u−vInvAs/InP quantum wells. In: Physical Review B Volume52, Issue 24, pp. R17025(R) (1995)
V. Hofsäß, J. Kuhn, C. Kaden, V. Härle, H. Burkhard, F. Scholz, H. Schweizer, H. Hillmer, R. Lösch, W. Schlapp: Optical integration of laterally modified multiple quantum well structures by implantation enhanced intermixing to realize gain coupled DFB lasers. In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 106, pp. 471-476 (1995)
V. Hofsäss, J. Kuhn, H. Schweizer, H. Hillmer, R. Lösch, W. Schlapp: Interdiffusion behavior in n-doped and undoped GaInAs/AlGaInAs multiple-quantum-well structures grown by molecular-beam epitaxy. In: Journal of Applied Physics 78 pp. 3534-3536 (1995)
S. Mohrdiek, H. Burkhard, F. Steinhagen, H. Hillmer, R. Lösch, W. Schlapp, R. Göbel: 10-Gb/s standard fiber transmission using directly modulated 1.55-µm quantum-well DFB lasers. In: IEEE Photon. Technol. Lett. 7, pp. 1357-1359 (1995)
S. Mohrdiek, H. Burkhard, H. Walter, H. Schöll, F. Steinhagen, H. Hillmer, R. Lösch, W. Schlapp, R.G. Göbel, H. Janning, B. Kempf, S. Hansmann, A. Mattheus: Multigigabit/s standard fibre transmission by injection-locked directly modulated lasers. In: Pure and Applied Optics: Journal of the European Optical Society Part A 4, pp. 409-415(7) (1995)
F. Steinhagen, H. Hillmer, R. Lösch, W. Schlapp, H. Walter, R. Göbel, E. Kuphal, H.L. Hartnagel, H. Burkhard: AlGaInAs/InP 1.5µm MQW DFB laser diodes exceeding 20 GHz bandwidth. In: Electronics Letters 31, pp. 274-275 (1995)
H.W. Dinges, H. Hillmer, H. Burkhard, R. Lösch, H. Nickel, W. Schlapp: Study of In0.53Ga0.47As/In0.52Al0.48As quantum wells on InP by spectroscopic ellipsometry and photoluminescence. In: Surface Science 307-309, pp. 1057-1060 (1994)
S. Hansmann, H. Burkhard, H. Walter, H. Hillmer: A tractable large-signal dynamic model-application to strongly coupled distributed feedback lasers. In: IEEE Journal Lightwave Technology 12, pp. 952-956 (1994)
S. Hansmann, H. Walter, H. Hillmer, H. Burkhard: Static and dynamic properties of InGaAsP-InP distributed feedback lasers - a detailed comparison between experiment and theory. In: IEEE Journal of Quantum Electronics 30, pp. 2477-2484 (1994)
H. Hillmer, A. Grabmaier, S. Hansmann, H. Burkhard: Continuously distributed phase shifts in chirped DFB lasers using bent waveguides. In: Electronics Letters 30, pp. 1483-1484 (1994)
H. Hillmer, S. Hansmann, H. Burkhard, H. Walter, A. Krost, D. Bimberg: Study of wavelength shift in InGaAs/InAlGaAs QW DFB lasers based on laser parameters from a comparison of experiment and theory. In: IEEE Journal of Quantum electronics 30, pp. 2251-2261 (1994)
H. Hillmer, H.L. Zhu, A. Grabmaier, S. Hansmann, H. Burkhard, K. Magari: Novel tunable semiconductor lasers using continuously chirped distributed feedback gratings with ultrahigh spatial precision. In: Applied Physics Letters 65, pp. 2130-2132 (1994)
H. Hillmer, S. Hansmann, H. Walter, H. Burkhard: Experimental and theoretical study of the facet phase influence on the wavelength shift in InGaAs/InAlGaAs quantum well distributed feedback lasers. In: Applied Physics Letters 64, pp. 698-700 (1994)
H. Hillmer, T. Kuhn: Study of carrier capture and vertical transport in quantum well heterostructures. In: Semiconductor Science and Technology 9 (1994), pp. 727-729 (1994)
H. Hillmer, T. Kuhn, A. Greiner, S. Hansmann, H. Burkhard: The role of vertical transport and capture of electrons and holes for the transient optical response in quantum-well heterostructures. In: Optical and Quantum Electronics, Volume 26, Issue 7, pp. S691-S703 (1994)
A. Mecozzi, A. Sapia, P. Spano, H. Burkhard, S. Hansmann, H. Hillmer: Nonlinearities in high-index-coupled Lambda/4-shifted distributed-feedback semiconductor lasers. In: IEE Proceedings-Optoelectronics 141, pp. 8-12 (1994)
A. Griesinger, C. Kaden, N. Lichtenstein, J.H. and G. Lehr, R. Bergmann, A. Menschig, H. Schweizer, H. Hillmer, H.W.P. Koops, J. Kretz, M. Rudolph: Investigations of artificial nanostructures and lithography techniques with a scanning probe microscope. In: J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. (USA) 11, pp. 2441-2445(1993)
S. Hansmann, H. Hillmer, H. Janning, H. Burkhard: Theoretical and experimental study of inhomogeneously pumped distributed feedback lasers. In: Journal of Applied Physics Volume 73, No 11, pp. 7138-7144 (1993)
H. Hillmer, A. Forchel, C.W. Tu: An optical study of the lateral motion of two-dimensional electron-hole pairs in GaAs/AlGaAs quantum wells. In: Journal of Physics: Condensed Matter, Volume 5, No.31 pp. 5563-5580 (1993)
H. Hillmer, K. Magari, Y. Suzuki: Chirped gratings for DFB laser diodes using bent waveguides. In: IEEE Journal of Photonic Technologies Letter, Volume 5, Issue 1, pp. 10-12 (1993)
H. Hillmer, A. Forchel, S. Hansmann, M. Morohashi, E. Lopez, H.P. Meier, K. Ploog: Erratum: Optical investigations on the mobility of two-dimensional excitons in GaAs/Ga1-xAlxAs quantum wells. In: Physical Review B 47, Volume 39, No 15 pp. 6863+ (1993)
H. Hillmer, H. Zhu, H. Burkhard: Enhanced tunability of asymmetric three-section InGaAsP/InP distributed feedback lasers. In: Journal of Applied Physics 73 (1993), pp. 1035-1038 (1993)
H. Hillmer, C.W. Tu: Two-dimensional electron-hole pair diffusivities in thin GaAs/AlGaAs Quantum Wells. In: Applied Physics A: Materials Science & Processing Volume 56, Issue 5, pp. 445-448 (1993)
S. Hansmann, H. Burkhard, K. Dahlhof, W. Schlapp, R. Losch, H. Nickel, H. Hillmer: Design and realization of InGaAs/GaAs strained layer DFB quantum well lasers. In:, Journal ofLightwave Technology, Volume 10,Issue5, pp. 620-625 (1992)
H. Hillmer, A. Forchel, R. Sauer, C.W. Tu: Enhanced exciton mobilities in GaAs/AlGaAs and InGaAs/InP quantum wells. In: Semiconductor Science and Technology, Volume 7, No.3 B, pp. B235-B239 (1992)
H. Hillmer, A. Forchel, C.W. Tu: Enhancement of electron-hole pair mobilities in thin GaAs/AlxGa1-xAs quantum wells. In: Physical Review B 45, pp. 1240+ (1992)
H. Hillmer, S. Hansmann, A. Forchel: Comment on "Radiative recombination processes of the many-body states in multiple quantum wells". In: Physical Review B 45, pp. 8782+ (1992)
H. Hillmer, S. Hansmann, H. Burkhard: 1.53 µm InGaAsP-InP first-order Lambda/4-shifted distributed feedback lasers with high coupling coefficients. In: IEEE Journal of Quantum Electronics 27, pp. 1753-1758 (1991)
H. Hillmer, A. Forchel, T. Kuhn, G. Mahler, H.P. Meier: Optical studies of vertical ambipolar transport and interface recombination velocities in GaAs/Al0.5Ga0.5As double-quantum-well heterostructures. In: Physical Review B 43, pp. 13992+ (1991)
H. Hillmer, S. Hansmann, H. Burkhard: Realization of high coupling coefficients in 1.53 mu m InGaAsP/InP first-order quarter-wave shifted distributed feedback lasers. In: Applied Physics Letters 57, pp. 534-536 (1990)
H. Hillmer, A. Forchel, R. Sauer, C.W. Tu: Interface-roughness-controlled exciton mobilities in GaAs/Al0.37Ga0.63As quantum wells. In: Physical Review B 42, pp. 3220+ (1990)
H. Hillmer, A. Forchel, S. Hansmann, M. Morohashi, E. Lopez, H.P. Meier, K. Ploog: Optical investigations on the mobility of two-dimensional excitons in GaAs/Ga1-xAlxAs quantum wells. In: Physical Review B 39, pp. 10901 (1989)
H. Hillmer, A. Forchel, S. Hansmann, M. Morohashi, H.P. Meier, K. Ploog: Experimental and theoretical study of scattering mechanisms for 2D excitons in GaAs/AlGaAs quantum wells. In: Solid-State Electronics 32, pp. 1771-1775 (1989)
H. Hillmer, S. Hansmann, A. Forchel, M. Morohashi, E. Lopez, H.P. Meier, K. Ploog: Two-dimensional exciton transport in GaAs/GaAlAs quantum wells. In: Applied Physics Letters 53, pp. 1937-1939 (1988)
H. Hillmer, A. Forchel, S. Hansmann, E. Lopez, G. Weimann: High resolution studies of 2 D plasma transport in GaAs/GaAlAs quantum wells. In: Solid-State Electronics 31, pp. 485-488 (1988)
H. Hillmer, T. Kuhn, B. Laurich, A. Forchel, G. Mahler: Experimental and theoretical investigations of free exciton transport in Si. In: Physica Scripta Volume 35, No.4, pp. 520 (1987)
H. Hillmer, G. Mayer, A. Forchel, K.S. Löchner, E. Bauser: Optical time-of-flight investigation of ambipolar carrier transport in GaAlAs using GaAs/GaAlAs double quantum well structures. In: Applied Physics Letters, Volume 49, Issue15, pp. 948-950 (1986)
A. Forchel, B. Laurich, H. Hillmer, G. Tränkle, M. Pilkuhn: Optical studies of fast plasma transport in Si. In: Journal of Luminescence Volume 30, Issue1-4, pp. 67-81 (1985)

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A. Kobylinskiy, M. Kraus, H. Hillmer, R. Brunner: “Comparison of different methods to substantially improve the efficiency of filter-based spectroscopic sensors”, SPIE Proceedings, Vol 12516 Next-Generation Spectroscopic Technologies XV, 125160J, doi.org/10.1117/12.2663858 (2023)
M. Kraus, T. Hönle, E. Förster, H. Hillmer, and R. Brunner: “Compact cross-grating spectrometer in double-pass configuration: design, implementation, and test”, SPIE Proceedings, Vol 12516 Next-Generation Spectroscopic Technologies XV, 1251607, dx.doi.org/10.1117/12.2664010 (2023)
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A. Stelter, M. Künne, E. Käkel, H. Hillmer, P. Lehmann „Joint DFG Project, 2nd period: Production of specific 3D nano-particles and nano-structures for the development of an automated optical characterization using high-resolution interference microscopy”, CINSaT Newsletter 2/2023
H. Hillmer, M.S.Q. Iskhandar, M.K. Hasan, D. Löber, X. Yang, E. Käkel, P. Kästner, Smart glass MEMS micromirror arrays for personalized daylight steering, energy saving, and 3D self-assembly, Technical digest, GCPD Conference, Berlin 2022
P. Kästner, E. Käkel, S. Akhundzada, R. Donatiello and H. Hillmer, Development of self-assembled 3D MEMS Paired Shutter Arrays for studies on Casimir forces, Technical Digest MOC 2022, #1054, p. 74-75 (2022).
M. K. Hasan, D. Löber, M. S. Q. Iskhandar, G. Xu, and H. Hillmer, Implementation of 2D Actuation in MEMS based Micromirror Arrays, Technical Digest MOC 2022, #1052, p. 72-73 (2022).
A. Kobylinskiy, L. Werner, M. Kraus, H. Hillmer and R. Brunner, Comparison of Various Methods for Improving the Efficiency of Filter-Based Sensors, Technical Digest MOC 2022, #1055, p. 127-128 (2022).
M. Knoblich, M. Kraus, D. Stumpf, L. Werner, H. Hillmer and R. Brunner, Lithographic Fabrication of Rotationally Symmetric Meso- and Microscale Optical Elements using a Variable Diameter Annular Light Distribution, Technical Digest MOC 2022, #1057, p. 47-48 (2022).
M. Kraus, E. Förster, V. Bagusat, T. Hönle, X. Uwurukundo, P. Bohnert, R. Brüning, H. Hillmer, R. Brunner: Compact, astigmatism corrected cross-grating spectrometer. In EPJ Web Conf., 238, 03005, DOI: 10.1051/epjconf/202023803005 (2020)
M. K. Hasan, B. Kaban, E. Käkel, B. Elsaka and H. Hillmer, 3-dimensional nanostructures, Festschrift 20 Jahre CINSaT, pp. 124—131 (2022)
M. Knoblich, M. Kraus, D. Stumpf, E. Förster, L. Werner, H. Hillmer, R. Brunner, "Mesoscale surface patterning by ring-shaped lithography for single and array optical elements," Proc. SPIE 12298, Ninth European Seminar on Precision Optics Manufacturing, 122980D (2022); doi.org/10.1117/12.2632159
H. Hillmer, M. S. Iskhandar, B. Elsaka and Th. Kusserow: Nanophotonic sensorics: methodologies, resolution and miniaturization limits. In: CINSaT Newsletter No. 11, pp.05-07, (2021)
M. Knoblich, M. Kraus, E. Förster, H.- J. Dobschal, D. Stumpf, L. Werner, X. Uwurukundo, H. Hillmer, R. Brunner: Variable, ringförmige Belichtung zur lithografischen Herstellung rotationssymmetrischer mikrooptischer Elemente - Konzeption und Funktionsnachweis. DGaO-Proceedings (2021), ISSN: 1614-8436, www.dgao-proceedings.de/download/122/122_b30.pdf
H. Hillmer, M. S. Iskhandar and E. Lochridge : Smart glass has a bright future. SPIE Newsroom 2021, https://www.spie.org/news/smart-glass-has-a-bright-future
A. Kobylinskiy, B. Laue, E. Förster, B. Höfer, Y. Shen, M. Kraus, X. Uwurukundo, H. Hillmer, R. Brunner: Einfacher, aber wirkungsvoller Ansatz zur Effizienzsteigerung filterbasierter Sensoren Konzept der spektralen Vorselektion. DGaO-Proceedings (2021) ISSN: 1614-8436, https://www.dgao-proceedings.de/download/122/122_a20.pdf
H. Hillmer, Mysteriöse quantenphotonische Kräfte im Nanokosmos: der Casimir Effekt, Tagungsband, SFN Schülerkongress (2021)
M. Knoblich, M. Kraus, E. Förster, H.-J. Dobschal, D. Stumpf, L. Werner, X. Uwurukundo, H. Hillmer, R. Brunner: Konzept für ringförmige Grautonlithografie zur Herstellung rotationssymmetrischer mikrooptischer Elemente. Tagungsband, pp. 24-29, 21. NWK (2021)
H. Hillmer, M. S. Iskhandar and E. Lochridge : Smart glass has a bright future. In: SPIE Newsroom 2021, https://www.spie.org/news/smart-glass-has-a-bright-future
M. Kraus, E. Förster, V. Bagusat, T. Höhnle, X. Uwurukundo, P. Bohnert, R. Brüning, H. Hillmer R. Brunner: Kompaktes Kreuzgitter-Spektrometer – Design, Umsetzung und Funktionsnachweis. In: Tagungsband, 21. NWK 2021
A.Kobylinskiy, B. Laue, E. Förster, B. Höfer, Y. Shen, E. Förster, H. Hillmer R. Brunner: Erhebliche Steigerung der Detektionseffizienz für Filterarray-basierte Spektralsensoren. Tagungsband, pp. 30-35. 21. NWK (2021)
M. S. Iskhandar, K. Hasan, C. Woidt, H. Hillmer: 3D Micro- and Nanostructurization: Optical MEMS arrays for Smart Glass. In: CINSaT Newsletter No. 8 June 2020. p.12-16
H. Hillmer: Der Laser: Aufbau, Funktionsweise und Anwendungen. In: Tagungsband, SFN Schülerkongress 2020
M. Kraus, E. Förster, V. Bagusat, T. Hönle, X. Uwurukundo, P. Bohnert, R. Brüning, H. Hillmer, R. Brunner: Compact, astigmatism corrected cross-grating spectrometer. In EPJ Web Conf., 238, 03005, DOI: 10.1051/epjconf/202023803005 (2020)
H. Hillmer, M. Iskhandar, Q. Li (invited Keynote): Smart glass based on micromirror arrays: Fundamentals and applications in daylight steering, energy saving and personal lighting. In; Technical digest of 22nd Annual Meeting of China Association for Science and Technology, China Germany Young Scientists Forum, Qingdao China, (2020)
M. Lotzgeselle ; M. Taimoor ; Y. Gao ; H.V. Demir ; H. Wilke ; M. Maniak ; C. Dang ; H. Hillmer ; Th. Kusserow: Properties of CdSe/CdS/ZnS Colloidal Quantum Dots in a Host Polymer for Infiltration in Photonic Devices. In: ICMAT 2019, Singapore, 2019, S. SS-09/4 (Abstract link)
M. Taimoor ; S. Reuter ; S. Henning ; M. Lotzgeselle ; H. Hillmer ; Th. Kusserow: VCSEL mit verteilter Rückkopplung in einer gechirpten Dünnschichtstruktur: DGaO-Proceedings 2019, ISSN: 1614-8436 – urn:nbn:de:0287-2019-P041-4, Darmstadt, 2019, S. P41 (Link)
M. Iskhandar ; H. Luo ; K. A. Ekaputera ; B. Al-Qargholi ; M. Khan ; H. Hillmer: Design, Fabrication and Characterization of Subfield Addressing in Micromirror Arrays for Smart Window Applications: Technical digest of IEEE OMN 2019, ISBN: 978-1- 7281- 4501-3, S. 192-193, 2019
H. Hillmer ; B. Al-Qargholi ; M. Khan ; M. Iskhandar ; H. Wilke ; A. Tatzel: Optical MEMS based micromirror arrays: fabrication, characterization and potential applications in smart active windows. In: Technical digest of IEEE OMN 2019, ISBN: 978-1- 7281- 4501-3, S. 188-189, 2019
H. Hillmer: Der Laser: Aufbau, Funktionsweise und Anwendungen (mit in dem Vortrag integrierter Lasershow): VDE Hessen, VDE News online, Nov. 2017
H. Hillmer: Faszination Licht und der Nanokosmos - was die Elektrotechnik von der Natur lernen kann. In: VDE Hessen, VDE News online, Juni 2017
H. Hillmer: High resolution 3D nanoimprint lithography: Verhandlungen mit der DPG, ISSN 0420-0195, 2017, S. 92
A. Tatzel ; H. Hillmer: Mikrosystemtechnik für die Lichtlenkung in aktiven Fenstern: Hessen Nanotech News, 2016, 51, 1, pp.10-11
S. Reuter ; M. Taimoor ; H. Hillmer ; T. Kusserow: Distribution of Cavity-modes in Narrowband Filters with Chirped Thin-Films: dgao-processings, 2016, A23
H. Wilke ; C. Heume ; S. Alfihed ; N. Hoinka ; T. Fuhrmann-Lieker ; T. Kusserow ; H. Hillmer: Hybrid Vertical Cavity Surface-Emitting Laser in the Ultraviolet Spectral Range. In IEEE International Conference on Optical MEMS and Nanophotonics, 2016, 115-116
W. Xie ; S. Hagemeier ; C. Woidt ; H. Hillmer ; P. Lehmann: Influence of edges and steep slopes in 3D interference and confocal microscopy: Proc. SPIE 9890, Optical Micro- and Nanometrology VI(2016),doi:10.1117/12.2228307
H. Hillmer; A. Istock; Y. Shen; U.-M. Ha; T. Meinl; C. Woidt: Potentiale einer berührungslosen optischen Messtechnik für Backindustrie mit dem Nanospektrometer Sensor. In: Baker's Day, Bremerhaven, 3.3.2016, Technical Digest, S. 11-12 (2016)
T. Kusserow ; M. Taimoor ; S. Reuter ; H. Hillmer: Narrowband Chirped Thin Film Filters with Distributed Cavity: IEEE Optical MEMS and Nanophotonics Conference, MO2.5 1-2 (2015)
T. Kusserow ; R. Zamora ; H. Hillmer: A comparison of Thin-Film Materials as Hard Mask Layer for Nanostructure Fabrication by Focused Ion Beam Milling and Plasma Etching. In: ICMAT 2015, T-PO3-29 (2015)
M. Taimoor ; A. Alatawi ; S. Reuter ; H. Hillmer ; T. Kusserow: Investigation of a Structuring Process for Surface Emitting Lasers (CoreSEL) with Distributed Cavities: ICMAT 2015, T2-4 (2015)
M. Taimoor ; S. Reuter ; H. Hillmer ; T. Kusserow: Narrowband Optical Thin-film Filters with Distributed Cavity Modes. In: ICMAT 2015, K-PO2-16 (2015)
H. Hillmer: High Resolution 3D Nanoimprint and MEMS Technologies for Energy Saving, Nanosensorics and Pharmacy (invited): Technical Digest of SINC 2014, Riyadh, 32-34 (2014)
Y. Khan ; N. Götte ; T. Meinl ; T. Kusserow ; A. Senftleben ; T. Baumert ; H. Hillmer: Modelling, design and fabrication of dielectric photonic crystal structures using temporally asymmetric shaped femtosecond laser pulses: Technical Digest of OMN 2014, Glasgow, 207-208 (2014)
T. Meinl ; N.Götte ; Y. Khan ; T. Kusserow; C. Sarpe ; J. Köhler ; M. Wollenhaupt ; A. Senftleben ; T. Baumert ; H. Hillmer: Temporally shaped femtosecond laser pulses as direct patterning method for dielectric materials in nanophotonic applications: Proc. SPIE 9126 Nanophotonics V, 91262B (2014)
A. Tatzel ; B. Einwögerer ; I. Bergmair ; N. Worapattrakul ; B. Khudhair ; V. Viereck ; H. Hillmer: Micromirror arrays for smart personal environments: NATO Nanoscience Advances in CBRN Agents Detection, Information and Energy Security, Sozopol, Bulgaria (2014)
S. Blom ; J. Shreshta ; N. Storch ; J. Sonksen ; H. Hillmer: Technology for a highly sensitive sensor system based on competing modes in semiconductor lasers: NATO Nanoscience Advances in CBRN Agents Detection, Information and Energy Security, Sozopol, Bulgaria (2014)
T. Meinl ; N. Götte ; Y. Khan ; T. Kusserow ; C. Sarpe ; J. Köhler ; M. Wollenhaupt ; A. Senftleben ; T. Baumert ; H. Hillmer: Material processing of dielectric via temporally shaped femtosecond laser pulses as direct patterning method for nanophotonic applications: NATO Nanoscience Advances in CBRN Agents Detection, Information and Energy Security, Sozopol, Bulgaria (2014)
M. Smolarczyk ; S. Reuter ; L. Jablonka ; H. Hillmer: Implementation of A Novel Self-Aligned NanoShaping (SANS) Technology to Fabricate 3D Nanoparticles: Technical Digest of 13th Int. Conf. Nanoimprint and Nanoprint Technology (NNT2014) (2014), 24A-7-4
S. Reuter ; A. Istock ; M. Smolarczyk ; U.-M. Ha ; O. Schneider ; L. Gomer ; H. Hillmer: Fabrication of 2D and 3D Shaped Micro- and Nanoparticles via Substrate Conformal Imprint Lithography: Technical Digest of 13th Int. Conf. Nanoimprint and Nanoprint Technology (NNT2014) (2014),34P-4-22
N. Worapattrakul ; V. Viereck ; H. Hillmer: Fabrication of Flexible SU-8 Moulds by A New Direct 3D Patterning Approach for Nanoimprint Lithography Apllications: Technical Digest of 13th Int. Conf. Nanoimprint and Nanoprint Technology (NNT2014) (2014), 23P-4-42
N. Götte ; T. Winkler ; C. Sarpe ; B. Zielinski ; J. Köhler ; T. Kusserow ; T. Meinl ; Y. Khan ; H. Hillmer ; M. Wollenhaupt ; A. Senftleben ; T. Baumert : Real Time Observation of Transient Electron Density in High Bandgap Dielectrics Irradiated with Tailored Femtosecond Laser Pulses: DPG Frühjahrstagung 2014 (2014)
N. Götte ; C. Sarpe ; J. Köhler ; T. Kusserow ; T. Meinl ; Y. Khan ; H. Hillmer ; M. Wollenhaupt ; T. Baumert : Generation of Functional Structures in Dielectrics on the Nanometer Scale via Shaped Femtosecond Laser Pulses. In: Conference on Laser Ablation (COLA), P1-02 (2013)
T. Kusserow ; N. Götte ; Y. Khan ; T. Meinl ; C. Sarpe ; J. Köhler ; S. Schudy ; M. Wollenhaupt ; T. Baumert ; H. Hillmer: Dielectric Photonic Crystal Structures Fabricated by Direct Patterning with Shaped Femtosecond Laser Pulses. In: ICMAT 2013 (2013), Symposium Q, ICMAT 13-A-1626
T. Kusserow ; S. Schudy ; M. Taimoor ; T. Meinl ; H. Hillmer: Narrowband Chirped Optical Filters with Distributed Cavity Modes. In: ICMAT 2013 (2013), Symposium M, ICMAT 13-A-1631
S. Schudy ; L. Gomer ; M.A. Smolarczyk ; T. Sharbatitehrani ; H. Hillmer: Replica Molding Techniques for Large Area Application of Nanoimprint with Soft Stamps. In: ICMAT 2013 (2013), Symposium M, ICMAT 13-A-1536
S. Schudy ; M.A. Smolarczyk ; L. Gomer ; A.T. Istock ; O. Schneider ; N. Worapattrakul ; F. Pilger; H. Hillmer: Polymer nanoparticles shaped in two and three dimensions by substrate conformal imprint lithography. In: ICMAT 2013 (2013), Symposium H, ICMAT 13-A-1528
N. Götte ; C. Sarpe ; J. Köhler ; L. Englert ; D. Otto ; T. Kusserow ; T. Meinl ; Y. Khan ; H. Hillmer ; M. Wollenhaupt ; T. Baumert: Generation of Functional Structures in Dielectrics on Nanometer Scale via Shaped Femtosecond Laser Pulses. In: DPG Frühjahrstagung 2013 (2013)
N. Götte ; C. Sarpe ; J. Köhler ; L. Englert ; D. Otto ; T. Kusserow ; T. Meinl ; Y. Khan ; H. Hillmer ; M. Wollenhaupt ; T. Baumert: Generation of Functional Structures in Dielectrics on Nanometer Scale via Shaped Femtosecond Laser Pulses. In: nano 3D (2012)
T. Kusserow ; Y. Khan ; R. Zamora ; F. Messow ; H. Hillmer: Guided-mode Resonances in Dielectric Photonic Crystals Slabs with Low Index Contrast. In: IEEE Optical MEMS and Nanophotonics Conference (2012), 170-171
H. Hillmer ; A. Albrecht ; C. Woidt ; X. Wang ; S. Schudy ; N. Worapattrakul ; F. Pilger ; M. Smolarcyk ; A. Jäkel ; V. Viereck: High resolution 3D nanoimprint and MEMS technologies for nanophotonic sensors, light steering and pharmacy. In: 2011 Shanghai International Nanotechnology Cooperation Symposium (SINCS2011), (2011)
V. Viereck; A. Jäkel ; U. Neumann; A. Schwank; H. Hillmer; J. Schmid: Active Windows with micro mirror arrays for improved utilization of daylight in buildings. In: Proc. Solar World Congress 2011
U. Akcakoca ; B. Witzigmann ; R. Zamora ; T. Kusserow ; H. Hillmer: Design and Analysis of Polarization Selective Tunable Photonic Crystal Filters. In: 11th International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD), 2011, TuD4
R. Zamora ; M. Benes ; T. Kusserow ; H. Hillmer ; U. Akcakoca ; B. Witzigmann: Optical Characterization of Photonic Crystals as Polarizing Structures for Tunable Optical MEMS Devices. In: International Conference on Optical MEMS and Nanophotonics (OMN), 2011, 83-84, DOI: 10.1109/OMEMS.2011.6031069
Y. Monnai ; A. Jäkel ; V. Viereck ; H. Hillmer ; H. Shinoda: A Proposal of MEMS Structures Implementing Terahertz Phased Arrays. In: Proc. Sensing Forum 2011
T. Kusserow ; M.I. Hafiz ; M.A. Ahmed ; T. Graf ; H. Hillmer: Nanopatterning of Dielectric Thin-films on the Facets of Optical Fibers. In: ICMAT 2011, 2011, S. J11.1-3
T. Kusserow ; B. Schiel ; H. Hillmer: Diffraktiv optische Elemente für künstlerische und darstellende Anwendungen. In: dgao-proceedings, 2011, S.A-20
T. Kusserow ; M. Wulf ; R. Zamora ; K. Kanwar ; H. Hillmer: Processing of Photonic Crystals in InP Membranes by Focused Ion Beam Milling and Plasma Etching. In: ICMAT 2011, 2011, S. BB 7-3
T. Kusserow ; R. Zamora ; M. Wulf ; U. Akcakoca ; R. Marklein ; B. Witzigmann ; H. Hillmer: Polarisationsselektive InP MOEMS Filter mit Photonischen Kristallen. In: dgao-proceedings, 2011, S.B-3
U. Akcakoca ; R. Marklein ; B. Witzigmann ; H. Hillmer: Electromagnetic analysis of polarization and frequency selective tunable optical MEMS. In: 10th International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD), IEEE, Atlanta 2010, S.81-82
H.H. Mai ; O. Setyawati ; V. Daneker ; C. Woidt ; T. Woit ; K. Schultz ; S. Schudy ; M. Engenhorst ; X. Wang ; S. Wittzack ; F. Köhler ; A. Albrecht ; M. Bartels ; H. Hillmer: Verification and calibration of spectral properties of high-resolution nano sensor arrays using microscope spectrometers. In: Technical Digest MOC´10, 16th Microoptics Conference, MC3, 2010, S.22-23
O. Setyawati ; H. Mai ; C. Woidt ; S. Schudy ; M. Engenhorst ; S. Wittzack ; F. Köhler ; M. Bartels ; H. Hillmer: Low-cost micromachined tunable Fabry-Pérot filters for optical nano sensor arrays. In: Technical Digest MOC´10, 16th Microoptics Conference, TB4, 2010, S.64-65
O. Setyawati ; M. Engenhorst ; S. Wittzack ; F. Köhler ; C. Woidt ; T. Woit ; V. Daneker ; M. Bartels ; H. Hillmer: Dry etching of TiO2/SiO2 DBR mirrors for tunable optical sensor arrays. In: SPIE Proceedings Photonic West MOEMS-MEMS 2010, ISBN: 9780819479877, SPIE, 2010, 7591 (Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III), 75910R-(1 - 8)
A. Jäkel, J. Clobes, Q. Li, V. Viereck, and H. Hillmer, “Integration of actuable MEMS in networked sensing systems,” in IEEE Technical Digest INSS. pp. 61-64 (2010).
M. Bartels ; S. Wittzack ; F. Köhler ; X. Wang ; A. Albrecht ; S. Schudy ; M. Engenhorst ; H. H. Mai ; O. Setyawati ; T. Woit ; C. Woidt ; H. Hillmer: High Vertical Resolution 3D Nanoimprint Technology for Nanophotonic Applications. In: IEEE/LEOS International Conference on Optical MEMS and Nanophotonics 2009 (2009)
M. Bartels ; X. Wang ; T. Kusserow ; F. Koehler ; S. Wittzack ; H. Hillmer: 3D nanoimprint templates with ultra-high vertical precision. In: ICMAT 2009 & IUMRS-ICA 2009 (2009)
H. Hillmer ; V. Viereck ; Q. Li ; A. Jäkel: Sonnenbrillen für Innenräume. In: Cluster Chemie Newsletter 1 (2009), S. 3
A. Jäkel ; Q. Li , V. Viereck ; H. Hillmer: Development of Electrostatically Driven Micromirror Arrays for Daylight Guiding on Large Areas. In: IEEE/LEOS International Conference on Optical MEMS and Nanophotonics 2009 S.41-42 (2009)
A. Jäkel ; Q. Li , V. Viereck ; H. Hillmer: Großflächiges Mikrospiegelsystem zur Tageslichtlenkung. In: Tagungsband Mikrosystemtechnik Kongress 2009 S.868-871 (2009)
T. Kusserow ; S. Irmer ; D. Nethaji ; H. Hillmer ; B. Vengatesan: Tunable Fabry-Perot-filters based on InP/air-gap mirrors. In: Photonik International 1 (2009), S. 14-16 URL..
T. Kusserow ; M. Wulf ; R. Zamora ; B. Vengatesan ; B. Witzigmann ; H. Hillmer: Photonic Crystal Polarizer Element on InP/Air Membranes for Optical MEMS Applications. In: ICMAT 2009 & IUMRS-ICA 2009 (2009)
Q. Li ; A. Jäkel ; V. Viereck ; J. Schmid ; H. Hillmer: Design and fabrication of self-assembling micromirror arrays. In: Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736211 (2009) doi:10.1117/12.821686
J. Sonksen ; M. Ahmad ; N. Storch ; H. Krause ; S. Blom ; A. Pötzl ; H. Hillmer: Controlling and Tuning the Emission of Semiconductor Optical Amplifier for Sensor Application by Means of Fiber Bragg Gratings. In: 8th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronics (MINO '09) (2009)
V. Viereck ; Q. Li ; A. Jäkel ; H. Hillmer: Großflächige Anwendung von optischen MEMS: Mikrospiegel-Arrays zur Tageslichtlenkung. In: Photonik 2 (2009), S. 28-29
V. Viereck ; Q. Li ; A. Jäkel ; H. Hillmer: Large-area applications of optical MEMS: micromirror arrays guide daylight, optimize indoor illumination. In: Photonik International 2 (2009), S. 48-49
Q. Li, A. Jäkel, V. Viereck, J. Schmid, and H. Hillmer, “Design and fabrication of self-assembling micromirror arrays,” in SPIE Europe Microtechnologies for the New Millennium, Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 7362-11, 7362-36 (2009).
S. Wittzack ; F. Köhler ; X. Wang ; O. Setyawati ; T. Woit ; A. Albrecht ; M. Engenhorst ; S. Schudy ; C. Woidt ; M. Bartels ; H. Hillmer: Hochpräzise Nanoimprint-Templates für 3D-Strukturen (invited). In: Galvanotechnik (2009), Band 100, Heft 10, S. 2376-2382
M. Wulf ; T. Kusserow ; R. Zamora ; H. Hillmer: A Polarizing Element using the Guided-Mode Resonance in a Photonic Crystal Slab. In: 1st IEEE Germany Student Conference (2009)
M. Bartels ; F. Köhler ; S. Wittzack ; X. Wang ; H. Hillmer: Ultra precise Nanoimprint templates (invited). In: NanoS 03.08 (2008), S. 18-22
M. Bartels ; V. Viereck ; Q. Li ; J. Ackermann ; A. Jäkel ; J. Schmid ; H. Hillmer: Die Sonnenbrille fürs Büro: Mikrospiegel-Arrays zur Lichtlenkung. In: Tagungsband Thüringer Gernz- und Oberflächentage und Thüringer Kolloquium "Dünne Schichten in der Optik" (2008), S. 66-70
V. Viereck, J. Ackermann, Q. Li, A. Jäkel, J. Schmid, and H. Hillmer: Sun glasses for buildings based on micro mirror arrays: Technology, control by networked sensors and scaling potential (invited),” in IEEE Technical Digest, pp. 135–139 (2008).
H. Hillmer ; F. Köhler ; S. Wittzack: Höchstauflösende 3D- NanoImprint-Stempel für Massenmarkt-Anwendungen. In: Hessen Nanotech news 2 (2008), S. 6
H. Krause ; J. Sonksen ; J. Baumann ; U. Troppenz ; W. Rehbein ; V. Viereck ; H. Hillmer: RIN-spectra of a two-mode lasing two-section DFB-laser for optical sensor application. In: Procceedings of the SPIE Photonics Europe Conference 6997, April 2008 (2008)
H. Krause ; J. Sonksen ; M. Ahmad ; V. Viereck ; O. Mikami ; H. Hillmer: Aufbau eines Faserbasierten Laserresonators mit zwei Fabry-Pérot Kavitäten und einer gemeinsamen aktiven Zone für Sensorikanwendungen. In: 109. DGaO Konferenz (2008), S. B24
T. Kusserow ; H. Hillmer: Optoelektronische Bauelemente für die höchstbitratige Tele- und Datenkommunikation - Elektrisch einstellbare optische Filter. In: Hessen Nanotech news 2 (2008), S. 4
T. Kusserow ; S. Ferwana ; T. Nakamura ; T. Hayakawa ; N. Dharmarasu ; B. Vengatesan ; H. Hillmer: Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices. In: SPIE Photonics Europe 2008 (2008)
H. Wacker ; J. Börcsök ; H. Hillmer: The Channel Capacity and Probability of Undetected Error in the Case of Redundant Data Transmission. In: Techn. Digest, Int. Workshop on Principles of Safety Communications (2008), S. 17-22
H. Wacker ; J. Börcsök ; H. Hillmer: Redundant Data Transmission via Different Types of Binary Channels (invited). In: Proceedings of the 7th WSEAS Int. Conf. on Applied Computer & Applied Computational Science (ACACOS '08) (2008), S. 609-615
H. Wacker ; J. Börcsök ; H. Hillmer: Redundant Optical Data Transmission Using Semiconductor Lasers. In: The 6th ACS/IEEE International Conference on Computer Systems and Applications (AICCSA-08) (2008), S. 1040-1045
T. Kusserow ; R. Zamora ; J. Sonksen ; T. Nakamura ; T. Hayakawa ; B. Vengatesan ; N. Dharmarasu ; H. Hillmer: Monolithic Integration of a Tunable Photodetector Based on InP/airgap Fabry-Pérot Filters. In: Proc. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (2008)
T. Kusserow ; M. Wulf ; N. Dharmarasu ; H. Hillmer: Herstellung und Charakterisierung von nanophotonischen Strukturen mit Hilfe fokussierter Ionenstrahlen. In: DGaO Proceedings 2008 (2008)
H. Hillmer: Die vielen Väter des Transistors - Meilensteine in der Geschichte des Festkörperverstärkers (invited). In: Physik in unserer Zeit, 6, S. 296-300 (2008)
H. Hillmer: Die Meilensteine bei der Entwicklung des Transistors (invited). In: Zeitschrift für Physik (2008)
J. Ackermann ; V. Viereck ; N. Dharmarasu ; H. Hillmer: Mikrosystemtechnische Lichtlenksysteme auf der Basis von Mikrospiegelarrays für Photovoltaische Anlagen an Gebäuden. In: Tagungsband des Mikrosystemtechnik Kongress Dresden 2007 (2007)
V. Viereck, Q. Li, J. Ackermann, A. Schwank, S. Araujo, A. Jäkel, S. Werner, N. Dharmarasu, J. Schmid, and H. Hillmer, “Novel large area applications using optical MEMS,” in Proc. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, pp. 55-56 (2007).
V. Viereck, Q. Li, A. Jäkel, S. Werner, J. Ackermann, N. Dharmarasu, and H. Hillmer, Innovative Lichtlenksysteme zur Tageslichtnutzung und zur Wärmeregulierung in Gebäuden auf der Basis von Mikrospiegelarrays, in hessen-nanotech NEWS 1/07, pp. (2007).
H. Hillmer, V. Viereck, T. Kusserow, Y. Wang, S. Irmer, N. Dharmarasu, D. Todorov, A. Jäkel, Q. Li, A. Hasse, D. Bienhaus, and M. Bartels, “Nanophotonic devices and components: micromachined motion, fabrication, characterization, scaling potential and applications,” in Technical digest 3rd Shanghai International Nanotechnology Symposium, p. 245 (2007).
H. Hillmer: Innovative Lichtlenksysteme auf Basis von Mikrospiegelarrays. In: hessen-nanotech NEWS 1/07 (2007), S. 5
H. Hillmer ; T. Kusserow ; N. Dharmarasu ; S. Irmer ; J. Daleiden ; A. Hasse ; M. Bartels ; B. Vengatesan ; T. Hayakawa: Micromachined tunable 1.55µm vertical cavity, multiple air-gap filters and lasers: fabrication, characterization, scaling potential and applications (invited). In: technical Digest, OECC/IOOC 2007 Yokohama, 12E2-1 (2007), S. 428
H. Hillmer ; Y. Wang ; T. Kusserow ; N. Dharmarasu ; A. Hasse ; M. Bartels: Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems. In: Proceedings of WSEAS 2007 (2007)
H. Hillmer ; J. Schmid: Tandem Vortrag: Nano- und Mikrotechnologien im Dienste der nachhaltigen Entwicklung. In: 4. Nanotechnologieforum Hessen: What's next for International Nanomarkets (2007)
H. Hillmer: Micromirror arrays: sun glasses for buildings. (invited, key note). In: NanoEquity Europe, Hilton Frankfurt (2007)
T. Kusserow ; N. Dharmarasu ; S. Irmer ; H. Hillmer ; T. Nakamura ; T. Hayakawa ; B. Vengatesan: Durchstimmbare Fabry-Pérot Filter auf der Basis von InP/Luft DBR-Spiegeln. In: Tagungsband der DGaO 2007 (2007) URL..
T. Kusserow ; S. Irmer ; D. Nethaji ; H. Hillmer ; B. Vengatesan: Weit durchstimmbare Fabry-Perot-Filter mit InP/Luft-Spiegeln. In: Photonik 6 (2007), S. 64-66 URL..
V. Viereck ; Q. Li ; J. Ackermann ; A. Schwank ; S. Araujo ; A. Jäkel ; S. Werner ; N. Dharmarasu ; J. Schmid ; H. Hillmer: Novel Large Area Applications Using Optical MEMS. In: Proc. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (2007), S. 55-56
V. Viereck ; Q. Li ; A. Jäkel ; S. Werner ; J. Ackermann ; N. Dharmarasu ; H. Hillmer: Innovative Lichtlenksysteme zur Tageslichtnutzung und zur Wärmeregulierung in Gebäuden auf der Basis von Mikrospiegelarrays. In: Tagungsband des Mikrosystemtechnik Kongress Dresden 2007 (2007)
Y. Wang ; T. Kusserrow ; S. Irmer ; A. Hasse ; M. Bartels ; N. Dharmarasu ; H. Hillmer ; J. Börcsök ; O. Mikami: Optics in Computer Architectures: Basis of WDM, Technologies and Potentials. In: Proc. Second International Conference on Systems ICONS '07 (2007), S. 50
H. Hillmer ; T. Kusserow ; N. Dharmarasu ; S. Irmer ; J. Daleiden ; M. Bartels ; T. Nakamura ; T. Hayakawa ; B. Vengatesan ; A. Hasse ; S. Hansmann: Strain-balanced In(GaAs)P heterostructures for tunable multiple InP/air-gap DBR Fabry-Pérot filters. In: Proceedings of 20th Int. Conf. on Engineering Physics (ICEP) (2006), S. 18
H. Hillmer ; T. Kusserow ; N. Dharmarasu ; S. Irmer ; J. Daleiden ; M. Bartels ; T. Nakamura ; T. Hayakawa ; B. Vengatesan ; A. Hasse ; S. Hansmann: Strain-balanced In(GaAs)P heterostructures for tunable multiple InP/air-gap DBR Fabry-Pérot filters. In: VGS 9 Proceedings (2006) (2006)
H. Hillmer: Nanotechnology in optics: foundations, implementations, applications and future potential. In: 6th WSEAS International Conference on APPLIED COMPUTER SCIENCE (ACS'06) (2006)
H. Hillmer: Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems. In: 6th WSEAS International Conference on APPLIED COMPUTER SCIENCE (ACS'06) (2006)
M. Joodaki ; H. Hillmer: Technological requirements for a self-aligned lateral SiGe HBT with the SiGe layer formed by Ge ion implantation in Si including theoretical performance. In: Proc. 8th International Conference on Solid-State and Integrated Circuit Technology ICSICT '06 (2006), S. 231-234
M. Joodaki ; A. Kricke ; H. Hillmer ; G. Kompa: Interconnects Analyses in Quasi-Monolithic Integration Technology (QMIT). In: Proc. Electrical Performance of Electronic Packaging (2006), S. 229-232
T. Kusserow ; N. Dharmarasu ; H. Hillmer: Tailored Stress in InP/GaInAs Layers for InP/Air-Gap DBR-Filters with Photonic Crystals. In: Proc. IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference (2006), S. 88-89
H. Halbritter ; F. Riemenschneider ; B. Kögel ; A.T. and M.Strassner ; S. Irmer ; H. Hillmer ; I. Sagnes ; P. Meissner: MEMS-tunable and wavelength selective receiver front end. In: Proc. 18th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2005 (2005), S. 68-71
H. Hillmer ; A. Tarraf ; F. Riemenschneider ; S.I. and H.Halbritter ; J. Daleiden ; F. Römer ; C. Prott ; E. Ataro ; A. Hasse ; M. Strassner ; S. Hansmann ; P. Meissner: Wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for filters and VCSELs using micromachined actuation (Invited Paper) (Proceedings Paper). In: SPIE Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks (2005), S. 14-28
T. Scholz ; T. Debski ; F. Römer ; S. Irmer ; V. Viereck ; M. Bartels ; W. Barth ; H. Hillmer: High resolution optical characterization of cantilever arrays and multiple air-gap cavities for scanning probe microscopy, communication, analytics and sensing. In: Proc. IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference (2005), S. 123-124
F. Römer ; M. Streiff ; C. Prott ; S. Irmer ; A.W. and B.Witzigmann ; H. Hillmer: Transfer function simulation of all-air-gap filters based on eigenmodes. In: Proc. 4th International Conference on Numerical Simulation of Optoelectronic Devices NUSOD '04 (2004), S. 105-106
A. Tarraf ; M. Nestler ; S. Martin ; U. Poll ; D.R. and J.Dienelt ; H. Neumann ; B. Rauschenbach ; S. Irmer ; F. Römer ; V. Daneker ; H. Hillmer: Dual Ion Beam Sputter Deposition System for EUVL Masks. In: XUV Technologies and Applications seminar, Bad Honnef, 2004, Germany (2004)
A. Tarraf ; M. Nestler ; U. Poll ; D. Roth ; J.D. and H.Neumann ; B. Rauschenbach ; S. Irmer ; F. Römer ; H. Hillmer: A novel dual ion beam sputter deposition system for implementing low defect density and high-quality EUVL masks. In: 3rd International EUVL Symposium, NOVEMBER 1-4, 2004, Miyazaki, Japan (2004)
J. Daleiden ; S. Irmer ; E. Ataro ; C. Prott ; V. Rangelov ; F. Römer ; M. Strassner ; A. Tarraf ; H. Hillmer: Continuously tunable air-gap micro-cavity devices for optical communication systems. In: SPIE Proc. Vol. 4871 (2003), S. 145-159
J. Daleiden ; S. Irmer ; A. Tarraf ; F. Römer ; C. Prott ; E. Ataro ; M. Strassner ; H. Hillmer: Multiple air-gap InP-based VCSELs and filters with ultra-wide wavelength tuning-flexibility and shape of the membranes. In: Proc. IEEE/LEOS International Conference on Optical MEMS (2003), S. 36-37
H. Hillmer ; J. Daleiden ; S. Irmer ; F. Römer ; C. Prott ; A. Tarraf ; M. Strassner ; E. Ataro ; T. Scholz: Potential of micromachined photonics: miniaturization, scaling and applications in continuously tunable vertical air-cavity filters (invited). In: SPIE Proc. series Vol. 4947 (2003), S. 196-211
H. Hillmer ; J. Daleiden ; C. Prott ; F. Römer ; S. Irmer ; E. Ataro ; A. Tarraf ; D. Gutermuth ; I. Kommallein ; M. Strassner: Ultrawide continuously tunable 1.55µm vertical air-cavity wavelength-selective elements for VCSELs using micromachined electrostatic actuation (invited). In: SPIE Proc. series Vol. 5246 (2003), S. 18-32
H. Hillmer ; J. Daleiden ; C. Prott ; S.Irmer ; F. Römer ; E. Ataro ; A. Tarraf ; H. Rühling ; M. Maniak ; M. Strassner: Bionics: Precise colour tuning by interference in nature and technology - applications in surface micromachined 1.55 microns vertical air cavity filters. In: SPIE Proc. series Vol. 4983 (2003), S. 203-214
H. Hillmer ; C. Prott ; J. Daleiden ; F. Römer ; S. Irmer ; E. Ataro ; M. Strassner: 142nm electrostatically actuated tuning using surface-micromachined vertical air-cavity wavelength-selective elements for applications in 1.55µm VCSEL's. In: SPIE Proc. series Vol. PW2 (2003)
H. Hillmer: Ultra-wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for VCSEL's using micromachined electrostatic actuation.. In: ITCOM 2003, Orlando, USA (2003)
S. Irmer ; J. Daleiden ; C. Prott ; V. Rangelov ; F. Römer ; M. Strassner ; A. Tarraf ; H. Hillmer: Continuously tunable InP based multiple-air-gap MOEMS filter with ultra wide tuning range. In: SPIE Proc. Vol. 4945 (2003), S. 21-29
A. Tarraf ; J. Daleiden ; V. Rangelov ; F. Römer ; C. Prott ; S. Irmer ; E. Ataro ; H. Hillmer: Novel low-cost and simple fabrication technology for tunable dielectric air-gap devices. In: SPIE Proc. series Vol. 4945 (2003), S. 9-20
J. Daleiden ; S. Irmer ; V. Rangelov ; F. Römer ; A. Tarraf ; C. Prott ; M. Strassner ; H. Hillmer: Record wavelength tuning of 127nm for vertical cavity Fabry-Pérot filter. In: Proceedings of the Optical MEMS Conference, Lugano, CH, 20-23 August 2002 (2002), S. 169
J. Daleiden ; S. Irmer ; V. Rangelov ; F. Römer ; A. Tarraf ; C. Prott ; M. Strassner ; H. Hillmer: Record wavelength tuning of 127 nm for vertical cavity Fabry-Pérot filter. In: Proc. Conference Digest Optical MEMs 2002 IEEE/LEOS International Conference on (2002), S. 169-170
H. Hillmer ; J. Daleiden ; C. Prott ; F. Römer ; A. Tarraf ; S. Irmer ; V. Rangelov ; S. Schüler ; M. Strassner: Ultra-wide continuously tunable 1.55µm vertical air-cavity filters and VCSEL's based on micromachined electrostatic actuation. In: SPIE Proc. series Vol. 4646 (2002), S. 145
H. Hillmer: Potential of micromachined photonics: miniaturization, scaling and applications in continuously tunable vertical air-cavity filters.. In: Phot. Fabr. Europe 2002, Brügge, Belgium (2002)
H. Hillmer: Continuously tunable air gap microcavity devices for optical communication systems. (invited). In: ITCOM 2002, Boston, USA (2002)
M. Joodaki ; G. Kompa ; H. Hillmer: New generation quasi-monolithic integration technology (QMIT). In: Proc. 52nd Electronic Components and Technology Conference (2002), S. 641-645
M. Joodaki ; T. Senyildiz ; G. Kompa ; H. Hillmer: Heat transfer and thermal stress analysis in the new generation Quasi-Monolithic Integration Technology (QMIT). In: IEEE Technical Digest ECTC, 52th. Conf., P373, Seattle, USA, 2002 (2002)
J. Piprek ; Y. Chiu ; S. Zhang ; J.E. Bowers ; C. Prott ; H. Hillmer: High-Efficiency MQW Electroabsorption Modulators. In: ECS Proceedings of International Symposium on Integrated Optoelectronics, Philadelphia, Pennsylvania, 12-17 May, 2002 (2002)
F. Römer ; C. Prott ; J. Daleiden ; S. Irmer ; M. Strassner ; A. Tarraf ; H. Hillmer: Micromechanically tunable air gap resonators for long wavelength VCSEL's. In: Proc. IEEE 18th International Semiconductor Laser Conference (2002), S. 13-14
A. Tarraf ; J. Daleiden ; F. Römer ; C. Prott ; V. Rangelov ; S. Irmer ; E. Ataro ; H. Hillmer: A novel low-cost tunable dielectric air-gap filter. In: Proc. Conference Digest Optical MEMs 2002 IEEE/LEOS International Conference on (2002), S. 175-176
M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Optimization of thermal resistance in quasi monolithic integration technology (QMIT) structure. In: Proc. Seventeenth Annual IEEE Symposium Semiconductor Thermal Measurement and Management (2001), S. 12-17
M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Optimization of Quasi-Monolithic Integration Technology (QMIT) with respect to Thermal Resistance and Induced Thermal Stress for Power Applications. In: International Microwave Symposium IEEE MTT-S 2001, Phoenix, Arizona, USA (2001)
M. Joodaki ; G. Kompa ; T. Leinhos ; R. Kassing ; H. Hillmer: Simulation and measurement of thermal stress in quasi-monolithic integration technology (QMIT). In: Conf. Proc. 51st Electronic Components & Technology Conference ECTC (2001), S. 715-720
M. Joodaki ; G. Kompa ; T. Leinhos ; R. Kassing ; H. Hillmer: Thermal stress in Quasi Monolithic Integration Technology (QMIT). In: German wireless week of Microwave and optronics MIOP 2001 (2001)
J. Daleiden ; N. Chitica ; M. Strassner ; C. Prott ; F. Roemer ; A. Tarraf ; H. Hillmer: Micromechanically Tunable Optical Devices. In: Summer School and European Optical Society Topical Meeting on Semiconductor Microcavity Photonics, October 21-25, 2000 (2000)
H. Hillmer ; C. Prott ; M. Strassner ; N. Chitica ; J. Daleiden: Mikrosystemtechnische Konzepte in der optischen Datenübertragung: Neuartige abstimmbare DFB-Laser und Bragg-Filter (invited). In: Tagungsband "Optik in der Rechentechnik", Hagen 27.-28.9.2000 (2000), S. 75-85
M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Static thermal design of quasi monolithic integration technology (QMIT). In: Proc. 8th IEEE International Symposium on High Performance Electron Devices for Microwave and Optoelectronic Applications (2000), S. 117-122
M. Joodaki ; G. Kompa ; H. Hillmer ; R. Kassing: Static Thermal Design of Quasi-Monolithic Integrated Technology (QMIT). In: Conf. Proc. 8th IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications EDMO 2000 (2000)
H. Hillmer ; B. Klepser: Semiconductor lasers for high bit rate optical data transmission - Investigations to increase the yield of laser arrays (invited). In: SPIE Proc. series, Vol. 3688 (1998), S. 308-317
H. Hillmer ; S. Marcinkevicius: Ultrafast modulation of 1.55µm AlGaInAs/InP DFB QW laser structures: optically detected carrier dynamics, limiting mechanisms and applications (invited). In: SPIE Proc. series, Vol. 3734 (1998), S. 282-293
H. Hillmer ; S. Marcinkevicius: Optically detected carrier transport and capture in III/V- semiconductor QW structures: high resolution experiments, model calculations and applications in fast 1.55µm lasers (invited). In: SPIE Proc. series, Vol. 3683 (1998), S. 196-207
H. Hillmer: Semiconductor lasers for high bit rate optical data transmission. (invited). In: Semiconductor Laser workshop, Optoelectronic of mesoscopic solids Marburg, Germany (1998)
H. Hillmer: Optically detected carrier transport and capture in III/V-semiconductor QW structures: high resolution experiments, model calculations and applications in ultrafast 1.55µm lasers. In: IX Conference on Laser Optics'98, LO'98 St. Petersburg Russia (1998)
H. Hillmer: Ultrafast modulation of 1.55µm AlGaInAs/InP DFB QW lasers. In: 16th Int. Conf. on Coherent and Nonlinear Optics '98, ICONO '98, Moscow Russia (1998)
H. Hillmer: Semiconductor lasers for high bit rate optical data transmission. (invited). In: 6th Int. Conf. on Industrial Lasers & Laser Applications'98, ILLA'98, Shatura (1998)
B. Klepser ; H. Hillmer: Thermal crosstalk of laser arrays and the influence on yield. In: Proc. 10th International Conference on Indium Phosphide and Related Materials, Tskuba Japan (1998), S. 295-298
H. Hillmer: Chirped DFB gratings using bent waveguides to tailor specific laser properties (invited). In: SPIE Proc. series Vol. 2713 (1996), S. 139-149
H. Hillmer ; A. Greiner ; F. Steinhagen ; R. Lösch ; W. Schlapp ; E. Binder ; T. Kuhn ; H. Burkhard: Carrier and photon dynamics in InAlGaAs/InP MQW laser structures: Influence of carrier transport on high frequency modulation. In: Hot Carriers in Semiconductors (1996), S. 583
H. Hillmer ; A. Greiner ; F. Steinhagen ; R. Lösch ; W. Schlapp ; E. Binder ; T. Kuhn ; H. Burkhard: Carrier and photon dynamics in transversally asymmetric AlGaInAs/InP MQW lasers (invited). In: SPIE Proc. series, Vol. 2693 (1996), S. 352-368
H. Hillmer ; R. Lösch ; W. Schlapp ; F. Steinhagen ; H. Burkhard: Strain-compensated MBE grown AlGaInAs/AlGaInAs/InP QWs for photonic devices. In: Proc. Eighth International Conference on Indium Phosphide and Related Materials IPRM ´96 (1996), S. 565-568
H. Hillmer ; H. Zhu: Self-aligned processing techniques for semiconductor stripe lasers. In: SPIE Proc. series, Vol. 2886, Semiconductor Lasers II (1996), S. 25-33
H. Hillmer: Carrier and photon dynamics in vertically asymmetric high-speed InAlGaAs/InP MQW lasers. In: Lasers and Integrated Optoelectronics OE/LASE´96, San Jose, California USA (1996)
S. Marcinkevicius ; H. Hillmer ; R. Lösch ; U. Olin: Carrier Dynamics in 1.55 µm InAlGaAs Quantum Well Laser Structures. In: Proc. Conference on Lasers and Electro-optics Europe CLEO/Europe (1996), S. 81
F. Steinhagen ; H. Hillmer ; R. Lösch ; W. Schlapp ; R. Göbel ; E. Kuphal ; H. Hartnagel ; H. Burkhard: High-speed complex coupled strain-compensated AlGaInAs/InP 1.5 µm DFB laser diodes. In: Proc. Eighth International Conference on Indium Phosphide and Related Materials IPRM ´96 (1996), S. 777-780
H. Zhu ; H. Hillmer: Self-aligned processing techniques for semiconductor stripe lasers. In: Semiconductor Lasers II , SPIE proceedings series, Vol. 2886 (1996), S. 25-33
H. Zhu ; H. Hillmer ; H. Burkhard ; H.I. Hartnagel: A novel self aligned processing technique for mushroom-stripe lasers. In: Proc. th IEEE International Semiconductor Laser Conference (1996), S. 109-110
M. Zimmermann ; S. Krämer ; F. Steinhagen ; H.H. and H.Burkhard ; A. Ougazzaden ; C. Kazmierski ; A. Hangleiter: Experimental determination of the intraband relaxation time in strained quantum well lasers. In: Hot Carriers in Semiconductors, Plenum, New York, 1996 (1996), S. 591
R. Zimmermann ; S. Krämer ; F. Steinhagen ; H. Hillmer ; H. Burkhard ; A. Hangleiter: Parasitic-free study of carrier transport in asymmetric 1.55 µm MQW laser structures. In: Proc. Eighth International Conference on Indium Phosphide and Related Materials IPRM ´96 (1996), S. 169-172
S. Bozorgui ; H. Hillmer ; A. Destrez ; Z. Toffano: Chirped grating DBR lasers using bent waveguides. In: Proc. , Volume 1. IEEE Lasers and Electro-Optics Society Annual Meeting 8th Annual Meeting (1995), S. 264-265
H. Burkhard ; S. Mohrdiek ; H. Schöll ; H. Hillmer ; S. Hansmann ; A. Mattheus: Effects of injected light and optical feedback on directly modulated MQW lasers and OTDM multi-GBit/s system performance. In: Physics and Simulation of Optoelectronic Devices III, SPIE proceedings series, Vol. 2399 (1995), S. 684
H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties (invited). In: SPIE Proc. series, Vol. 3713 (1995), S. 139-149
H. Hillmer ; S. Hansmann ; H. Burkhard ; A. Grabmaier: Design and performance of advanced chirped grating DFB lasers. In: Technical digest of IOOC´95 (1995), S. 36, FB1-3
H. Hillmer ; S. Hansmann ; H. Burkhard ; A. Grabmaier ; E. Kuphal: Application of DFB lasers with individually chirped gratings. In: Laser Diodes and Applications, SPIE Proc. series, Vol. 2382 (1995), S. 211
H. Hillmer ; W. Schlapp ; R. Lösch: Chips aus dem Eis. In: Vision 1/95 (1995), S. 50
H. Hillmer ; H. Burkhard ; E. Seebald ; K. Kiesel: Ultrahigh resolution chirped distributed feedback gratings fabricated by electron-beam lithography using bent waveguides for low-cost photonic components. In: The 38th International symposium on electron, ion, and photon beams (1995), S. 2853-2858 URL..
H. Hillmer: Chirped DFB gratings using bent waveguides to tailor specific laser properties. In: 5th Int. Conf. Laser Technologies ´95, Industrial Lasers and Laser Applications ´95, ILLA´95, Shatura, 24. - 26.4.1995 (1995)
H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties. In: 15th Int. Conf. on Coherent and Nonlinear Optics '95 , ICONO '95 (1995)
H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties. In: 5th Laser Optics Conf. LO ´95, St. Petersburg Russia (1995)
J. Kovac ; H. Schmidt ; C. Kaden ; H.P. Gauggel ; V. Hofsäß ; J. Kuhn ; H. Schweizer ; A. Hase ; H. Künzel ; H. Hillmer: Carrier dynamics of gain-coupled and index-coupled InGaAs/InGaAlAs quantum well DFB lasers. In: Conference on Ultrafast Electronics and Optoelectronics, Dana Point, USA, Technical Digest (1995) (1995)
F. Steinhagen ; H. Hillmer ; S. Hansmann ; S.M. and R.Lösch ; W. Schlapp ; H. Walter ; R. Göbel ; H.W. Dinges ; E. Kuphal ; H.L. Hartnagel ; H. Burkhard: AlGaInAs/InP 1.5 µm DFB laser diodes for high capacity transmission modules. In: Technical digest of IOOC´95 (1995), S. 52, FB2-6
H.W. Dinges ; H. Burkhard ; H. Hillmer ; R. Lösch ; W. Schlapp: Spectroscopic ellipsometry, a useful tool to determine the refractive indices and to study the interfaces of InGaAs and InAlGaAs layers on InP in the wavelength range from 280nm to 1900nm. In: ICFSI-4 Jülich, Formation of Semiconductor Interfaces, Proceedings (1994), S. 676-679
A. Greiner ; T. Kuhn ; H. Hillmer ; S. Hansmann ; H. Burkhard: Carrier transport in quantum well lasers: A comparison between different heterostructures. In: NATO ASI on Quantum transport in ultrasmall devices (1994)
A. Greiner ; T. Kuhn ; H. Hillmer ; S. Hansmann ; H. Burkhard: Influence Of Carrier Transport On The Turn-on Delay In A Separate Confinement Heterostructure Quantum Well Laser. In: Proc. Conference on Lasers and Electro-Optics Europe (1994), S. 419-420
S. Hansmann ; H. Walter ; H. Hillmer ; H. Burkhard: Novel method to optimize complex coupling coefficients by sampled gratings. In: Proc. th IEEE International Semiconductor Laser Conference (1994), S. 167-168
H. Hillmer ; S. Hansmann ; H. Burkhard ; H. Walter ; H. Janning ; R. Göbel: Facet influence on wavelength tunability and linewidth-chirp under high bit rate modulation in InGaAs/InAlGaAs QW DFB lasers. In: Linear and Nonlinear Integrated Optics, SPIE proceedings series, Vol. 2212 (1994), S. 200
H. Hillmer ; H.L. Zhu ; S. Hansmann ; A. Grabmaier ; K. Magari ; H. Burkhard: Tailored DFB laser properties by individually chirped gratings using bent waveguides. In: Proc. th IEEE International Semiconductor Laser Conference (1994), S. 55-56
H. Hillmer: Exciton dissociation controlled diffusivities in thin GaAs/AlGaAs quantum wells, DBP-Telekom (1993)
H. Hillmer ; S. Hansmann ; H. Burkhard: AlzGa1-x-zInxAsySb1-y a promising pentanary material system for optoelectronic devices - two dimensional vertical and parallel valence-band masses for [100] and [111] oriented substrates, DBP Telekom (1993)
H. Hillmer ; H. Zhu ; H. Burkhard: Large wavelength tunability of asymmetric 3-section DFB lasers under cw and pulsed bias. In: Laser Diode Technology and Application, SPIE proceedings series, Vol. 1850 (1993), S. 165
F. Steinhagen ; R. Lösch ; W. Schlapp ; H. Nickel ; S. Hansmann ; H. Hillmer ; H. Janning ; H.L. Hartnagel ; H. Burkhard: MBE grown strained and unstrained InGaAs/InAlGaAs MQW lasers. In: Proc. Fifth International Conference on Indium Phosphide and Related Materials (1993), S. 549-552
S. Hansmann ; H. Hillmer ; H. Burkhard: Theoretical and experimental investigation of inhomogeneously pumped DFB lasers. In: Proceedings ECOC´92, Berlin (1992), S. 233
H. Hillmer: Chirped DFB gratings for optoelectronic components - a new implementation method using bent waveguides. In: DBP-Telekom, FI 65TB31E (1992)
H. Hillmer ; H. Burkhard ; S. Hansmann: Valence-band masses in different two-dimensional materials for the design of quantum devices, DBP Telekom (1991)
H. Hillmer ; S. Hansmann ; H. Burkhard: 1.53 µm InGaAsP-InP first order Lambda/4 shifted DFB lasers with high coupling coefficients. In: Proc. Conference Digest Semiconductor Laser Conference 12th IEEE International (1990), S. 198-199
G. Bacher ; A. Forchel ; H. Hillmer ; H. Nickel ; W. Schlapp ; R. Lösch: Studies of ambipolar transport in InGaAs/GaAs strained layer quantum wells. In: Proceedings of 20th International Conference on Semiconductor Physics, Thessaloniki (1989)
H. Hillmer ; G. Mayer ; A. Forchel ; K.S. Löchner ; E. Bauser: Optical Time-of-Flight investigation of ambipolar carrier transport in specially designed GaAs/GaAlAs quantum well structures. In: Springer series in Electronics and Photonics, High speed electronics 22 (1986), S. 97
F. Martelli ; R. Zachai ; H. Hillmer ; G. Mayer: Radiative recombination of two dimensional carriers in Si-MOS structures: Time dependence. In: Proceedings of the 18th International Conference on the Physics of Semiconductors, Stockholm (1986)
A. Forchel ; B. Laurich ; G. Tränkle ; H. Hillmer ; G. Mahler ; T.X. Hoai ; A. Axmann: High speed electron-hole plasma transport in Si. In: Proceedings of the 17th International Conference on the Physics of Semiconductors, San Francisco (1985)

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M. K. Hasan, S. Baby, S. Muringakodan, A. Nandakumar, M. S. Q. Iskhandar, V. Hillmer, Q. Li, G. Xu, and H. Hillmer: Energy Saving and Amortization Time Simulation for a Model Room with MEMS Smart Glazing, Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house) Vol. 77, pp. 163-188 (2021), ISBN 978-3-87480-369-4.

H. Hillmer, C. Woidt, Aliaksei Kobylinskiy, Matthias Kraus, André Istock, M. S. Q. Iskhandar, R. Brunner and T. Kusserow: Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology—A Comparison of Size Requirements, Performance, and New Concepts, Photonics, Vol. 8., 332 (2021), doi.org/10.3390/photonics8080332
H. Hillmer, C. Woidt, A. Istock, A. Kobylinskiy, D.T. Nguyen, N. Ahmed, R. Brunner and T. Kusserow: Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers. Nanomaterials 11(1), 164 (2021), DOI: 10.3390/nano110101641
H. Hillmer, M.S.Q. Iskhandar, M.K. Hasan, S. Akhundzada, B. Al-Qargholi, A. Tatzel: MOEMS micromirror arrays in smart windows for daylight steering. J. Optical Microsystems 1(1), 014502-1 - 014502-18 (2021), DOI:10.1117/1.JOM.1.1.014502
S. Nazemroaya, M. Iskhandar, Md K. Hasan, Q. Li, H. Hillmer: Concepts for clear View through 3D Structured Surfaces of MEMS Smart Glass: Design, Implementation, Characterization and Validation. Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house), Vol. 76, S. 101-115, ISBN: 978-3-87480-364-9 (2020)
H. Hillmer, M. Iskhandar, Q. Li: Smart glass based on micromirror arrays: Fundamentals and applications in daylight steering, energy saving and personal lighting. In: Technical digest of 22nd Annual Meeting of China Association for Science and Technology, China Germany Young Scientists Forum, Qindao China, (2020)
M. S. Q. Iskhandar, B. Al-Qargholi, M. M. Khan, A. Tatzel, H. Luo, S. Nazemroaya, Q. Li, and H. Hillmer: Development of optical MEMS-based micromirror arrays for smart window applications: Implementation of subfield addressing and reliability measurements. Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house) Vol. 52, pp. 93-107, ISBN 978-3-87480-357-1 (2019)
M. Khan, B. Al-Qargholi, M. Iskhandar, S. Akhundzada, A. Tatzel, H. Hillmer: MEMS-basierte Mikrospiegel-Arrays für eine aktive Lichtlenkung in intelligenten Fenstern. In: Jahrbuch Oberflächentechnik, Leuze Verlag, (Yearbook surface technology, Leuze publishing house) Band 74, pp. 119-132, (2018)
H. Hillmer, B. Al-Qargholi, M. M. Khan, N. Worapattrakul, H. Wilke, C. Woidt, A. Tatzel: Optical MEMS-based micromirror arrays for active light steering in smart windows. In: Japanese Journal of Applied Physics, Vol. 57, No. 8S2, 08PA07, pp. 1-13, (2018)
H. Hillmer: High resolution 3D nanoimprint lithography. Verhandlungen mit der DPG, ISSN 0420-0195, pp. 92 (2017)
B. Khudhair, V. Viereck, H. Hillmer: The Application of Micromirrors in Architecture to Yield more Natural Light. In: IGS, Intelligent Glass Solution (2014)
A. Jäkel, Q. Li, V. Viereck, H. Hillmer: Active Windows for Daylight Guiding Applications. A. Voß (Hrsg.): Nanotechnology and Energy: Pan Stanford Publishing (2010)
J. Sonksen, M. Ahmad, N. Storch, H. Krause, S. Blom, A. Pötzl, H. Hillmer: Controlling and Tuning the Emission of Semiconductor Optical Amplifier for Sensor Application by Means of Fiber Bragg Gratings. In: Proceedings of the 8th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronics, pp. 59-63 (2009)
V. Viereck, Q. Li, A. Jäkel, H. Hillmer: Large-area applications of optical MEMS: micromirror arrays guide daylight, optimize indoor illumination. In: Photonik International 2, pp. 48-49 (2009)
S. Wittzack, F. Köhler, X. Wang, O. Setyawati, T. Woit, A. Albrecht, M. Engenhorst, S. Schudy, C. Woidt, M. Bartels, H. Hillmer: Hochpräzise Nanoimprint-Templates für 3D-Strukturen (invited). In: Galvanotechnik, Band 100, Heft 10, pp. 2376-2382 (2009)
M. Bartels, F. Köhler, S. Wittzack, X. Wang, H. Hillmer: Ultra precise Nanoimprint templates (invited). In: NanoS 03.08, pp. 18-22 (2008)
N. Dharmarasu, H. Hillmer: Compound semiconductors. In: Y.B. Gianchandani, O. Tabata, H. Zappe (Hrsg.): Comprehensive Microsystems: Elsevier, Amsterdam,pp. 25-55 (2008)
H. Hillmer: Die vielen Väter des Transistors - Meilensteine in der Geschichte des Festkörperverstärkers (invited). In: Physik in unserer Zeit (2008)
H. Hillmer: Die Meilensteine bei der Entwicklung des Transistors (invited). In: Zeitschrift für Physik (2008)
V. Viereck, J. Ackermann, Q. Li, A. Jäkel, J. Schmid, H. Hillmer: Sun Glasses for Buildings based on Micro Mirror Arrays: Technology, Control by Networked Sensors and Scaling Potential (invited). In: 5th International IEEE Conference on Networked Sensing Systems (INSS) 2008, Technical Digest, pp. 135-139 (2008)
H. Wacker, J. Börcsök, H. Hillmer: Redundant Data Transmission and Nonlinear Codes (invited). In: WSEAS Transactions on Communications 7, pp. 594-604 (2008)
H. Hillmer, S. Hansmann: Semiconductor lasers. In: F. Träger (Hrsg.): Springer Handbook of Lasers and Optics: Springer Verlag, pp. 695-726 (2007)
H. Hillmer, S. Irmer, F. Römer, A. Hasse, J. Daleiden, C. Prott, S. Hansmann, M. Strassner: MOEMS vertical-air-cavity filters are widely and continuously tunable around 1.55 microns. In: SPIE Newsroom 10.1117/2.1200601.0005, pp. 1-4 (2006)
H. Hillmer, J. Salbeck: 8. Materialien der Optoelektronik - Grundlagen und Anwendungen. In: R. Kassing (Hrsg.): Bergmann/Schaefer: Lehrbuch der Experimentalphysik, Festkörper: Walter de Gruyter Verlag, pp. 707-820 (2005)
H. Hillmer: Periodische Nanostrukturen in der Photonik - Grundlagen, natürliche Vorbilder, Herstellung und Anwendungen in der hochbitratigen Kommunikationstechnik. In: Telekommunikation Aktuell 58, pp. 10-18 (2004)
H. Hillmer, F. Träger: Einführung in die Nanotechnologie. In: Telekommunikation Aktuell 58, pp. 1 (2004)
H. Hillmer, R. Germann: Introductory article: Photonic Materials for Optical Communications. In: MRS Bulletin 28, pp. 340-344 (2003)
H. Hillmer: Prolegomena und Laudatio zu Von der Radartechnik zur modernen Kommunikationstechnik (invited). In: Telekommunikation Aktuell 56, pp. 1-2 (2002)
H. Hillmer, J. Daleiden, C. Prott, F. Römer, S. Irmer, V. Rangelov, A. Tarraf, S. Schüler, M. Strassner: Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices (invited). In: Applied Physics B: Lasers and Optics 75, pp. 3-13 (2002)
H. Hillmer: Der Transistor - die Entwicklung von den Anfängen bis zu den frühen integrierten Schaltungen. In: Der Fernmeldeingenieur 54, pp. 1-107 (2000)
H. Hillmer, S. Marcinkevicius: Optically detected carrier transport in III/V semiconductor QW structures: experiments, model calculations and applications in fast 1.55 µm laser devices (invited). In: Applied Physics B: Lasers and Optics 66,pp. 1-17 (1998)
H. Hillmer: Heterostructures in the AlGaInAs material system: MBE growth and characterization (review paper). In: Research Trends 3 (1997), pp. 159-185
H. Hillmer: Bent waveguides improve DFB laser performance: Fiberoptic components handbook (invited). In: Laser focus world 31, pp. 117-122 (1995)

Erteilte Patente

H. Hillmer; G. Xu: Lichttechnisches modul für eine gebäudefassade (Lighting module for a building facade). EP 4102024 B1 (2024)
H. Hillmer: Verfahren Und Anordnung Zur Herstellung Von Nano-Imprintstempeln Sowie Mikromechanisch Abstimmbares Filter/Detektor-Array (Method and arrangement for the production of nano-imprint stamps ...). EP 2268569 B1 (2019)
B. Khudhair; V. Viereck; H. Hillmer: Verfahren zur Herstellung einer Mikrostruktur in einer Fotolithographietechnik (Microstructure and method of producing a microstructure in a photolithography technique). EP 3362854 B1 (2022)
H. Hillmer; F. Pilger; S. Reuter; M. Smolarcyk; N. Worapattrakul: Nano-Formgebungsstruktur (Nanoshaping-Structure). EP 2771161 B1 (2017)
R. Brunner; H. Hillmer; A. Gatto: Spektralsensor zur spektralen Analyse einfallenden Lichts, DE 10 2014 108 138 B4 (2016)
H. Hillmer : Optisches Filter und Verfahren zu seiner Herstellung. DE 10 2006 039 071 (2012)
H. Hillmer; T. Kusserow: Optische Dünnschichtstruktur mit einer verteilten Kavität. DE 102009026449 B4 (2014)
H. Hillmer: Sensorvorrichtung und Verfahren zur Ermittlung einer physikalischen Größe (Sensor device and process for determining a physical value). DE 10 2004 037519 B4 (2008), US 81 20075 B2 (2012), EP 1771720 B1 (2012)
H. Hillmer: Mikrolaser-Bauelement und Verfahren zu dessen Herstellung. DE 103 31 586 B4 (2006)
H. Hillmer ; J. Schmid ; I. Stadler: System zur Gestaltung von großen Flächen an Gebäuden oder mobilen Systemen durch großflächige Beugungsmuster. DE 103 58 812 B4 (2006)
H. Hillmer ; J. Schmid ; I. Stadler: Mikrospiegelarray. DE 103 58 967 B4 (2006), EP 1700152 B1 (2008), US 7677742 B2 (2010), AT 407382 E (2008)
E. Ataro; J. Daleiden; D. Gutermuth; H. Hillmer; S. Irmer; C. Prott; F. Römer; A. Tarraf: Verfahren zur Herstellung eines mikromechanischen Bauelements und damit hergestelltes Bauelement. DE 103 57 421 B4 (2008)
J. Daleiden; H. Hillmer; S. Irmer; C. Prott; V. Rangelow; F. Römer; S. Schüler; A. Tarraf: Mikromechanisch aktuierbares, optoelektronisches Bauelement. DE 103 18 767 B4 (2008)
J. Daleiden; H. Hillmer; S. Irmer; A. Tarraf: Leitfähige Haltepfosten in luftspaltbasierenden, optoelektronischen Bauelementen. DE 103 53 546 B4 (2007)
W. Betz; R. Göbel; H. Hillmer; R. Lösch; A. Pöcker; W. Schlapp: Verfahren zur Herstellung einer kalibrierten Längenskala im Nanometerbereich für technische Geräte, die der hochauflösenden bis ultrahochauflösenden Abbildung von Strukturen dienen (Method for manufacturing a calibrated scale in the nanometer range for technical devices used for the high resolution or ultrahigh-resolution imaging of structures and such scale). DE 196 04 348 C2 (2003), US 6231668 B1 (2001).
H. Hillmer ; B. Klepser: Verfahren und Anordnung zur Wellenlängen-Abstimmung einer optoelektronischen Bauelemente-Anordnung (Method and device for tuning the wavelength of an optoelectronic component arrangement). EP 1036428 B1 (2001), CA 2299452 C (2005), AT 206251 E (2001), US 7054340 B1 (2006)
H. Hillmer ; B. Klepser: Wellenlängenabstimmbares optoelektronisches Bauelement. EP 976183 B1 (2002), US 6,208,793 B1 (2001), JP 4232912 B2 (2001), AU 6090198 A (1998), AT 219609 E (2002)
H. Hillmer; B. Klepser: Verfahren zur Wellenlängen-Abstimmung einer optoelektronischen Bauelemente-Anordnung. EP 956625 B1 (2004), CA 2279632 C (2005), AT 265099 E (2004), US 6219362 B1 (2001)
H. Hillmer: Verfahren zur Ausnutzung scheibenförmigen Ausgangsmaterials bei der Herstellung optoelektronischer Bauelemente mit Gittern variabler Gitterperiode (Method for optimized utilization of base material in the manufacture of optoelectronic components with variable-period gratings). EP 747739 B1 (2006), US 5834158 A (1998), CA 2177650 C (2007), AT 326020 E (2006)
H. Hillmer: Optoelektronisches Halbleiter-Bauelement mit verbesserter Wellenlängen-Durchstimmbarkeit und reduzierter optischer Linienbreite. DE 4420389 B4 (2007)
H. Hillmer: Verfahren zur Herstellung eines optoelektronischen Bauelements mit einer definierten axialen Variation des Kopplungskoeffizienten und definierter axialer Verteilung der Phasenverschiebung (Process for the production of an optoelectronic component having a defined axial variation of the coupling coefficient and a defined axial distribution of the phase shift). US 5601731 A (1997)
H. Hillmer: Optoelektronisches Multi-Wellenlängen Bauelement (Optoelectronic Multiwavelength component). DE 44 32 410 B4 (2007), EP 704946 B1 (2003), US 5,600,743 A (1997), AT 215353 E (2003)

Eingereichte Patentschriften

Winkelbasiertes Filterspektrometer 2023
R. Brunner, M. Kraus, A. Kobylinskiy, H. Hillmer, Filterbasiertes Spektrometer, DE 10 2022 122 543 A1 (2022)
H. Hillmer, G. Xu, MEMS Display WO 2023117196 A1 (2022), EP 4202528 A1 (2021)
G. Schulze, G. Xu, Transparente Verbundstruktur mit einer Mikrospiegelvorrichtung, DE 10 2021 120 910.2 (2021)
H. Hillmer, Spiegel-Shutter Array, DE 10 22020 123 024 A1 (2020)
M. Feldmann; U. Ha; H. Heim; H. Hillmer; P. Sälzer: Kunststoffverbundwerkstoff mit mindestens einem in eine Kunststoffmatrix eingebrachten Füllstoff. DE 10 2018 119 964 A1 (2018)
D. Bienhaus; H. Hillmer: Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung. DE 10 2008 009 215 A1 (2008)
H. Hillmer ; M. Rohrbach: Verfahren und Vorrichtung zur Reflexion von Strahlung im EUV- oder Röntgen-Wellenlängenbereich sowie Verfahren zur Herstellung eines Materials mit einem dafür geeigneten Brechungsindex. DE 10 2005 027 422 A1 (2005)
H. Hillmer; T. Baumert: Multimembranbasiertes optoelektronisches Bauelement mit photonischer Kristallstruktur. (2004)
H. Hillmer; J. Schmid; I. Stadler: Oberflächengestaltung mit 2-dimensionalen Anordnungen von diffraktiven, optischen Elementen. DE 10358937 A1 (2003)
H. Hillmer; B. Klepser: Optoelektronisches Bauelement mit räumlich einstellbar Temperaturverteilung. (Optoelectronic component). DE 19717545 A1 (1997), WO 1998038710 A1 (1998), AU 1998067252 A (1998)
H. Hillmer: Optoelektronisches Bauelement mit einem Rückkopplungsgitter mit axial veränderbarer Korrugationsperiode. DE 19500135 A1 (1995)
H. Hillmer: Optoelektronisches Bauelement mit axialer Gitterperiodenmodulation. DE 19500136 A1 (1995)
S. Hansmann; H. Hillmer: Optoelektronisches Bauelement mit verteilter Rückkopplung und variierbarem Kopplungskoeffizient. DE 4334525 A1 (1993)
H. Hillmer: 3-Sektions-DFB-Halbleiterlaser mit erweitertem Wellenlängendurchstimmungsbereich. DE 4301830 A1 (1993)
H. Hillmer: Optoelektronisches Bauelement mit Rückkopplungsgitter, mit axial quasi-kontinuierlich und nahezu beliebig variierbarem Gitterkopplungskoeffizienten, mit quasi-kontinuierlich axial verteilbarer Brechungsindex Variation, sowie mit axial nahezu beliebig verteilbarer und variierbarer Phasenverschiebung. DE 4322164 A1 (1993)
H. Hillmer: Auf DFB oder DBR-Gitter basierendes optoelektronisches Bauelementmit quasi-kontinuierlich axial verteilbarer Brechungsindex Variation, mit axial beliebig verteilbarer und variierbarer Phasenverschiebung, sowie mit axial quasi-kontinuierlich variierbarem Gitter-Kopplungskoeffizienten. DE 4322163 A1 (1993)
H. Hillmer: Lichtwellenleiter zur kontinuierlichen Phasenverschiebung der DFB Gitterperiode für auf DFB Gitterfeldern mit konstanter Gitterperiode basierende optoelektronische Elemente. DE 423350 A1 (1992)

Eingeladene Vorträge

SPIE Webinar “Microsystems for Spectral Sensing” Miniaturized static and tunable Fabry Pérot filter arrays for optical spectral sensorics - comparison with other methodologies, 23.03.2023, https://www.spiedigitallibrary.org/jom-webinar-microsystems-for-spectral-sensing.
Smart glass MEMS micromirror arrays for personalized daylight steering, energy saving, and 3D self-assembly. The Society of Chinese Physicists in Germany (GCPD) annual meeting, Berlin, 16.09.2022
Optical MEMS sensors and actuators for smart personal environments: Micromirror arrays for personalized light steering and energy saving, Fabry Pérot filter arrays, IHFG, University of Stuttgart 12.5.2022
Physics of various miniaturized spectrally tunable sensors: comparison of limits in minimum size and performance, International Webinar on Physics, Optics, Photonics & Lasers, online conference, March 04-05, 2022
Warum Miniaturisierung von MEMS Strukturen auf großen Flächen ? Potenziale, gesellschaftlicher Nutzen für den Klimawandel und Herausforderungen für die Messtechnik, 35. Messtechnisches Kolloquium, Bruderkirche, Kassel, 22.9.2021
Intelligente Fenster durch nanotechnologische und mikrosystemtechnische Technologien, Tagungsreihe: Materials for the European Green Deal, Hessen Agentur, online-presentation 11.7.2021
Smart Glass based on micromirror arrays, Key note speech, Association for Science and Technology, Qingdao 13.08.2020
Optical MEMS based micromirror arrays: fabrication, characterization and potential applications in smart active windows, Optical MEMS and Nanophotonics, Daejeon, Südkorea 31.07.2019
“Presentation on Project Nanoscale”, China Society for the Promotion of Science and Technology Commercialization, Peking, China (2018)
Smart personal environments based on optical sensors and actuators: Active windows and nanospectrometers in applications and business case”, Sino German Science and Technology Park, Jimo, China (2018)
Sensors and Actuators for Optical Smart Personal Environments: Design, Micromachining, Nanoimprinting and Characterization, MJIIT University of Technology, Malaysia (2018)
H. Hillmer: Methodology of 3D nanostructurization: applications for sensors and actuators in smart personal environments and for pulmonal drug application using 3D nanoparticles, Leibniz-Institut für Festkörper- und Werkstoffforschung (IFW), Dresden, 02.02.2018
H. Hillmer: MASH - Multifunctional Anisotropically Shaped Hybrid-Particles, CINSaT Newsletter, pp. 15-16, 1/2018
H. Hillmer: Der Laser: Aufbau, Funktionsweise und Anwendungen(mit in den Vortrag integrierter Lasershow), VDE Kassel, 14.12.2017
H. Hillmer: Transmission controllable glazing, NEXT Buildings Newsletter, Dez. 2017, p. 10
H. Hillmer: Smart personal environments based on micromachined nanophotonics for active windows and food quality sensorics, Keio University, Tokyo, Japan, 24.11.2017
H. Hillmer: MEMS based micromirror arrays ,MOC17, Tokyo, Japan, 22.11. 2017
H. Hillmer: Report on workpackage 2 - R&D on transmission controllable glazings, Lyon, Frankreich, 19.10.2017
H. Hillmer: Schwerpunkt Elektronik und Photonik, Einführungstage FB16, Kassel,17.10.2017
H. Hillmer: Faszination Elektrotechnik, Tag der Technik, Kassel, 27.09.2017
H. Hillmer: Nanophotonics for medical-, information- and engergy-technology, International Summer University (ISU) Nano, Kassel, 12.07.2017
H. Hillmer, Laudatio Bertha-Benz Preis, Heidelberg, 01.06.2017
H. Hillmer: Schwerpunkt Elektronik und Photonik, Tag der offenen Tür, Universität Kassel, 20.04.2017
H. Hillmer: High resolution 3D nanoimprint lithography; Symposium on Nanostructuring beyond Conventional Lithography, Dresden, 22.03.2017
H. Hillmer: 3D Nanostructures, Frühjahrkolloquium CINSaT, Friedrichroda, 15.02.2017
H. Hillmer: Functionalizable particles with magnetic properties, CINSaT Newsletter, pp.14-15, 1/2017
H. Hillmer; A. Istock; Y. Shen; U.-M. Ha; T. Meinl; C. Woidt: Potentiale einer berührungslosen optischen Messtechnik für Backindustrie mit dem Nanospektrometer Sensor: Baker's Day, Bremerhaven, 3.3.2016, Technical Digest, S. 11-12 (2016)
H. Hillmer: High Resolution 3D Nanoimprint and MEMS Technologies for Energy Saving, Nanosensorics and Pharmacy (invited): Technical Digest of SINC 2014, Riyadh, 32-34 (2014)
Fabrication of Nanospectrometers for Medical Devices with High Resolution 3D Nanoimprint Lithography,Symposium on Nanoimprint Lithography - the big picture, Delft University of Technology, Netherlands, 27.06.2012
Nanotechnology for advanced energy applications: Micro-mirror arrays for intelligent light steering, 1st Saudi International Nanotechnology Conference 2010, Riyadh, Saudi Arabien, 29.11.2010
Micromachining: Foundations, Technological Fabrication and Selected Applications such as "Sunglasses for the Office Window" (lecture and experiments), International Summer School "Act-Control-Move: Beyond Networked Sensors" + "Internet of things", Leibniz Zentrum für Informatik Dagstuhl, organisiert von ETH Zürich, 17.8.2010
High vertical resolution 3D nanoimprint technology and its application in optical nanosensors (invited talk), International Conference on advances in molecular nonlinear optics AMARIS, Paris-Cachan, 28.5.2010
Sonnenlichtlenkende Mikrospiegelarrays für effiziente Energietechnologien (invited talk), 8.GRE-Kongress "Effizienz Bauen" Kassel, 23.4.2010
J. Sonksen ; M. Ahamd ; N. Storch ; H. Krause ; S. Blom ; A. Pötzl ; H. Hillmer: Controlling and Tuning the Emission of Semiconductor Optical Amplifier for Sensor Application by Means of Fiber Bragg Gratings: 8th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronics (MINO ´09) (2009)
Sun Glasses for Buildings based on Micro Mirror Arrays: Technology, Control by Networked Sensors and Scaling Potential (invited), 5th: Conf. On Networked Sensing Systems (INSS), Kanazawa, Japan, 19.6.2008
H. Wacker ; J. Börcsök ; H. Hillmer: Redundant Data Transmission via Different Types of Binary Channels (invited): Proceedings of the 7th WSEAS Int. Conf. on Applied Computer & Applied Computational Science (ACACOS ´08) (2008), S. 609-615
H. Hillmer ; T. Kusserow ; N. Dharmarasu ; S. Irmer ; J. Daleiden ; A. Hasse ; M. Bartels ; B. Vengatesan ; T. Hayakawa: Micromachined tunable 1.55µm vertical cavity, multiple air-gap filters and lasers: fabrication, characterization, scaling potential and applications (invited): technical Digest, OECC/IOOC 2007 Yokohama, 12E2-1 (2007), S. 428
H. Hillmer ; J. Schmid: Tandem Vortrag: Nano- und Mikrotechnologien im Dienste der nachhaltigen Entwicklung: 4. Nanotechnologieforum Hessen: What´s next for International Nanomarkets (2007)
H. Hillmer: Micromirror arrays: sun glasses for buildings. (invited, key note): NanoEquity Europe, Hilton Frankfurt (2007)
H. Hillmer: Nanotechnology in optics: foundations, implementations, applications and future potential: 6th WSEAS International Conference on APPLIED COMPUTER SCIENCE (ACS´06) (2006)
H. Hillmer: Wavelength division multiplexing (WDM) for secure optical data communication in industrial computers, process control and fabrication systems: 6th WSEAS International Conference on APPLIED COMPUTER SCIENCE (ACS´06) (2006)
H. Hillmer ; A. Tarraf ; F. Riemenschneider ; S.I. and H.Halbritter ; J. Daleiden ; F. Römer ; C. Prott ; E. Ataro ; A. Hasse ; M. Strassner ; S. Hansmann ; P. Meissner: Wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for filters and VCSELs using micromachined actuation (Invited Paper) (Proceedings Paper): SPIE Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks (2005), S. 14-28
J. Daleiden ; S. Irmer ; E. Ataro ; C. Prott ; V. Rangelov ; F. Römer ; M. Strassner ; A. Tarraf ; H. Hillmer: Continuously tunable air-gap micro-cavity devices for optical communication systems: SPIE Proc. Vol. 4871 (2003), S. 145-159
H. Hillmer ; J. Daleiden ; S. Irmer ; F. Römer ; C. Prott ; A. Tarraf ; M. Strassner ; E. Ataro ; T. Scholz: Potential of micromachined photonics: miniaturization, scaling and applications in continuously tunable vertical air-cavity filters (invited): SPIE Proc. series Vol. 4947 (2003), S. 196-211
H. Hillmer ; J. Daleiden ; C. Prott ; F. Römer ; S. Irmer ; E. Ataro ; A. Tarraf ; D. Gutermuth ; I. Kommallein ; M. Strassner: Ultrawide continuously tunable 1.55µm vertical air-cavity wavelength-selective elements for VCSELs using micromachined electrostatic actuation (invited): SPIE Proc. series Vol. 5246 (2003), S. 18-32
H. Hillmer: Ultra-wide continuously tunable 1.55µm vertical air-cavity wavelength selective elements for VCSEL´s using micromachined electrostatic actuation: ITCOM 2003, Orlando, USA (2003)
H. Hillmer: Potential of micromachined photonics: miniaturization, scaling and applications in continuously tunable vertical air-cavity filters: Phot. Fabr. Europe 2002, Brügge, Belgium (2002)
H. Hillmer: Continuously tunable air gap microcavity devices for optical communication systems. (invited): ITCOM 2002, Boston, USA (2002)
H. Hillmer ; C. Prott ; M. Strassner ; N. Chitica ; J. Daleiden: Mikrosystemtechnische Konzepte in der optischen Datenübertragung: Neuartige abstimmbare DFB-Laser und Bragg-Filter (invited): Tagungsband "Optik in der Rechentechnik", Hagen 27.-28.9.2000 (2000), S. 75-85
H. Hillmer ; B. Klepser: Semiconductor lasers for high bit rate optical data transmission - Investigations to increase the yield of laser arrays (invited): SPIE Proc. series, Vol. 3688 (1998), S. 308-317
H. Hillmer ; S. Marcinkevicius: Ultrafast modulation of 1.55µm AlGaInAs/InP DFB QW laser structures: optically detected carrier dynamics, limiting mechanisms and applications (invited): SPIE Proc. series, Vol. 3734 (1998), S. 282-293
H. Hillmer ; S. Marcinkevicius: Optically detected carrier transport and capture in III/V- semiconductor QW structures: high resolution experiments, model calculations and applications in fast 1.55µm lasers (invited): SPIE Proc. series, Vol. 3683 (1998), S. 196-207
H. Hillmer: Semiconductor lasers for high bit rate optical data transmission. (invited): Semiconductor Laser workshop, Optoelectronic of mesoscopic solids Marburg, Germany (1998)
H. Hillmer: Optically detected carrier transport and capture in III/V-semiconductor QW structures: high resolution experiments, model calculations and applications in ultrafast 1.55µm lasers: IX Conference on Laser Optics'98, LO'98 St. Petersburg Russia (1998)
H. Hillmer: Ultrafast modulation of 1.55µm AlGaInAs/InP DFB QW lasers: 16th Int. Conf. on Coherent and Nonlinear Optics '98, ICONO '98, Moscow Russia (1998)
H. Hillmer: Semiconductor lasers for high bit rate optical data transmission. (invited): 6th Int. Conf. on Industrial Lasers & Laser Applications'98, ILLA'98, Shatura (1998)
H. Hillmer: Chirped DFB gratings using bent waveguides to tailor specific laser properties (invited): SPIE Proc. series Vol. 2713 (1996), S. 139-149
H. Hillmer ; A. Greiner ; F. Steinhagen ; R. Lösch ; W. Schlapp ; E. Binder ; T. Kuhn ; H. Burkhard: Carrier and photon dynamics in transversally asymmetric AlGaInAs/InP MQW lasers (invited): SPIE Proc. series, Vol. 2693 (1996), S. 352-368
H. Hillmer: Carrier and photon dynamics in vertically asymmetric high-speed InAlGaAs/InP MQW lasers: Lasers and Integrated Optoelectronics OE/LASE ´96, San Jose, California USA (1996)
H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties (invited): SPIE Proc. series, Vol. 3713 (1995), S. 139-?149
H. Hillmer: Chirped DFB gratings using bent waveguides to tailor specific laser properties: 5th Int. Conf. Laser Technologies ´95, Industrial Lasers and Laser Applications ´95, ILLA´95, Shatura, 24. - 26.4.1995 (1995)
H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties: 15th Int. Conf. on Coherent and Nonlinear Optics '95 , ICONO '95 (1995)
H. Hillmer: Chirped DFB gratings obtained by bent waveguides to tailor specific photonic device properties: 5th Laser Optics Conf. LO ´95, St. Petersburg Russia (1995)