Publications 2022
Conference Proceedings
- L. Hüser, T. Pahl, P. Lehmann
Polarization dependency of the 3D transfer behavior in microsphere enhanced interferometry
EPJ Web Conf., 266 (2022) 10006
- T. Pahl, J. Breidenbach, P. Lehmann
Quasi-analytical and rigorous modeling of interference microscopy
EPJ Web Conf., 266 (2022) 10013
- P. Gollor, P. Lehmann
Tiefenscannende Interferometrie mit Unterabtastung in Kombination mit einem neuartigem RGB-Doppelpuls-Korrelations- Algorithmus zur Topographieerfassung
tm - Technisches Messen 89, S1 (2022) 14–19
- L. Hüser, T. Pahl, M. Künne, P. Lehmann
The use of microsphere assistance in interference microscopy with high numerical aperture objective lenses
SPIE Proceedings 12152 (2022) 1215204
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- H. Serbes, S. Hagemeier, P. Lehmann
Mirau-type coherence scanning interferometer with integrated vibration compensation
SPIE Proceedings 12137 (2022) 1213707
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Journals
- L. Hüser, T. Pahl, M. Künne, P. Lehmann
Microsphere assistance in interference microscopy with high numerical aperture objective lenses
Journal of Optical Microsystems 2(4) (2022) 044501 - T. Pahl, L. Hüser, S. Hagemeier, P. Lehmann
FEM-based modeling of microsphere-enhanced interferometry
Light: Advanced Manufacturing 3(49) (2022)
- M. Künne, S. Hagemeier, E. Käkel, H. Hillmer, P. Lehmann
Investigation of measurement data of low-coherence interferometry at tilted surfaces in the 3D spatial frequency domain
tm - Technisches Messen 89, 7-8 (2022) 515-524
- M. Siebert, S. Hagemeier, T. Pahl, H. Serbes, P. Lehmann
Modeling of fiber-coupled confocal and interferometric confocal distance sensors
Meas. Sci. Technol. 33 (2022) 075104
- X. Xu, S. Hagemeier, P. Lehmann
Outlier Elimination in Rough Surface Profilometry with Focus Variation Microscopy
Metrology 2 (2022) 263-273