Publications 2021

Conference Proceedings

M. Künne, S. Hagemeier, E. Käkel, H. Hillmer, P. Lehmann
Investigation of measurement data of low-coherence interferometry at tilted surfaces in the 3D spatial frequency domain
tm - Technisches Messen 88, S1 (2021) 65–70
L. Hüser, P. Lehmann
Analysis of resolution enhancement through microsphere-assisted interferometry in the 3D spatial frequency domain
SPIE Proceedings 11782 (2021) 117820R (9pp)
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M. Künne, T. Pahl, P. Lehmann
Spatial-frequency domain representation of interferogram formation in coherence scanning interferometry
SPIE Proceedings 11782 (2021) 117820T (11pp)
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T. Pahl, S. Hagemeier, M. Künne, C. Danzglock, N. Reinhold, R. Schulze, M. Siebert, P. Lehmann
Vectorial 3D modeling of coherence scanning interferometry
SPIE Proceedings 11783 (2021) 117830G (11pp)

H. Serbes, P. Gollor, S. Hagemeier, P. Lehmann
Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications
Applied Sciences 11, 20 (2021) 9642, 14pp.
P. Lehmann, S. Hagemeier, T. Pahl
Three-dimensional Transfer Functions of Interference Microscopes
Metrology 1 (2021) 122-141
P. Lehmann, T. Pahl
Three-dimensional transfer function of optical microscopes in reflection mode
J. Microsc. 284 (2021) 45-55
L. Hüser, P. Lehmann
Microsphere-assisted interference microscopy for resolution enhancement
tm - Technisches Messen 88, 5 (2021) 311–318
M. Schake, J. Riebeling, P. Lehmann, G. Ehret
Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry
Meas. Sci. and Technol. 32 (2021) 105107 (17pp)
T. Pahl, S. Hagemeier, J. Bischoff, E. Manske, P. Lehmann
Rigorous 3D modeling of confocal microscopy on 2D surface topographies
Meas. Sci. and Technol. 32 (2021) 094010 (15pp)
P. Lehmann, M. Künne, T. Pahl
Analysis of interference microscopy in the spatial frequency domain
J.Phys. Photonics 3 (2021) 014006